公开(公告)号：US08440566B2

公开(公告)日：2013-05-14

申请号：US13189006

申请日：2011-07-22

申请人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

发明人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

IPC分类号： H01L21/44

CPC分类号： C23C16/4404 ,  C23C16/34 ,  C23C16/45576

摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.

摘要翻译： 该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤， 含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

公开(公告)号：US20090308859A1

公开(公告)日：2009-12-17

申请号：US12481980

申请日：2009-06-10

申请人： Koji KATO ,  Shoji KANO

发明人： Koji KATO ,  Shoji KANO

IPC分类号： H05B3/10 ,  H05B3/00

CPC分类号： H05B3/10 ,  Y10T29/49083

摘要： A ceramic heater is provided and comprises a ceramic substrate and a conductive heating element arranged inside of or on a surface of the ceramic substrate. The conductive heating element is made of a material which had undergone a high-temperature heat treatment.

摘要翻译： 提供陶瓷加热器，其包括陶瓷基板和布置在陶瓷基板的表面内或表面上的导电加热元件。 导电加热元件由经过高温热处理的材料制成。

公开(公告)号：US20070241095A1

公开(公告)日：2007-10-18

申请号：US11783580

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H05B3/143 ,  H05B2203/003

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p，或者由在保护层上形成的含有掺杂剂的化合物构成 第4层。 可以提供一种加热元件，其中在保护层上形成氮气渗透性，电阻率或硬度的耐腐蚀层，即使在高温环境下也难以将腐蚀性气体透过 并且可以避免腐蚀性气体，并且可以避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，并且另外，即使当具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有 使用寿命长，能够以低成本生产。

公开(公告)号：US06384383B2

公开(公告)日：2002-05-07

申请号：US09728082

申请日：2000-12-04

申请人： Shoji Kano ,  Kenji Ito ,  Akira Sato

发明人： Shoji Kano ,  Kenji Ito ,  Akira Sato

IPC分类号： H05B368

CPC分类号： H01L21/67103

摘要： There is disclosed a ceramic heating jig consisting of a susceptor 2 on which a work to be heated is placed, a ceramic heater 3 for heating the susceptor and at least one heat shielding plate 4 for shielding heat of the ceramic heater wherein the susceptor and the heat shielding plate are located so that each of them is located across the ceramic heater each leaving a certain space therefrom, a thickness of the susceptor is 0.5 m to 5 mm, a thickness of the ceramic heater is 0.5 mm to 3 mm, a thickness of the heat shielding plate is 0.5 mm to 3 mm. Preferably, an interval between the members is 0.5 mm to 10 mm, and the members are elastically held as an integration by the elastic means 6 and the restraint means 7. There can be provided a ceramic heating jig wherein defects such as thermal deformation, breakage or the like of the susceptor or the like are hardly caused, temperature can be raised or lowered rapidly, and flatness of a susceptor can be kept even at high temperature.

摘要翻译： 公开了一种陶瓷加热夹具，其由待加热的工件的基座2，用于加热基座的陶瓷加热器3和用于屏蔽陶瓷加热器的热量的至少一个热屏蔽板4组成，其中基座和 隔热板的位置使得它们各自位于陶瓷加热器两侧，留下一定的空间，基座的厚度为0.5μm至5mm，陶瓷加热器的厚度为0.5mm至3mm，厚度为 的隔热板为0.5mm〜3mm。 优选地，构件之间的间隔为0.5mm至10mm，并且通过弹性装置6和约束装置7将构件弹性保持为一体。可以提供陶瓷加热夹具，其中诸如热变形，断裂的缺陷 感受器等不易引起温度的升高或降低，即使在高温下也能保持基座的平坦度。

公开(公告)号：US20110256412A1

公开(公告)日：2011-10-20

申请号：US13064768

申请日：2011-04-14

申请人： Koji Katoh ,  Shoji Kano

发明人： Koji Katoh ,  Shoji Kano

IPC分类号： B32B15/04 ,  B05B5/00 ,  B32B9/00 ,  C01B21/072

CPC分类号： C04B41/009 ,  C04B41/5063 ,  C04B41/87 ,  C04B2111/80 ,  Y10T428/31678 ,  C04B35/00 ,  C04B35/10 ,  C04B35/565 ,  C04B35/584 ,  C04B41/0072 ,  C04B41/4531

摘要： There are provided an aluminum nitride film and a substance, coated with such a film; the film is new in that it has a brightness or lightness L* of 60 or lower; preferably the film has a transmittance of 15% or lower for a visible and near infrared radiation having a wave length of 0.35-2.5 micrometers, the combined concentration of metallic elements as impurities but for Al is 50 ppm or smaller, and the film is heat-treated at a temperature of 1050 degrees centigrade or higher but lower than 1400 degrees centigrade, and the film is a product of CVD method; the substance coated with the film is preferably a ceramic material such as a nitride, an oxide, and a carbide or a metal having a low thermal expansion coefficient such as tungsten, molybdenum and tantalum.

摘要翻译： 提供了涂覆有这种膜的氮化铝膜和物质; 该片是新的，其亮度或亮度L *为60或更低; 对于波长为0.35-2.5微米的可见光和近红外辐射，优选该膜具有15％或更低的透光率，作为杂质的金属元素的组合浓度为50ppm或更小，并且膜是热的 在1050摄氏度或更高但低于1400摄氏度的温度下处理，该膜是CVD法的产物; 被覆膜的物质优选为陶瓷材料，例如氮化物，氧化物，碳化物或具有低热膨胀系数的金属如钨，钼和钽。

公开(公告)号：US07952054B2

公开(公告)日：2011-05-31

申请号：US11783581

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00 ,  C23C16/00

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 导电层3，其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及作为在保护层上形成的具有化学计量比的氧的量的氧化物的耐腐蚀层4p。 可以提供一种加热元件，其中在保护层上形成电阻率或硬度被控制的耐腐蚀层，即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过， 由此，能够避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，另外即使具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有长的使用寿命并且是 能够以低成本生产。

公开(公告)号：US20100003510A1

公开(公告)日：2010-01-07

申请号：US12457781

申请日：2009-06-22

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： B32B7/00

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  Y10T428/26 ,  Y10T428/263 ,  Y10T428/264 ,  Y10T428/265

摘要： The present invention is a corrosion-resistant multilayer ceramic member including at least: a ceramic substrate, an electrode layer formed on the ceramic substrate, a feeding member that supplies electricity to the electrode layer, and a protection layer that prevents corrosion; wherein the electrode layer is formed on one surface or both surfaces of the ceramic substrate, the feeding member is connected with the electrode layer, the protection layer is formed with a thickness of 0.02 mm or above and 10 mm or less on that surface of the ceramic substrate where the electrode layer is formed so as to cover the electrode layer, and the protection layer contains any one of silicon oxide, rare-earth oxide, aluminum nitride, and aluminum oxide as a main component. Hereby, there is provided a corrosion-resistant multilayer ceramic member that has excellent corrosion resistance and a long life duration even when exposed to a corrosive gas.

摘要翻译： 本发明是一种耐腐蚀性多层陶瓷构件，至少包括：陶瓷基板，形成在陶瓷基板上的电极层，向电极层供电的进给构件和防止腐蚀的保护层; 其中所述电极层形成在所述陶瓷基板的一个表面或两个表面上，所述馈送构件与所述电极层连接，所述保护层在所述表面上形成为0.02mm以上且10mm以下的厚度 陶瓷基板，其中形成电极层以覆盖电极层，并且保护层包含氧化硅，稀土氧化物，氮化铝和氧化铝中的任一种作为主要成分。 因此，提供了即使暴露于腐蚀性气体时也具有优异的耐腐蚀性和长寿命的耐腐蚀性多层陶瓷构件。

公开(公告)号：US20090107635A1

公开(公告)日：2009-04-30

申请号：US12285108

申请日：2008-09-29

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： H01L21/302 ,  H01L21/30

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H02N13/00 ,  H05B3/143

摘要： The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

摘要翻译： 本发明涉及一种耐腐蚀多层陶瓷构件，其至少包括：陶瓷支撑基板; 形成在所述陶瓷支撑基板上的电极层; 连接到所述电极层的电源构件; 形成在所述陶瓷支撑基板上以覆盖所述电极层的绝缘保护层; 以及陶瓷保护基板，其至少一部分设置在绝缘保护层上。 由此，即使在暴露于腐蚀性气体的情况下，也能够提供耐腐蚀性优异的长寿命耐腐蚀性的多层陶瓷部件。

公开(公告)号：US20070241096A1

公开(公告)日：2007-10-18

申请号：US11783581

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及作为形成在保护层上的具有化学计量比的氧量的氧化物的耐腐蚀层4p。 可以提供一种加热元件，其中在保护层上形成电阻率或硬度被控制的耐腐蚀层，即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过， 由此，能够避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，另外即使具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有长的使用寿命，并且是 能够以低成本生产。

公开(公告)号：US06917021B2

公开(公告)日：2005-07-12

申请号：US10465324

申请日：2003-06-19

申请人： Shoji Kano ,  Ryouji Iwai ,  Nobuo Arai

发明人： Shoji Kano ,  Ryouji Iwai ,  Nobuo Arai

IPC分类号： H05B3/20 ,  C04B35/52 ,  H01L21/00 ,  H01L21/02 ,  H01L21/683 ,  H05B3/10 ,  H05B3/14 ,  H05B3/74

CPC分类号： H05B3/143 ,  H01L21/67103 ,  H01L21/6831

摘要： There is disclosed a heating apparatus with electrostatic attraction function 1, comprising at least a supporting base 2, an electrode for electrostatic attraction 4 and a heating layer 5 that are formed on the supporting base, and an insulating layer 6 that is formed on the electrode for electrostatic attraction and the heating layer, wherein the electrode for electrostatic attraction and/or the heating layer are/is composed of pyrolytic graphite containing boron and/or boron carbide of 0.001-30% by weight in terms of boron concentration, and the insulating layer has an electric resistivity of 106-1015 Ωcm. There is provided a heating apparatus with electrostatic attraction function, which has a high thermal shock resistance, no problem of delamination, a proper resistance value, and a sufficient electrostatic attraction force even in a medium and high temperature range of 500-800° C., which causes no breakage of devices due to leakage current, and which can be used stably during rapid rise and rapid drop in temperature.

摘要翻译： 公开了一种具有静电吸引功能的加热装置1，至少包括支撑基座2，静电吸引用电极4和形成在支撑基座上的加热层5以及形成在电极上的绝缘层6 静电吸引用电极和/或加热层用硼浓度为0.001-30重量％的含有硼和/或碳化硼的热解石墨构成，绝缘体 层的电阻率为10 -6〜15Ω。 提供具有静电吸引功能的加热装置，即使在500-800℃的中等和高温范围内，其具有高抗热震性，没有分层问题，适当的电阻值和足够的静电吸引力。 ，不会由于泄漏电流而导致器件损坏，并且可以在快速上升和温度快速下降时稳定使用。