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    Method of making pressure sensor assemblies
    1.
    发明申请
    Method of making pressure sensor assemblies 有权
    制造压力传感器组件的方法

    公开(公告)号：US20070214894A1

    公开(公告)日：2007-09-20

    申请号：US11796353

    申请日：2007-04-27

    申请人： Timothy Vas ,  Timothy Betzner ,  Stephen Long

    发明人： Timothy Vas ,  Timothy Betzner ,  Stephen Long

    IPC分类号： G01R31/28 ,  B21B13/22

    CPC分类号： G01L19/0645 ,  G01L19/0038 ,  Y10T29/4998

    摘要： Silicon-based high pressure sensor modules are manufactured in an array arrangement, incorporating a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. Bossed containers filled with oil are mounted on the substrate in an array. These bossed containers house the sensor cells which are composed of a sensor handle wafer and a diaphragm. The top surface of these bossed containers are flexible and deflect under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensors can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.

    摘要翻译： 基于硅的高压传感器模块以阵列布置制造，结合有低温共烧陶瓷（LTCC）衬底。 LTCC基板可承受高压。 装满油的凸起的容器以阵列的形式安装在基板上。 这些凸起的容器容纳由传感器处理晶片和隔膜组成的传感器单元。 这些凸起的容器的顶表面是柔性的并且在压力下偏转。 通过控制上表面的表面积和厚度，压力传感器可被配置成测量宽范围的压力。 油将压力从凸起的容器传递到传感器单元的隔膜，同时保护传感器单元免受高压和恶劣的介质。

    Pressure transducer for gaseous hydrogen environment
    2.
    发明申请
    Pressure transducer for gaseous hydrogen environment 有权
    用于气态氢气环境的压力传感器

    公开(公告)号：US20060248958A1

    公开(公告)日：2006-11-09

    申请号：US11125062

    申请日：2005-05-09

    申请人： Timothy Betzner

    发明人： Timothy Betzner

    IPC分类号： G01L9/00

    CPC分类号： H01M8/04089 ,  G01L19/0645 ,  G01L19/0654 ,  H01M2008/1095

    摘要： A silicon-based hydrogen pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate that shields the cavity formed by the silicon membrane and cell body from hydrogen permeation. A bossed container filled with an oil material is mounted on the substrate and houses a sensor cell. The oil material may be impregnated with a hydrogen getter material.

    摘要翻译： 硅基氢压力传感器模块结合了低温共烧陶瓷（LTCC）基板，其屏蔽由硅膜和电池体形成的空腔不受氢气渗透。 填充有油料的凸起的容器安装在基板上并容纳传感器单元。 油料可以用吸气剂材料浸渍。

    Pressure transducer
    3.
    发明申请
    Pressure transducer 有权
    压力传感器

    公开(公告)号：US20060248957A1

    公开(公告)日：2006-11-09

    申请号：US11124832

    申请日：2005-05-09

    申请人： Timothy Vas ,  Timothy Betzner ,  Stephen Long

    发明人： Timothy Vas ,  Timothy Betzner ,  Stephen Long

    IPC分类号： G01L9/00

    CPC分类号： G01L19/0645 ,  G01L19/0038 ,  Y10T29/4998

    摘要： A silicon-based high pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.

    摘要翻译： 硅基高压传感器模块包含低温共烧陶瓷（LTCC）基板。 LTCC基板可承受高压。 装有油的凸起的容器安装在基板上并且容纳传感器单元。 凸起的容器的顶表面是柔性的并且在压力下偏转。 通过控制上表面的表面积和厚度，压力传感器可被配置成测量宽范围的压力。 油将压力从凸起的容器传递到传感器单元的隔膜，同时保护传感器单元免受高压和恶劣的介质。