Optical filter and sensor system
    3.
    发明授权
    Optical filter and sensor system 有权
    光学滤波器和传感器系统

    公开(公告)号:US09354369B2

    公开(公告)日:2016-05-31

    申请号:US13943596

    申请日:2013-07-16

    IPC分类号: G02B5/28 G01J5/08

    摘要: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.

    摘要翻译: 提供具有与800nm至1100nm的波长范围至少部分重叠的通带的滤光器。 滤光器包括由氢化硅层和交替堆叠的低折射率层形成的滤光片叠层。 氢化硅层在800nm至1100nm的波长范围内的折射率大于3,在800nm至1100nm的波长范围内的消光系数小于0.0005。

    Optical interference filter with aluminum nitride layers

    公开(公告)号:US12078830B2

    公开(公告)日:2024-09-03

    申请号:US17457123

    申请日:2021-12-01

    IPC分类号: G02B5/28 G02B1/10

    CPC分类号: G02B5/286 G02B1/10

    摘要: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.