Linear accelerometer
    1.
    发明申请
    Linear accelerometer 审中-公开
    线性加速度计

    公开(公告)号:US20060207327A1

    公开(公告)日:2006-09-21

    申请号:US11081427

    申请日:2005-03-16

    IPC分类号: G01P15/125

    摘要: A linear accelerometer is provided having a support substrate, fixed electrodes having fixed capacitive plates, and a movable inertial mass having movable capacitive plates capacitively coupled to the fixed capacitive plates. Adjacent capacitive plates vary in height. The accelerometer further includes support tethers for supporting the inertial mass and allowing movement of the inertial mass upon experiencing a linear acceleration along a sensing axis. The accelerometer has inputs and an output for providing an output signal which varies as a function of the capacitive coupling and is indicative of both magnitude and direction of vertical acceleration along the sensing Z-axis. A microsensor fabrication process is also provided which employs a top side mask and etch module.

    摘要翻译: 提供了一种线性加速度计,其具有支撑基板,具有固定电容板的固定电极和具有电容耦合到固定电容板的可移动电容板的可动惯性块。 相邻的电容板的高度不同。 加速度计进一步包括用于支撑惯性质量的支撑系绳,并允许惯性质量块沿着感测轴线经历线性加速度的运动。 加速度计具有输入和输出,用于提供作为电容耦合的函数而变化的输出信号,并且指示沿感测Z轴的垂直加速度的大小和方向。 还提供了采用顶侧掩模和蚀刻模块的微传感器制造工艺。

    LEGAL PROJECT MANAGEMENT SYSTEM AND METHOD
    3.
    发明申请
    LEGAL PROJECT MANAGEMENT SYSTEM AND METHOD 审中-公开
    法律项目管理制度与方法

    公开(公告)号:US20130231971A1

    公开(公告)日:2013-09-05

    申请号:US13593244

    申请日:2012-08-23

    IPC分类号: G06Q10/06

    CPC分类号: G06Q10/063114

    摘要: A computer-implemented system for developing, tracking and managing legal (and other professional services) projects or matters through the Legal Project Management (LPM) process. The LPM process divides the management of a legal matter or project into three phases: Project Development; Project Execution; and Project Closure. The Project Development Phase includes conflict screening, fee arrangements, identification of the nature and scope of the matter, the goals of the stakeholders, the tasks associated with the matter, and development of a schedule, budget, and a communications plan. The Project Execution Phase involves monitoring the progress of the matter, tracking the actual time and cost to budget, identifying risks and changes to the scope of the matter as they develop, and communicating among team members. The Project Closure Phase includes file closure procedures, and team and client meetings to identify lessons learned in the engagement for future improvement.

    摘要翻译: 通过法律项目管理(LPM)流程开发,跟踪和管理法律(和其他专业服务)项目或事项的计算机实施系统。 LPM过程将法律事务或项目的管理分为三个阶段:项目开发; 项目执行; 和项目关闭。 项目开发阶段包括冲突筛选,费用安排,确定事项的性质和范围,利益攸关方的目标,与事项相关的任务以及制定时间表,预算和通信计划。 项目执行阶段包括监测事项的进展情况,跟踪实际的时间和成本,预算,确定风险和发生变化的范围,以及团队成员之间的沟通。 项目关闭阶段包括文件关闭程序,以及团队和客户会议,以确定参与未来改进的经验教训。

    Microfluidic valve structure
    5.
    发明申请
    Microfluidic valve structure 有权
    微流控阀结构

    公开(公告)号:US20070251592A1

    公开(公告)日:2007-11-01

    申请号:US11414851

    申请日:2006-05-01

    IPC分类号: F16K15/14

    摘要: A microfluidic valve structure is provided. The valve structure includes a valve body having a fluid flow passage formed therein for allowing fluid to flow therethrough. A valve boss is configured to move relative to a valve seat to open and close the fluid flow passage. A plurality of flexible support arms extend between a wall of the valve body and the valve boss for supporting the valve boss relative to the valve body such that the valve boss engages and disengages the valve seat to close and open the passage.

    摘要翻译: 提供微流体阀结构。 阀结构包括具有形成在其中以允许流体流过其中的流体流动通道的阀体。 阀座被构造成相对于阀座移动以打开和关闭流体流动通道。 多个柔性支撑臂在阀体的壁和阀座之间延伸,用于相对于阀体支撑阀座,使得阀座接合并脱离阀座以关闭和打开通道。

    Infrared detecting device with a circular membrane
    6.
    发明申请
    Infrared detecting device with a circular membrane 审中-公开
    具有圆形膜的红外线检测装置

    公开(公告)号:US20070095380A1

    公开(公告)日:2007-05-03

    申请号:US11263105

    申请日:2005-10-31

    IPC分类号: H01L35/28

    CPC分类号: G01J5/12 G01J5/0225

    摘要: An infrared (IR) sensor includes a semiconductor material, a circular membrane and a thermopile. The semiconductor material includes a cavity surrounded by a frame. The circular membrane is positioned over the cavity and has a perimeter supported by the frame. The membrane has a first surface for receiving thermal radiation and an oppositely-disposed second surface. The membrane includes at least one infrared absorbing layer. The thermopile includes a plurality of serially connected thermocouples. Each of the thermocouples has dissimilar electrically-resistive materials that define measurement junctions, which are positioned on the membrane, and reference junctions, which are positioned on the frame.

    摘要翻译: 红外(IR)传感器包括半导体材料,圆形膜和热电堆。 半导体材料包括被框架包围的空腔。 圆形膜定位在空腔上方并具有由框架支撑的周边。 膜具有用于接收热辐射的第一表面和相对布置的第二表面。 膜包括至少一个红外线吸收层。 热电堆包括多个串联连接的热电偶。 每个热电偶具有不同的电阻材料,其限定位于膜上的测量接头和位于框架上的参考接合点。

    Electrical contact for a MEMS device and method of making

    公开(公告)号:US20070048888A1

    公开(公告)日:2007-03-01

    申请号:US11214380

    申请日:2005-08-29

    申请人: John Christenson

    发明人: John Christenson

    IPC分类号: H01L21/00

    摘要: A method for making a subsurface electrical contact on a micro-electrical-mechanical-systems (MEMS) device. The contact is formed by depositing a layer of polycrystalline silicon onto a surface within a cavity buried under a device silicon layer. The polycrystalline silicon layer is deposited in the cavity through holes etched through the device silicon and reseals the cavity during the polycrystalline silicon deposition step. The polycrystalline silicon layer can then be masked and etched, or etched back to expose the device layer of the micromachined device. Through the layer of polycrystalline silicon, a center hub of the device may be electrically contacted.

    Dual-axis accelerometer
    8.
    发明申请
    Dual-axis accelerometer 审中-公开
    双轴加速度计

    公开(公告)号:US20050235751A1

    公开(公告)日:2005-10-27

    申请号:US10832666

    申请日:2004-04-27

    摘要: A dual-axis accelerometer and processing circuit are provided. The accelerometer has a plurality of fixed electrodes supported on a substrate and fixed capacitive plates arranged in first and second sensing axes. An inertial mass is suspended over a cavity and includes movable capacitive plates arranged to provide a capacitive couplings with the fixed capacitive plates. The inertial mass is movable relative to the plurality of fixed electrodes. The accelerometer has a plurality of support arms for supporting the inertial mass relative to the fixed electrodes and allowing movement of the inertial mass upon experiencing acceleration along the first and second sensing axes. The accelerometer further has inputs for receiving input signals and an output for providing an output signal which varies as a function of the capacitive coupling and is indicative of sensed acceleration. The processing circuit extracts the components of acceleration along the first and second sensing axes.

    摘要翻译: 提供双轴加速度计和处理电路。 加速度计具有支撑在基板上的多个固定电极和布置在第一和第二检测轴上的固定电容板。 惯性质量块悬挂在空腔上,并且包括可移动电容板,其布置成提供与固定电容板的电容耦合。 惯性质量可相对于多个固定电极移动。 加速度计具有多个支撑臂,用于相对于固定电极支撑惯性质量块,并允许惯性质量块在沿着第一和第二感测轴经历加速度时移动。 加速度计还具有用于接收输入信号的输入和用于提供作为电容耦合的函数变化的输出信号的输出,并且指示感测的加速度。 处理电路沿第一和第二检测轴提取加速度分量。

    Leak detection method and micro-machined device assembly
    9.
    发明申请
    Leak detection method and micro-machined device assembly 有权
    泄漏检测方法和微加工装置组装

    公开(公告)号:US20050093533A1

    公开(公告)日:2005-05-05

    申请号:US10686299

    申请日:2003-10-15

    CPC分类号: G01M3/40 G01M3/186 G01M3/226

    摘要: The present invention involves an electrical verification method that detects moisture within the cavity of the semiconductor or micro-machined device. The method affects an increase in the time for sufficient water vapor to remain within an unsealed device, so that instability in the diode can be measurable over a longer period of time. The method begins with the step of forming at least one reservoir on at least one of the device wafer and the capping wafer. The at least one reservoir connects to at least one diffusion channel, which is in communication with at least one reservoir port. The method further includes the steps of forming a PN junction diode adjacent to the at least one reservoir port; bonding the device wafer with the capping wafer to form a cavity; and electrically testing the PN junction diode as an indication of the presence of moisture within the cavity. The device assembly of the present invention includes a capping wafer bonded on a device wafer to form a cavity; at least one reservoir including at least one diffusion channel for receiving a liquid and retaining moisture. The at least one diffusion channel communicates with at least one reservoir port, which is open into the cavity. An exposed PN junction diode is provided adjacent to the at least one reservoir port, and a pair of metal pads is connected to the exposed PN junction diode.

    摘要翻译: 本发明涉及检测半导体或微加工装置的空腔内的水分的电验证方法。 该方法影响足够的水蒸汽保持在未密封装置内的时间的增加,使得二极管中的不稳定性可以在更长的时间段内测量。 该方法开始于在装置晶片和封盖晶片中的至少一个上形成至少一个储存器的步骤。 至少一个储存器连接至少一个与至少一个贮存口连通的扩散通道。 该方法还包括以下步骤:在至少一个储存器端口附近形成PN结二极管; 用封盖晶片将器件晶片接合以形成空腔; 并且将PN结二极管电测试作为腔内存在水分的指示。 本发明的器件组件包括:接合在器件晶片上以形成空腔的封盖晶片; 至少一个储存器,其包括用于接收液体并保持水分的至少一个扩散通道。 至少一个扩散通道与至少一个开口进入空腔的储存口连通。 暴露的PN结二极管邻近所述至少一个储存器端口设置,并且一对金属焊盘连接到暴露的PN结二极管。

    Method and apparatus for protective encapsulation of structural members
    10.
    发明授权
    Method and apparatus for protective encapsulation of structural members 失效
    结构件保护性封装的方法和装置

    公开(公告)号:US5919004A

    公开(公告)日:1999-07-06

    申请号:US975136

    申请日:1997-11-20

    申请人: John Christenson

    发明人: John Christenson

    IPC分类号: E02D5/60 E02D5/64

    摘要: A method and apparatus for creating a controlled environment about a pile submerged in a body of water in order to prevent marine infestation or further marine infestation, the apparatus in process comprising a tubular jacket installed about the submerged pile exposed to water, and introducing a marine grade foam between the tubular jacket and the pile thereby displacing any water between the tubular jacket and the pile, the foam upon setting, forms a rigid strata between the tubular jacket and the submerged pile thereby denying the surface of the pile exposure to water.

    摘要翻译: 一种用于创建围绕淹没在水体中的桩的受控环境的方法和装置,以便防止海洋侵扰或进一步的海洋侵扰,该装置包括安装在暴露于水的浸没桩周围的管状套管,以及引入海洋 管状护套和桩之间的等级泡沫,从而移动管状护套和桩之间的任何水,泡沫在凝固时在管状护套和浸没桩之间形成刚性地层,从而抵抗桩暴露于水的表面。