SEMICONDUCTOR DIE
    6.
    发明申请
    SEMICONDUCTOR DIE 审中-公开

    公开(公告)号:US20200058635A1

    公开(公告)日:2020-02-20

    申请号:US16537769

    申请日:2019-08-12

    IPC分类号: H01L27/02 H01L27/088

    摘要: A semiconductor die can include: first, second, third, and fourth transistors disposed at intervals, where each two of the first, second, third, and fourth transistors are separated by a separation region to form four separation regions; an isolation structure having a first doping structure of a first doping type, and a second doping structure of a second doping type, to absorb hole carriers and electron carriers flowing between the first, second, third, and fourth transistors; where the first doping structure is located in the separation region to isolate adjacent transistors in the first, second, third, and fourth transistors; and where at least a portion of the second doping structure is surrounded by the first doping structure, and the second doping structure is separated from the first doping structure.

    Method for manufacturing lateral double-diffused metal oxide semiconductor transistor

    公开(公告)号:US09627513B2

    公开(公告)日:2017-04-18

    申请号:US14862453

    申请日:2015-09-23

    摘要: The present disclosure relates to a lateral double-diffused metal oxide semiconductor transistor and a method for manufacturing the same. In the method, a high-voltage gate dielectric is formed at a surface of a semiconductor layer. A thin gate dielectric is formed above the substrate and has at least a portion adjacent to the high-voltage gate dielectric. A gate conductor is formed above the thin gate dielectric and the high-voltage gate dielectric. A first mask is used for patterning the gate conductor to define a first sidewall of the gate conductor above the thin gate dielectric. A second mask is used for patterning the gate conductor to define a second sidewall of the gate conductor at least partially above the high-voltage gate dielectric. Source and drain regions are formed to have a first doping type. The method further comprises doping through the first mask to form a body region of a second doping type. The second doping type is opposite to the first doping type. The method simplifies a manufacturer process and improves reliability of the resultant devices.