-
公开(公告)号:US20170336544A1
公开(公告)日:2017-11-23
申请号:US15617654
申请日:2017-06-08
CPC分类号: G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
摘要: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
-
公开(公告)号:US09588269B2
公开(公告)日:2017-03-07
申请号:US15158191
申请日:2016-05-18
CPC分类号: G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
摘要: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
摘要翻译: 提供具有与800nm至1100nm的波长范围至少部分重叠的通带的滤光器。 滤光器包括由氢化硅层和交替堆叠的低折射率层形成的滤光片叠层。 氢化硅层在800nm至1100nm的波长范围内的折射率大于3,在800nm至1100nm的波长范围内的消光系数小于0.0005。
-
公开(公告)号:US09354369B2
公开(公告)日:2016-05-31
申请号:US13943596
申请日:2013-07-16
申请人: Viavi Solutions Inc.
CPC分类号: G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
摘要: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
摘要翻译: 提供具有与800nm至1100nm的波长范围至少部分重叠的通带的滤光器。 滤光器包括由氢化硅层和交替堆叠的低折射率层形成的滤光片叠层。 氢化硅层在800nm至1100nm的波长范围内的折射率大于3,在800nm至1100nm的波长范围内的消光系数小于0.0005。
-
公开(公告)号:US11650361B2
公开(公告)日:2023-05-16
申请号:US16722325
申请日:2019-12-20
申请人: VIAVI Solutions Inc.
CPC分类号: G02B5/208 , C23C14/0694 , C23C14/081 , C23C14/083 , C23C14/10 , C23C14/34 , C23C28/345 , G02B1/007 , G02B1/115 , G02B5/20
摘要: An optical filter may include a set of optical filter layers disposed onto a substrate. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index. The first material may comprise at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material is different from the first material and the second refractive index is less than the first refractive index. The set of optical filter layers may include a third subset of optical filter layers comprising a third material different from the first material and the second material.
-
公开(公告)号:US10222526B2
公开(公告)日:2019-03-05
申请号:US15617654
申请日:2017-06-08
摘要: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
-
公开(公告)号:US12055739B2
公开(公告)日:2024-08-06
申请号:US17446852
申请日:2021-09-03
申请人: VIAVI Solutions Inc.
IPC分类号: G02B5/28 , C23C14/08 , C23C14/18 , C23C14/54 , C23C14/58 , G01J5/0802 , G02B1/11 , G02B1/115 , G02B5/20 , G06V40/20 , H04N5/33 , H04N13/254
CPC分类号: G02B5/281 , C23C14/08 , C23C14/185 , C23C14/548 , C23C14/5806 , G01J5/0802 , G02B1/11 , G02B1/115 , G02B5/207 , G02B5/285 , G06V40/20 , H04N5/33 , H04N13/254
摘要: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 mn to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
-
公开(公告)号:US11692263B2
公开(公告)日:2023-07-04
申请号:US16619840
申请日:2018-09-28
申请人: VIAVI Solutions Inc.
发明人: Zhao Yuan , Markus K. Tilsch , Georg J. Ockenfuss , Marius Grigonis , Andrew Clark , Donggong Peng , Yinxiang Xia , Eric Nybank , Neil Pinkerton
CPC分类号: C23C14/547 , C23C14/0042 , C23C14/35 , C23C14/52 , C23C14/54 , H01J37/3464 , H01J37/3476
摘要: A device may include one or more memories and one or more processors, communicatively coupled to the one or more memories, to receive design information, wherein the design information identifies desired values for a set of layers of an optical element to be generated during one or more runs; receive or obtain historic information identifying a relationship between a parameter for the one or more runs and an observed value relating to the one or more runs or the optical element; determine layer information for the one or more runs based on the historic information, wherein the layer information identifies run parameters, for the set of layers, to achieve the desired values; and cause the one or more runs to be performed based on the layer information.
-
公开(公告)号:US11486042B2
公开(公告)日:2022-11-01
申请号:US16250842
申请日:2019-01-17
申请人: VIAVI SOLUTIONS INC.
发明人: Adam Andrew Preuss , Richard A. Bradley, Jr. , Georg J. Ockenfuss , Markus K. Tilsch , Andrew Clark , Marius Grigonis , Andy Shkabko , Nicolas Alexander Davis , Anthony Jay Kemp Cottrell
IPC分类号: C23C28/00 , C23C4/131 , C23C4/08 , C23C4/134 , C23C4/067 , C23C14/16 , C23C14/34 , C23C4/06 , C23C16/02 , H01J37/32 , C23C16/24 , C23C28/02 , C23C16/513 , B32B15/04 , H01J37/34 , H01L23/552 , C23C30/00 , C23C4/10 , B32B15/18 , B32B15/01 , B32B15/20 , C23C16/12 , C23C4/04
摘要: A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.
-
公开(公告)号:US12078830B2
公开(公告)日:2024-09-03
申请号:US17457123
申请日:2021-12-01
申请人: VIAVI Solutions Inc.
摘要: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.
-
公开(公告)号:US11867935B2
公开(公告)日:2024-01-09
申请号:US17449149
申请日:2021-09-28
申请人: VIAVI Solutions Inc.
IPC分类号: G02B5/28 , B32B7/023 , B32B7/02 , B32B17/10 , C23C14/00 , C23C14/06 , C23C14/34 , C23C14/35 , G02B5/20
CPC分类号: G02B5/285 , B32B7/02 , B32B7/023 , B32B17/10229 , C23C14/0036 , C23C14/0617 , C23C14/3464 , C23C14/35 , G02B5/207 , Y10T428/24942 , Y10T428/266
摘要: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers, wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.
-
-
-
-
-
-
-
-
-