公开(公告)号：US5759646A

公开(公告)日：1998-06-02

申请号：US699148

申请日：1996-08-16

申请人： Shoji Kano ,  Nobuo Kawada ,  Ryoji Nakajima ,  Yukio Kurosawa

发明人： Shoji Kano ,  Nobuo Kawada ,  Ryoji Nakajima ,  Yukio Kurosawa

IPC分类号： C04B41/87 ,  C04B35/583 ,  C04B41/50 ,  C04B41/51 ,  C04B41/85 ,  C04B41/88 ,  C30B15/10 ,  C30B23/06 ,  C30B35/00 ,  H01L21/203 ,  B01L3/04

CPC分类号： C04B41/009 ,  C04B41/5001 ,  C04B41/5133 ,  C04B41/85 ,  C04B41/88 ,  C30B15/10 ,  C30B23/06 ,  C30B35/002 ,  Y10T428/131 ,  Y10T428/1317

摘要： Proposed is an improvement in a vessel, e.g., crucible, of pyrolytic boron nitride (PBN) used, for example, in the process of molecular beam epitaxy for melting silicon and the like at a high temperature. Different from conventional PBN crucibles used for such a process, in which contamination of high-purity silicon is unavoidable by the reaction of molten silicon with PBN or a thermal decomposition products of boron nitride, the inventive PBN vessel is provided on the surface with a protective coating layer of pyrolytic graphite or a refractory metal such as platinum so as not to cause troubles due to contamination of high-purity silicon melted therein with the crucible materials.

摘要翻译： 提出了在例如用于在高温下熔化硅等的分子束外延过程中使用的热解氮化硼（PBN）的容器（例如坩埚）的改进。 与用于这种工艺的常规PBN坩埚不同，其中高纯度硅的污染是熔融硅与PBN或氮化硼的热分解产物的反应所不可避免的，本发明的PBN容器在表面上提供有保护 热解石墨或难熔金属如铂的涂层，以免由于用坩埚材料熔化的高纯度硅的污染而引起麻烦。

公开(公告)号：US5665260A

公开(公告)日：1997-09-09

申请号：US364196

申请日：1994-12-27

申请人： Nobuo Kawada ,  Shoji Kano ,  Koji Hagiwara ,  Nobuo Arai ,  Junichi Arami ,  Kenji Ishikawa

发明人： Nobuo Kawada ,  Shoji Kano ,  Koji Hagiwara ,  Nobuo Arai ,  Junichi Arami ,  Kenji Ishikawa

IPC分类号： B23Q3/15 ,  C04B37/00 ,  C04B41/89 ,  H01L21/027 ,  H01L21/265 ,  H01L21/324 ,  H01L21/683 ,  H01L23/34 ,  H02N13/00 ,  H05B3/14 ,  H05B3/68 ,  H05B3/44

CPC分类号： H01L23/345 ,  H01L21/6833 ,  H05B3/143 ,  H01L2924/0002

摘要： A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.

摘要翻译： 一种具有内置加热器的陶瓷静电卡盘，其具有与导电陶瓷的支撑基板的表面结合的导电陶瓷电极。 导电陶瓷的发热层与支撑基板的另一个表面接合，并且在其上提供电绝缘陶瓷的覆盖层。 支撑基板，静电卡盘和发热层用电极的表面粗糙度Rmax为5μm以上。

公开(公告)号：US5663865A

公开(公告)日：1997-09-02

申请号：US603155

申请日：1996-02-20

申请人： Nobuo Kawada ,  Ryoji Nakajima ,  Toshihiko Shindo ,  Takaaki Nagao

发明人： Nobuo Kawada ,  Ryoji Nakajima ,  Toshihiko Shindo ,  Takaaki Nagao

IPC分类号： B25J15/06 ,  C04B35/583 ,  C04B41/87 ,  H01L21/00 ,  H01L21/683 ,  H02N13/00

CPC分类号： H01L21/67103 ,  H01L21/6831 ,  H01L21/6833 ,  H02N13/00

摘要： Proposed is a ceramic-based electrostatic chuck with built-in heater used in high-temperature processing of a semiconductor silicon wafer, which is capable of exhibiting excellent electrostatic attracting force even at a temperature at which conventional ceramic-based electrostatic chucks cannot exhibit high attracting force. The electrostatic chuck with built-in heater of the invention is an integral body comprising: (a) a base body of a sintered mixture of boron nitride and aluminum nitride; (b) a first pyrolytic graphite layer formed on one surface of the base body to serve as a resistance heater element; (c) a first insulating layer of pyrolytic boron nitride on the first pyrolytic graphite layer; (d) a second pyrolytic graphite layer formed on the other surface of the base body to serve as the electrodes for electrostatic chucking; and (e) a second insulating layer on the second pyrolytic graphite layer formed from a pyrolytic composite nitride of boron and silicon of which the content of silicon is in the range from 1% to 10% by weight having an appropriate volume resistivity at a temperature of 500.degree. to 650.degree. C. as deposited by the pyrolysis of a gaseous mixture of ammonia, boron trichloride and silicon tetrachloride.

摘要翻译： 提出了一种用于半导体硅晶片的高温处理的内置加热器的陶瓷型静电卡盘，其即使在常规的陶瓷基静电卡盘不能显示高吸引力的温度下也能够表现出优异的静电吸引力 力。 本发明的具有内置加热器的静电卡盘是一体的主体，包括：（a）氮化硼和氮化铝的烧结混合物的基体; （b）形成在所述基体的一个表面上以用作电阻加热元件的第一热解石墨层; （c）第一热解石墨层上的热解氮化硼的第一绝缘层; （d）形成在基体的另一个表面上的第二热解石墨层，用作静电吸附用电极; 和（e）由硼和硅的热解复合氮化物形成的第二热解石墨层上的第二绝缘层，其硅含量在1至10重量％的范围内，其温度在适当的体积电阻率 通过氨，三氯化硼和四氯化硅的气体混合物的热解而沉积的500℃至650℃。

公开(公告)号：US20100248071A1

公开(公告)日：2010-09-30

申请号：US12304061

申请日：2007-05-23

申请人： Shigeru Konishi ,  Hiroshi Matsukawa ,  Nobuo Kawada ,  Toshio Ohba

发明人： Shigeru Konishi ,  Hiroshi Matsukawa ,  Nobuo Kawada ,  Toshio Ohba

IPC分类号： H01M8/10

CPC分类号： H01M8/1011 ,  H01M4/92 ,  H01M4/921 ,  H01M4/926 ,  H01M8/0234 ,  H01M8/1037 ,  H01M8/1072 ,  H01M2250/30 ,  H01M2300/0082 ,  Y02B90/18 ,  Y02E60/523 ,  Y02P70/56

摘要： Disclosed is an electrolyte membrane-electrode assembly for direct methanol fuel cells, wherein a solid polymer electrolyte membrane is held between a pair of electrodes each composed of a catalyst layer coated over and/or impregnated in a porous supporting body. This electrolyte membrane-electrode assembly for direct methanol fuel cells is characterized in that the solid polymer electrolyte membrane is obtained by irradiating a resin membrane with radiation and graft-polymerizing a radically polymerizable monomer. The electrolyte membrane-electrode assembly for direct methanol fuel cells is further characterized in that the catalyst layer of the anode electrode comprises a catalyst, wherein platinum group metal or platinum-containing alloy particles having a particle size of 5 nm or less are supported by carbon particles, and a solid polymer electrolyte, and the noble metal amount in the catalyst layer of the anode electrode is not more than 5 mg/cm2. By using such a catalyst, there can be obtained a direct methanol fuel cell wherein high output is achieved by using high methanol concentration.

摘要翻译： 公开了一种用于直接甲醇燃料电池的电解质膜 - 电极组件，其中固体聚合物电解质膜保持在一对电极之间，每对电极由涂覆在多孔支撑体上的和/或浸渍在多孔支撑体中的催化剂层组成。 该直接甲醇燃料电池用电解质膜 - 电极组件的特征在于，固体高分子电解质膜通过用辐射照射树脂膜并使自由基聚合性单体进行接枝聚合而获得。 用于直接甲醇燃料电池的电解质膜 - 电极组件的特征还在于，阳极电极的催化剂层包括催化剂，其中具有5nm或更小的粒径的铂族金属或含铂合金颗粒由碳负载 颗粒和固体聚合物电解质，并且阳极电极的催化剂层中的贵金属量不大于5mg / cm 2。 通过使用这样的催化剂，可以获得通过使用高甲醇浓度实现高产量的直接甲醇燃料电池。

公开(公告)号：US20090017358A1

公开(公告)日：2009-01-15

申请号：US11912779

申请日：2006-04-21

申请人： Nobuo Kawada

发明人： Nobuo Kawada

IPC分类号： H01M8/10 ,  C08J3/28

CPC分类号： C08J7/18 ,  C08F8/12 ,  C08F8/38 ,  C08F259/08 ,  C08F291/00 ,  C08F291/18 ,  C08F2810/20 ,  C08J3/28 ,  C08J5/2293 ,  C08J2327/12 ,  H01M8/1023 ,  H01M8/1037 ,  H01M8/1039 ,  H01M8/1074 ,  H01M8/1088 ,  H01M2300/0082 ,  Y02P70/56 ,  C08F230/08 ,  C08F212/14

摘要： A high-performance solid polyelectrolyte film is provided which is produced by the radiation-induced graft polymerization method without causing solution gelation and which is excellent in mechanical strength, chemical stability, and dimensional stability and reduced in methanol permeability. According to the present invention, the solid polyelectrolyte film is produced by graft-polymerizing either a polymerizable monomer having an alkoxysilyl group alone or the polymerizable monomer having an alkoxysilyl group and another polymerizable monomer with a resin film which has been irradiated with a radiation, followed by hydrolyzing the alkoxysilyl groups to conduct dehydrating condensation. In addition, this solid polyelectrolyte film is disposed between a fuel electrode and an air electrode to fabricate a fuel cell.

摘要翻译： 提供通过辐射诱导的接枝聚合方法制备而不引起溶液凝胶化并且机械强度，化学稳定性和尺寸稳定性优异且甲醇渗透性降低的高性能固体聚电解质膜。 根据本发明，固体聚电解质膜通过单独具有烷氧基甲硅烷基的可聚合单体或具有烷氧基甲硅烷基的可聚合单体和另一种可聚合单体与已经被辐射的树脂膜接枝聚合而制备，随后 通过水解烷氧基甲硅烷基进行脱水缩合。 此外，该固体聚电解质膜设置在燃料电极和空气电极之间，以制造燃料电池。

公开(公告)号：US08603698B2

公开(公告)日：2013-12-10

申请号：US12594434

申请日：2008-04-01

申请人： Nobuo Kawada

发明人： Nobuo Kawada

IPC分类号： H01M8/10

CPC分类号： C08L79/08 ,  C08G73/101 ,  H01B1/122 ,  H01M4/8605 ,  H01M8/1011 ,  H01M8/1027 ,  H01M8/103 ,  H01M8/1037 ,  H01M2008/1095 ,  H01M2300/0082 ,  Y02E60/523

摘要： Disclosed is an electrolyte for fuel cells, which is mainly composed of a copolycondensate of a polyimide having an alkoxysilyl group at an end and an alkoxysilane having an ion-conducting group. Also disclosed are an electrolyte membrane for fuel cells, a binder for fuel cells and a membrane electrode assembly for fuel cells, each using the electrolyte, and a fuel cell using such a membrane electrode assembly for fuel cells. The electrolyte enables to obtain an electrolyte membrane, a binder and a membrane electrode assembly, each having high ion conductivity, high strength, high toughness, low swelling and low fuel permeability suitable for fuel cells. By using such an electrolyte, there can be obtained a low-cost fuel cell having high output power and high durability.

摘要翻译： 公开了一种用于燃料电池的电解质，其主要由末端具有烷氧基甲硅烷基的聚酰亚胺和具有离子传导性基团的烷氧基硅烷的共缩聚物组成。 还公开了用于燃料电池的电解质膜，用于燃料电池的粘合剂和用于燃料电池的膜电极组件，每个使用该电解质，以及使用这种用于燃料电池的膜电极组件的燃料电池。 该电解质能够得到适用于燃料电池的电离膜，粘合剂和膜电极组件，它们具有高离子传导性，高强度，高韧性，低溶胀性和低燃料渗透性。 通过使用这种电解质，可以获得具有高输出功率和高耐久性的低成本燃料电池。

公开(公告)号：US20100143764A1

公开(公告)日：2010-06-10

申请号：US12594434

申请日：2008-04-01

申请人： Nobuo Kawada

发明人： Nobuo Kawada

IPC分类号： H01M8/10

CPC分类号： C08L79/08 ,  C08G73/101 ,  H01B1/122 ,  H01M4/8605 ,  H01M8/1011 ,  H01M8/1027 ,  H01M8/103 ,  H01M8/1037 ,  H01M2008/1095 ,  H01M2300/0082 ,  Y02E60/523

摘要： Disclosed is an electrolyte for fuel cells, which is mainly composed of a copolycondensate of a polyimide having an alkoxysilyl group at an end and an alkoxysilane having an ion-conducting group. Also disclosed are an electrolyte membrane for fuel cells, a binder for fuel cells and a membrane electrode assembly for fuel cells, each using the electrolyte, and a fuel cell using such a membrane electrode assembly for fuel cells. The electrolyte enables to obtain an electrolyte membrane, a binder and a membrane electrode assembly, each having high ion conductivity, high strength, high toughness, low swelling and low fuel permeability suitable for fuel cells. By using such an electrolyte, there can be obtained a low-cost fuel cell having high output power and high durability.

摘要翻译： 公开了一种用于燃料电池的电解质，其主要由末端具有烷氧基甲硅烷基的聚酰亚胺和具有离子传导性基团的烷氧基硅烷的共缩聚物组成。 还公开了用于燃料电池的电解质膜，用于燃料电池的粘合剂和用于燃料电池的膜电极组件，每个使用该电解质，以及使用这种用于燃料电池的膜电极组件的燃料电池。 该电解质能够得到适用于燃料电池的电离膜，粘合剂和膜电极组件，它们具有高离子传导性，高强度，高韧性，低溶胀性和低燃料渗透性。 通过使用这种电解质，可以获得具有高输出功率和高耐久性的低成本燃料电池。

公开(公告)号：US5904872A

公开(公告)日：1999-05-18

申请号：US534312

申请日：1995-09-27

申请人： Junichi Arami ,  Kenji Ishikawa ,  Harunori Ushikawa ,  Isao Yanagisawa ,  Nobuo Kawada ,  Hiroshi Mogi

发明人： Junichi Arami ,  Kenji Ishikawa ,  Harunori Ushikawa ,  Isao Yanagisawa ,  Nobuo Kawada ,  Hiroshi Mogi

IPC分类号： C23C16/46 ,  H01L21/00 ,  H05B3/26 ,  H05B3/28 ,  H05B3/68 ,  C23C16/00 ,  H05B3/00

CPC分类号： C23C16/466 ,  C23C16/46 ,  H01L21/67103 ,  H05B3/265 ,  H05B3/283 ,  Y10T29/49083

摘要： A heating device is formed by a heating plate formed of silica and having a heating surface for heating an object to be heated, a heating element having a predetermined pattern and fixed to a surface opposing the heating surface of the heating plate, and a reflecting plate formed of silica and brought into tight contact with the surface of the heating plate on which the heating element is formed. This heating device is arranged in a processing vessel in a CVD apparatus, and a semiconductor wafer is placed on the heating device. A process gas is supplied into the processing vessel while the semiconductor wafer is heated, thereby forming a predetermined film on the semiconductor wafer.

摘要翻译： 加热装置由二氧化硅形成的加热板形成，具有用于加热待加热物体的加热面，具有预定图案的加热元件，并固定在与加热板的加热面相对的面上，反射板 由二氧化硅形成并与形成有加热元件的加热板的表面紧密接触。 该加热装置配置在CVD装置的处理容器中，将半导体晶片放置在加热装置上。 在加热半导体晶片的同时，将处理气体供给到处理容器中，从而在半导体晶片上形成规定的膜。

公开(公告)号：US08889294B2

公开(公告)日：2014-11-18

申请号：US13052732

申请日：2011-03-21

申请人： Nobuo Kawada

发明人： Nobuo Kawada

IPC分类号： H01M4/13 ,  H01M10/052 ,  C23C16/44 ,  H01M4/134 ,  C23C16/26

CPC分类号： H01M4/366 ,  C23C16/02 ,  C23C16/26 ,  C23C16/4417 ,  C23C16/56 ,  H01M4/0428 ,  H01M4/131 ,  H01M4/133 ,  H01M4/134 ,  H01M4/364 ,  H01M4/386 ,  H01M4/48 ,  H01M4/483 ,  H01M4/583 ,  H01M10/052 ,  H01M10/0525 ,  Y02E60/122 ,  Y02P70/54 ,  Y02T10/7011

摘要： The present invention is a negative electrode material for a secondary battery with a non-aqueous electrolyte comprising at least a silicon-silicon oxide composite and a carbon coating formed on a surface of the silicon-silicon oxide composite, wherein at least the silicon-silicon oxide composite is doped with lithium, and a ratio I(SiC)/I(Si) of a peak intensity I(SiC) attributable to SiC of 2θ=35.8±0.2° to a peak intensity I(Si) attributable to Si of 2θ=28.4±0.2° satisfies a relation of I(SiC)/I(Si)≦0.03, when x-ray diffraction using Cu—Kα ray. As a result, there is provided a negative electrode material for a secondary battery with a non-aqueous electrolyte that is superior in first efficiency and cycle durability to a conventional negative electrode material.

摘要翻译： 本发明是一种具有非水电解质的二次电池的负极材料，该非水电解质至少包含硅 - 氧化硅复合物和形成在硅 - 氧化硅复合材料的表面上的碳涂层，其中至少硅 - 硅 氧化物复合材料掺杂有锂，并且归属于SiC的峰值强度I（SiC）的2（t）= 35.8±0.2°，归因于Si的峰强度I（Si）的I（SiC）/ I（Si） 2＆thetas; = 28.4±0.2°满足I（SiC）/ I（Si）＆nlE的关系; 0.03，当使用Cu-Kα射线进行x射线衍射时。 结果，提供了一种具有非常优异的第一效率和循环耐久性的常规负极材料的非水电解质二次电池用负极材料。

公开(公告)号：US07629393B2

公开(公告)日：2009-12-08

申请号：US11401249

申请日：2006-04-11

申请人： Norifumi Takahashi ,  Toshio Ohba ,  Nobuo Kawada

发明人： Norifumi Takahashi ,  Toshio Ohba ,  Nobuo Kawada

IPC分类号： C08J5/20

CPC分类号： H01M8/1088 ,  C08J5/225 ,  C08J2323/06 ,  C08J2327/18 ,  H01B1/122 ,  H01M8/1023 ,  H01M8/1039 ,  H01M8/106 ,  H01M8/1072 ,  H01M2008/1095 ,  H01M2300/0082 ,  Y02P70/56

摘要： The present invention relates to a solid polymer electrolyte membrane having both of a higher proton conductivity and a smaller methanol permeability, which can be produced by conducting a graft polymerization of a fluororesin thin membrane irradiated with a radiation with a monofunctional monomer and again irradiating the resulting film with a radiation, followed by conducting a graft polymerization thereof with a polyfunctional monomer; and a high-performance fuel cell comprising the solid polymer electrolyte membrane, a fuel electrode and an air electrode, said solid polymer electrolyte membrane being disposed between the fuel electrode and the air electrode.

摘要翻译： 本发明涉及具有较高质子传导性和较小的甲醇渗透性的固体高分子电解质膜，其可以通过用单功能单体进行辐射照射的氟树脂薄膜进行接枝聚合而产生，并再次照射所得到的 膜，然后用多官能单体进行接枝聚合; 以及包含所述固体高分子电解质膜，燃料极和空气极的高性能燃料电池，所述固体高分子电解质膜设置在所述燃料电极和所述空气极之间。