公开(公告)号：US11486042B2

公开(公告)日：2022-11-01

申请号：US16250842

申请日：2019-01-17

申请人： VIAVI SOLUTIONS INC.

发明人： Adam Andrew Preuss ,  Richard A. Bradley, Jr. ,  Georg J. Ockenfuss ,  Markus K. Tilsch ,  Andrew Clark ,  Marius Grigonis ,  Andy Shkabko ,  Nicolas Alexander Davis ,  Anthony Jay Kemp Cottrell

IPC分类号： C23C28/00 ,  C23C4/131 ,  C23C4/08 ,  C23C4/134 ,  C23C4/067 ,  C23C14/16 ,  C23C14/34 ,  C23C4/06 ,  C23C16/02 ,  H01J37/32 ,  C23C16/24 ,  C23C28/02 ,  C23C16/513 ,  B32B15/04 ,  H01J37/34 ,  H01L23/552 ,  C23C30/00 ,  C23C4/10 ,  B32B15/18 ,  B32B15/01 ,  B32B15/20 ,  C23C16/12 ,  C23C4/04

摘要： A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.

公开(公告)号：US12078830B2

公开(公告)日：2024-09-03

申请号：US17457123

申请日：2021-12-01

申请人： VIAVI Solutions Inc.

发明人： Georg J. Ockenfuss ,  Jinhui Yang ,  Marius Grigonis ,  Karen Denise Hendrix ,  Andy Shkabko

IPC分类号： G02B5/28 ,  G02B1/10

CPC分类号： G02B5/286 ,  G02B1/10

摘要： In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.