公开(公告)号：US09721781B2

公开(公告)日：2017-08-01

申请号：US15218732

申请日：2016-07-25

Applicant: TESCAN Brno, s.r.o.

Inventor： Libor Sedlacek ,  Jaroslav Jiruse

IPC: H01J49/40 ,  H01J49/14 ,  H01J49/04 ,  G01N23/225 ,  H01J37/26

CPC classification number: H01J49/401 ,  G01N23/2258 ,  H01J37/26 ,  H01J49/142

Abstract: A device for mass spectrometry in continuous operation can be equipped with a focused electron beam source or laser radiation source. It can further include a vacuum chamber, a stage for placing the specimen, and an ion beam column with a plasma source for producing a primary ion beam and a secondary ion mass spectrometer for secondary ion analysis. The ion beam column is connected to an inert gas source and to a reactive gas source and is modified for simultaneous introduction of at least two gases from the inert gas source and reactive gas source. The secondary ion mass spectrometer is of an orthogonal Time-of-Flight type to ensure the function with the ion beam column in continuous operation.

公开(公告)号：US20170338078A1

公开(公告)日：2017-11-23

申请号：US15601547

申请日：2017-05-22

Applicant: TESCAN Brno, s.r.o.

Inventor： Jaroslav Jiruse ,  Filip Lopour ,  Milos Havelka ,  Jan Polster ,  Josef Rysavka ,  Martin Zadrazil

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/141 ,  H01J37/28 ,  H01J37/12

CPC classification number: H01J37/263 ,  H01J37/04 ,  H01J37/12 ,  H01J37/141 ,  H01J37/1475 ,  H01J37/28 ,  H01J2237/04922

Abstract: A scanning electron microscope comprises three objective lenses, including a distant objective lens and a close objective lens, which are of conventional type, and an immersion objective lens of the immersion type below the distant objective lens and the close objective lens. These three objective lenses can be controlled independently, therefor different combinations of active objective lenses can be achieved. The scanning electron microscope therefore offers various imaging modes. There is a possibility to switch between these imaging modes and therefore, choose the most suitable way of imaging for given application.

公开(公告)号：US20170025264A1

公开(公告)日：2017-01-26

申请号：US15218732

申请日：2016-07-25

Applicant: TESCAN Brno, s.r.o.

Inventor： Libor Sedlacek ,  Jaroslav Jiruse

IPC: H01J49/40 ,  H01J49/14 ,  H01J49/04

CPC classification number: H01J49/401 ,  G01N23/2258 ,  H01J37/26 ,  H01J49/142

Abstract: A device for mass spectrometry in continuous operation can be equipped with a focused electron beam source or laser radiation source. It can further include a vacuum chamber, a stage for placing the specimen, and an ion beam column with a plasma source for producing a primary ion beam and a secondary ion mass spectrometer for secondary ion analysis. The ion beam column is connected to an inert gas source and to a reactive gas source and is modified for simultaneous introduction of at least two gases from the inert gas source and reactive gas source. The secondary ion mass spectrometer is of an orthogonal Time-of-Flight type to ensure the function with the ion beam column in continuous operation.

Abstract translation: 在连续操作中用于质谱的装置可以配备聚焦电子束源或激光辐射源。 它还可以包括一个真空室，一个用于放置试样的载物台和一个用于产生一次离子束的等离子体源的离子束柱和用于二次离子分析的二次离子质谱仪。 离子束柱连接到惰性气体源和反应气体源，并被修改为同时引入来自惰性气体源和反应气体源的至少两种气体。 二次离子质谱仪具有正交飞行时间，以确保连续运行时离子束柱的功能。

公开(公告)号：US10535496B2

公开(公告)日：2020-01-14

申请号：US16133107

申请日：2018-09-17

Applicant: TESCAN Brno, s.r.o.

Inventor： Jaroslav Jiruse ,  Filip Lopour

IPC: H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/28 ,  H01J37/244

Abstract: A device with an ion column and a scanning electron microscope comprises at least one column detector of signal electrons placed inside or on the ion column. Signal generated on the sample is detected on the column detector during landing of a broad beam generated by the scanning electron microscope on the sample surface.

公开(公告)号：US20190088445A1

公开(公告)日：2019-03-21

申请号：US16133107

申请日：2018-09-17

Applicant: TESCAN Brno, s.r.o.

Inventor： Jaroslav Jiruse ,  Filip Lopour

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/21 ,  H01J37/28 ,  H01J37/05

CPC classification number: H01J37/244 ,  H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/20207 ,  H01J2237/24475 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A device with an ion column and a scanning electron microscope comprises at least one column detector of signal electrons placed inside or on the ion column. Signal generated on the sample is detected on the column detector during landing of a broad beam generated by the scanning electron microscope on the sample surface.