公开(公告)号：US5744073A

公开(公告)日：1998-04-28

申请号：US531280

申请日：1995-09-20

申请人： Yasukazu Nihei ,  Yoji Okazaki ,  Akinori Harada

发明人： Yasukazu Nihei ,  Yoji Okazaki ,  Akinori Harada

IPC分类号： G02F1/37 ,  G02B5/18 ,  G02F1/35 ,  G02F1/355 ,  G02F1/377 ,  H01S3/109 ,  B29D11/00 ,  G02B1/00

CPC分类号： G02B5/1857 ,  G02F1/3558 ,  G02F1/3775 ,  G02F2001/3548

摘要： A method for fabricating domain reversals in predetermined periods without the occurrence of localized variations in refractive index. Localized areas of a unipolarized ferroelectric material which is made of an LiNbO.sub.3 substrate, or the like, and possesses a nonlinear optical effect are exposed to electron beams in a predetermined pattern, so that domain reversals are defined. Thereafter, this ferroelectric material is subjected to a heat treatment at a temperature below the Curie temperature of the ferroelectric material.

摘要翻译： 一种在预定周期内制造畴反转而不发生折射率局部变化的方法。 由LiNbO 3衬底等制成且具有非线性光学效应的单极化铁电材料的局部区域以预定图案暴露于电子束，从而定义畴反转。 然后，在低于铁电体的居里温度的温度下对该铁电体进行热处理。

公开(公告)号：US5668578A

公开(公告)日：1997-09-16

申请号：US271978

申请日：1994-07-08

申请人： Yasukazu Nihei ,  Akinori Harada

发明人： Yasukazu Nihei ,  Akinori Harada

IPC分类号： G02F1/35 ,  G02F1/355 ,  G02F1/37 ,  G01D9/00

CPC分类号： G02F1/3558

摘要： A ferroelectric substance such as LiNbO.sub.3 that possesses a unipolarized non-linear optical effect is etched on its surface. An earth electrode is formed on one surface (the +z plane) of a ferroelectric substance. Domain reversals are created on the opposite side (the -z plane) of the substrate relative to the +z plane by irradiating electron beams onto the -z plane.

摘要翻译： 在其表面上蚀刻具有单极化非线性光学效应的诸如LiNbO 3的铁电物质。 在铁电物质的一个表面（+ z平面）上形成接地电极。 通过将电子束照射到-z平面上，在衬底相对于+ z平面的相对侧（-z平面）上产生畴反转。

公开(公告)号：US20120098896A1

公开(公告)日：2012-04-26

申请号：US13281132

申请日：2011-10-25

申请人： Yasukazu Nihei

发明人： Yasukazu Nihei

IPC分类号： B41J2/045 ,  B23P11/00

CPC分类号： B41J2/14233 ,  B41J2/1433 ,  B41J2/1606 ,  B41J2/1628 ,  B41J2/1631

摘要： A droplet ejection head includes: a nozzle plate which has a nozzle aperture for ejecting droplets of liquid; a flow channel structure including a pressure chamber which contains the liquid and is connected to the nozzle aperture through a flow channel; and a pressure generating element which applies pressure to the liquid in the pressure chamber, wherein an ejection surface of the nozzle plate where the droplets of the liquid are ejected is made of a fluorine-containing DLC film.

摘要翻译： 液滴喷射头包括：喷嘴板，其具有用于喷射液滴的喷嘴孔; 流路结构，其包括压力室，所述压力室容纳所述液体并且通过流动通道连接到所述喷嘴孔; 以及向所述压力室中的液体施加压力的压力产生元件，其中喷射所述液体的喷嘴板的喷射表面由含氟DLC膜制成。

公开(公告)号：US20110148255A1

公开(公告)日：2011-06-23

申请号：US12962821

申请日：2010-12-08

申请人： Yasukazu Nihei

发明人： Yasukazu Nihei

IPC分类号： H01H57/00 ,  H01L41/22

CPC分类号： H01L41/0926 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/0973 ,  Y10T29/42

摘要： A piezoelectric MEMS switch includes: a base substrate; a diaphragm arranged to oppose the base substrate via a gap; a first piezoelectric drive section constituted by layering a first lower electrode, a first piezoelectric body and a first upper electrode on a first surface of the diaphragm, the first surface being across the diaphragm from the gap; a second piezoelectric drive section constituted by layering a second lower electrode, a second piezoelectric body and a second upper electrode on a second surface of the diaphragm, the second surface facing the gap; a fixed electrode provided on a gap side of the base substrate; and a movable electrode which is fixed to a second piezoelectric drive section side of the diaphragm and opposes the fixed electrode in such a manner that the movable electrode makes contact with and separates from the fixed electrode according to displacement of the diaphragm.

摘要翻译： 压电MEMS开关包括：基底; 隔膜，其布置成经由间隙与所述基底基板相对; 第一压电驱动部，其通过在所述隔膜的第一表面上分层第一下电极，第一压电体和第一上电极而构成，所述第一表面从所述间隙穿过所述隔膜; 第二压电驱动部分，其通过在所述隔膜的第二表面上层叠第二下电极，第二压电体和第二上电极，所述第二表面面向所述间隙; 设置在所述基底基板的间隙侧的固定电极; 以及可动电极，其被固定到所述振动膜的第二压电驱动部侧，并且与所述固定电极对置，使得所述可动电极根据所述振膜的位移与所述固定电极接触并与所述固定电极分离。

公开(公告)号：US07958608B2

公开(公告)日：2011-06-14

申请号：US12206518

申请日：2008-09-08

申请人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

发明人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

IPC分类号： H04R17/10 ,  H01L21/302

CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316 ,  Y10S29/016 ,  Y10T29/42 ,  Y10T29/49156

摘要： The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The ink-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member.

摘要翻译： 压电元件包括​​基板，形成在基板上的第一电极，形成在第一电极上的压电膜和形成在压电膜的第二侧上的第二电极，该第二电极远离形成第一电极的第一侧。 第一电极由与基板接触的第一层和与压电膜接触的第二层构成。 第一层由与衬底不同的速率进行湿蚀刻的材料形成。 喷墨头包括压电装置，用于通过墨水口喷射墨滴并设置在压电装置上的液滴存储/排出构件和响应于压电装置的膨胀或收缩而振动的隔膜， 压电装置和液滴存储/排出构件。

公开(公告)号：US07675220B2

公开(公告)日：2010-03-09

申请号：US12205402

申请日：2008-09-05

申请人： Yasukazu Nihei

发明人： Yasukazu Nihei

IPC分类号： H01L41/09

CPC分类号： H01L41/042

摘要： The driving method includes a first drive step of applying a specified drive voltage to a piezoelectric film to drive a piezoelectric device during a first drive period, a standby step of suspending a drive of the piezoelectric device to keep the piezoelectric device on standby during a drive standby period and a second drive step of applying the specified drive voltage to the piezoelectric film to drive the piezoelectric device during a second drive period that follows the first drive period. During the drive standby period between the first drive period and the second drive period, a reverse electric field with respect to a drive electric field formed in the piezoelectric film by the specified drive voltage routinely applied during a drive of the piezoelectric device is applied to the piezoelectric film for a specified period of time.

摘要翻译： 该驱动方法包括：第一驱动步骤，在第一驱动期间对压电膜施加规定的驱动电压以驱动压电器件;待机步骤，在驱动期间暂停压电器件的驱动以使压电器件保持待机状态 待机期间和第二驱动步骤，其在所述第一驱动周期之后的第二驱动周期期间将所述规定的驱动电压施加到所述压电膜以驱动所述压电器件。 在第一驱动期间和第二驱动期间的驱动待机期间中，通过在压电元件的驱动期间常规施加的规定的驱动电压相对于在压电膜中形成的驱动电场的反向电场施加到 压电薄膜一段时间。

公开(公告)号：US06998223B1

公开(公告)日：2006-02-14

申请号：US09649013

申请日：2000-08-28

申请人： Yasukazu Nihei ,  Masayuki Naya

发明人： Yasukazu Nihei ,  Masayuki Naya

IPC分类号： G02F1/37

CPC分类号： G02F1/3775 ,  G02F2202/20

摘要： A photosensitive resist layer is formed on one surface of a single-polarized ferroelectric substance having nonlinear optical effects. The resist layer has properties such that, when light is irradiated to the resist layer, only exposed areas of the resist layer or only unexposed areas of the resist layer become soluble in a developing solvent. The resist layer is then exposed to near-field light in a periodic pattern with a device, which receives exposure light and produces the near-field light in the periodic pattern. The resist layer is then developed to form a periodic pattern. A periodic electrode is then formed on the one surface of the ferroelectric substance by utilizing the periodic pattern of the resist layer as a mask, the periodic electrode being formed at positions corresponding to opening areas of the mask. An electric field is applied across the ferroelectric substance by utilizing the periodic electrode to set regions of the ferroelectric substance, which stand facing the periodic electrode, as domain inversion regions.

公开(公告)号：US20050185027A1

公开(公告)日：2005-08-25

申请号：US11063572

申请日：2005-02-24

申请人： Yasukazu Nihei ,  Kazuo Sanada

发明人： Yasukazu Nihei ,  Kazuo Sanada

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623

摘要： The liquid discharge head comprises: a diaphragm; a first piezoelectric member which is formed on a first surface of the diaphragm, the first piezoelectric member driving the diaphragm; and a pressure chamber dividing wall which is formed on a second surface of the diaphragm opposite to the first surface, wherein the first piezoelectric member and the pressure chamber dividing wall are formed by a deposition method.

摘要翻译： 液体排出头包括：隔膜; 第一压电元件，其形成在所述隔膜的第一表面上，所述第一压电元件驱动所述隔膜; 以及形成在所述隔膜的与所述第一表面相反的第二表面上的压力室分隔壁，其中所述第一压电构件和所述压力室分隔壁通过沉积方法形成。

公开(公告)号：US08564176B2

公开(公告)日：2013-10-22

申请号：US12962821

申请日：2010-12-08

申请人： Yasukazu Nihei

发明人： Yasukazu Nihei

IPC分类号： H01L41/09 ,  H01H57/00

CPC分类号： H01L41/0926 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/0973 ,  Y10T29/42

摘要： A piezoelectric MEMS switch includes: a base substrate; a diaphragm arranged to oppose the base substrate via a gap; a first piezoelectric drive section constituted by layering a first lower electrode, a first piezoelectric body and a first upper electrode on a first surface of the diaphragm, the first surface being across the diaphragm from the gap; a second piezoelectric drive section constituted by layering a second lower electrode, a second piezoelectric body and a second upper electrode on a second surface of the diaphragm, the second surface facing the gap; a fixed electrode provided on a gap side of the base substrate; and a movable electrode which is fixed to a second piezoelectric drive section side of the diaphragm and opposes the fixed electrode in such a manner that the movable electrode makes contact with and separates from the fixed electrode according to displacement of the diaphragm.

摘要翻译： 压电MEMS开关包括：基底; 隔膜，其布置成经由间隙与所述基底基板相对; 第一压电驱动部，其通过在所述隔膜的第一表面上分层第一下电极，第一压电体和第一上电极而构成，所述第一表面从所述间隙穿过所述隔膜; 第二压电驱动部分，其通过在所述隔膜的第二表面上层叠第二下电极，第二压电体和第二上电极，所述第二表面面向所述间隙; 设置在所述基底基板的间隙侧的固定电极; 以及可动电极，其被固定到所述振动膜的第二压电驱动部侧，并且与所述固定电极对置，使得所述可动电极根据所述振膜的位移与所述固定电极接触并与所述固定电极分离。

公开(公告)号：US08011099B2

公开(公告)日：2011-09-06

申请号：US12133330

申请日：2008-06-04

申请人： Yasukazu Nihei

发明人： Yasukazu Nihei

IPC分类号： B21D53/76 ,  B23P17/00 ,  H01L41/22 ,  H01R17/00 ,  B05D1/04 ,  B05D5/12

CPC分类号： B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1643 ,  B41J2/1646 ,  H01L41/314 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49401

摘要： A method of manufacturing an orientation film which method is suitable for manufacturing an orientation film containing a ceramic at low cost. The method includes the steps of: (a) forming a film containing a piezoelectric ceramic on a seed substrate in which crystal orientation is controlled at least on a surface thereof by using an aerosol deposition method of injecting powder toward a substrate and depositing the powder on the substrate; and (b) heat-treating the ceramic film formed at step (a) to form an orientation film in which crystal grains contained in the ceramic film is oriented.

摘要翻译： 一种制造取向膜的方法，该方法适合于以低成本制造含有陶瓷的取向膜。 该方法包括以下步骤：（a）通过使用将粉末注入基板并将粉末沉积在其上的气溶胶沉积方法，在种子基板上形成含有压电陶瓷的膜，其中晶体取向至少在其表面上被控制 基材; 和（b）对在步骤（a）中形成的陶瓷膜进行热处理以形成其中包含在陶瓷膜中的晶粒取向的取向膜。