Backplane for flat panel display apparatus, flat panel display apparatus including the same, and method of manufacturing backplane for flat panel display apparatus
    6.
    发明授权
    Backplane for flat panel display apparatus, flat panel display apparatus including the same, and method of manufacturing backplane for flat panel display apparatus 有权
    平板显示装置的背板,包括该平板显示装置的平面显示装置以及制造平板显示装置背板的方法

    公开(公告)号:US08729552B2

    公开(公告)日:2014-05-20

    申请号:US13494414

    申请日:2012-06-12

    IPC分类号: H01L29/12

    摘要: In one aspect, a back plane for a flat panel display apparatus include: a substrate; a source electrode and a drain electrode formed on the substrate; a capacitor bottom electrode formed on a same layer as the source/drain electrodes; an active layer formed on the substrate in correspondence to the source electrode and the drain electrode; a blocking layer interposed between the source electrode and the drain electrode and the active layer; a first insulation layer formed on the substrate to cover the active layer; a gate electrode formed on the first insulation layer in correspondence to the active layer; a capacitor top electrode formed on a same layer as the gate electrode in correspondence to the capacitor bottom electrode; and a second insulation layer formed on the first insulation layer to cover the gate electrode and the capacitor top electrode is provided.

    摘要翻译: 一方面,平板显示装置的背板包括:基板; 形成在所述基板上的源电极和漏电极; 形成在与所述源极/漏极电极相同的层上的电容器底部电极; 形成在所述基板上的对应于所述源电极和所述漏电极的有源层; 插入在源电极和漏电极和有源层之间的阻挡层; 形成在所述基板上以覆盖所述有源层的第一绝缘层; 对应于所述有源层形成在所述第一绝缘层上的栅电极; 形成在与电容器底部电极对应的与栅电极相同的层上的电容器顶部电极; 并且设置在第一绝缘层上形成以覆盖栅电极和电容器顶电极的第二绝缘层。

    Thin film transistor, method of manufacturing the same and flat panel display device having the same
    7.
    发明授权
    Thin film transistor, method of manufacturing the same and flat panel display device having the same 有权
    薄膜晶体管,其制造方法和具有该薄膜晶体管的平板显示装置

    公开(公告)号:US08541258B2

    公开(公告)日:2013-09-24

    申请号:US13091614

    申请日:2011-04-21

    IPC分类号: H01L21/00

    CPC分类号: H01L29/7869 H01L29/78606

    摘要: A thin film transistor (TFT) using an oxide semiconductor as an active layer, a method of manufacturing the TFT, and a flat panel display device having the TFT include source and drain electrodes formed on a substrate; an active layer formed of an oxide semiconductor disposed on the source and drain electrodes; a gate electrode; and an interfacial stability layer formed on at least one of top and bottom surfaces of the active layer. In the TFT, the interfacial stability layer is formed of an oxide having a band gap of 3.0 to 8.0 eV. Since the interfacial stability layer has the same characteristics as a gate insulating layer and a passivation layer, chemically high interface stability is maintained. Since the interfacial stability layer has a band gap equal to or greater than that of the active layer, charge trapping is physically prevented.

    摘要翻译: 使用氧化物半导体作为有源层的薄膜晶体管(TFT),TFT的制造方法以及具有TFT的平板显示装置包括:形成在基板上的源极和漏极; 由设置在源极和漏极上的氧化物半导体形成的有源层; 栅电极; 以及形成在活性层的顶表面和底表面中的至少一个上的界面稳定层。 在TFT中,界面稳定层由带隙为3.0〜8.0eV的氧化物形成。 由于界面稳定层具有与栅极绝缘层和钝化层相同的特性,因此保持了化学上高的界面稳定性。 由于界面稳定层具有等于或大于有源层的带隙,所以物理地防止了电荷俘获。

    Oxide semiconductor thin film transistor, method of manufacturing the same, and organic electroluminescent device including the same
    9.
    发明授权
    Oxide semiconductor thin film transistor, method of manufacturing the same, and organic electroluminescent device including the same 有权
    氧化物半导体薄膜晶体管,其制造方法以及包含该氧化物半导体薄膜晶体管的有机电致发光器件

    公开(公告)号:US08319217B2

    公开(公告)日:2012-11-27

    申请号:US12873199

    申请日:2010-08-31

    IPC分类号: H01L29/12

    CPC分类号: H01L29/7869

    摘要: A thin film transistor including: a substrate; a gate electrode formed on the substrate; a gate insulating layer formed on the gate electrode and exposed portions of the substrate; an oxide semiconductor layer formed on the gate insulating layer to correspond to the gate electrode, and comprising an HfInZnO-based oxide semiconductor, wherein the oxide semiconductor layer has a Zn concentration gradient; and source and drain regions respectively formed on both sides of the oxide semiconductor layer and the gate insulating layer.

    摘要翻译: 1.一种薄膜晶体管,包括:基板; 形成在所述基板上的栅电极; 形成在所述栅电极上的栅极绝缘层和所述基板的露出部分; 形成在所述栅绝缘层上以对应于所述栅极的氧化物半导体层,并且包括HfInZnO基氧化物半导体,其中所述氧化物半导体层具有Zn浓度梯度; 以及分别形成在氧化物半导体层和栅极绝缘层的两侧上的源极和漏极区域。

    Thin film transistor, method of manufacturing the same and flat panel display device having the same
    10.
    发明授权
    Thin film transistor, method of manufacturing the same and flat panel display device having the same 有权
    薄膜晶体管,其制造方法和具有该薄膜晶体管的平板显示装置

    公开(公告)号:US07994500B2

    公开(公告)日:2011-08-09

    申请号:US12424860

    申请日:2009-04-16

    IPC分类号: H01L29/22

    CPC分类号: H01L29/7869 H01L29/78606

    摘要: A thin film transistor (TFT) using an oxide semiconductor as an active layer, a method of manufacturing the TFT, and a flat panel display device having the TFT include source and drain electrodes formed on a substrate; an active layer formed of an oxide semiconductor disposed on the source and drain electrodes; a gate electrode; and an interfacial stability layer formed on at least one of top and bottom surfaces of the active layer. In the TFT, the interfacial stability layer is formed of an oxide having a band gap of 3.0 to 8.0 eV. Since the interfacial stability layer has the same characteristics as a gate insulating layer and a passivation layer, chemically high interface stability is maintained. Since the interfacial stability layer has a band gap equal to or greater than that of the active layer, charge trapping is physically prevented.

    摘要翻译: 使用氧化物半导体作为有源层的薄膜晶体管(TFT),TFT的制造方法以及具有TFT的平板显示装置包括:形成在基板上的源极和漏极; 由设置在源极和漏极上的氧化物半导体形成的有源层; 栅电极; 以及形成在活性层的顶表面和底表面中的至少一个上的界面稳定层。 在TFT中,界面稳定层由带隙为3.0〜8.0eV的氧化物形成。 由于界面稳定层具有与栅极绝缘层和钝化层相同的特性,因此保持了化学上高的界面稳定性。 由于界面稳定层具有等于或大于有源层的带隙,所以物理地防止电荷俘获。