公开(公告)号：US20140054264A1

公开(公告)日：2014-02-27

申请号：US14072116

申请日：2013-11-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byung-kyu LEE ,  Du-hyun LEE ,  Woong KO

IPC: B41C1/02

CPC classification number: B41C1/02 ,  B29C33/3842 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0015

Abstract: Methods of manufacturing a nanoimprint stamp are provided. The method may include forming a pattern on a surface of a master substrate, depositing an etch barrier layer on a surface of a stamp substrate, coating a photoresist on one of the surfaces of the master substrate and the stamp substrate on which an etch barrier layer is formed, forming a photoresist pattern by pressing the master substrate against the stamp substrate, forming a hard mask by etching the etch barrier layer using the photoresist pattern, and etching the stamp substrate using the hard mask as an etch mask.

Abstract translation: 提供制造纳米压印印模的方法。 该方法可以包括在母板的表面上形成图案，在印模基板的表面上沉积蚀刻阻挡层，在主基板和印模基板的一个表面上涂覆光致抗蚀剂，在其上具有蚀刻阻挡层 形成光刻胶图案，通过将母版基板压靠在印模基板上，通过使用光致抗蚀剂图案蚀刻蚀刻阻挡层形成硬掩模，并使用硬掩模作为蚀刻掩模蚀刻印模基板。

公开(公告)号：US20130292865A1

公开(公告)日：2013-11-07

申请号：US13707690

申请日：2012-12-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ki-yeon YANG ,  Woong KO ,  Jae-kwan KIM ,  Du-hyun LEE ,  Byung-kyu LEE

IPC: B29C59/02

CPC classification number: B29C59/026 ,  G03F7/0002

Abstract: A template system, and a nano-imprint method using the same, include a template having a nano-pattern and configured to transfer the nano-pattern to a resin material on a substrate, and a pressure controlling apparatus configured to change a pressure of the template with respect to the substrate according to an intensity of bubbles captured between the substrate and the template.

Abstract translation: 模板系统和使用其的纳米压印方法包括具有纳米图案并被配置为将纳米图案转印到基板上的树脂材料的模板，以及压力控制装置，其被配置为改变 根据在基板和模板之间捕获的气泡的强度相对于基板的模板。

公开(公告)号：US20150144918A1

公开(公告)日：2015-05-28

申请号：US14549800

申请日：2014-11-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eun-hyoung CHO ,  Woong KO ,  Jae-kwan KIM ,  Chang-youl MOON ,  Hong-shik SHIM ,  In-kyeong YOO ,  Chul-ho JEONG

IPC: H01L51/56 ,  H01L51/52 ,  H01L27/32 ,  B29D11/00 ,  B29C33/38

CPC classification number: H01L51/5275 ,  B29C33/3885 ,  B29D11/00365 ,  B29D11/00788 ,  B29K2029/04 ,  B29K2905/00 ,  B29K2907/00

Abstract: An optical film manufacturing method includes forming a master in which a shape corresponding to a plurality of micro-lens patterns is engraved, forming a low refractive index pattern layer in which the plurality of micro-lens patterns are formed, by using the master, forming a high refractive index material layer that has a higher refractive index than a refractive index of the low refractive index pattern layer, and imprinting the low refractive index pattern layer on the high refractive index material layer to form a high refractive index pattern layer, on a first surface of a substrate.

Abstract translation: 一种光学薄膜的制造方法，其特征在于，具备形成与多个微透镜图案对应的形状被雕刻的主体，通过使用所述主体形成形成有多个微透镜图案的低折射率图案层，形成 具有比所述低折射率图案层的折射率更高的折射率的高折射率材料层，以及在所述高折射率材料层上压印所述低折射率图案层以形成高折射率图案层， 衬底的第一表面。

公开(公告)号：US20220223751A1

公开(公告)日：2022-07-14

申请号：US17707076

申请日：2022-03-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeongyub LEE ,  Woong KO ,  Changseung LEE ,  Hongkyu PARK ,  Chanwook BAIK ,  Hongseok LEE ,  Wonjae JOO

IPC: H01L31/0352 ,  H01L27/144 ,  H01L31/02 ,  H01L31/0224 ,  H01L31/0288 ,  H01L31/105 ,  H01L31/18

Abstract: A meta optical device configured to sense incident light includes a plurality of nanorods each having a shape dimension less than a wavelength of the incident light. Each nanorod includes a first conductivity type semiconductor layer, an intrinsic semiconductor layer, and a second conductivity type semiconductor layer. The meta optical device may separate and sense wavelengths of the incident light.

公开(公告)号：US20210126142A1

公开(公告)日：2021-04-29

申请号：US16848165

申请日：2020-04-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeongyub LEE ,  Woong KO ,  Changseung LEE ,  Hongkyu PARK ,  Chanwook BAIK ,  Hongseok LEE ,  Wonjae JOO

IPC: H01L31/0352 ,  H01L31/105 ,  H01L27/144 ,  H01L31/0288 ,  H01L31/0224 ,  H01L31/02 ,  H01L31/18

Abstract: A meta optical device configured to sense incident light includes a plurality of nanorods each having a shape dimension less than a wavelength of the incident light. Each nanorod includes a first conductivity type semiconductor layer, an intrinsic semiconductor layer, and a second conductivity type semiconductor layer. The meta optical device may separate and sense wavelengths of the incident light.

公开(公告)号：US20170133469A1

公开(公告)日：2017-05-11

申请号：US15236564

申请日：2016-08-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yun Sung WOO ,  Hiesang SOHN ,  Weonho SHIN ,  Eun-Hyoung CHO ,  Chan KWAK ,  Hyeon Cheol PARK ,  Youngjin CHO ,  Dong-Su KO ,  Woong KO ,  Kwanghee KIM

IPC: H01L29/16 ,  H01L29/167

CPC classification number: H01L29/1606 ,  H01L29/167 ,  H01L29/41 ,  H01L29/413 ,  H01L29/43 ,  H01L29/45 ,  H01L31/022466 ,  H01L33/42

Abstract: A transparent electrode including: a substrate; a first layer disposed on the substrate, the first layer including a graphene mesh structure, the graphene mesh structure including graphene and a plurality of holes; and a second layer disposed on the first layer, wherein the second layer includes a plurality of conductive nanowires.

公开(公告)号：US20140158662A1

公开(公告)日：2014-06-12

申请号：US13920503

申请日：2013-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Du-hyun LEE ,  Woong KO ,  Jae-kwan KIM ,  Ki-yeon YANG ,  Byung-kyu LEE

IPC: B29C59/00

CPC classification number: B82Y40/00 ,  B29C33/424 ,  B82Y10/00 ,  G03F7/0002

Abstract: A nanoimprint stamp having an alignment mark includes a transparent substrate having a plurality of convex portions, and a semitransparent layer on each of the plurality of convex portions. The semitransparent layer has a transmittance of about 20% to about 80% with respect to ultraviolet rays.

Abstract translation: 具有对准标记的纳米压印印模包括具有多个凸部的透明基板和在所述多个凸部中的每一个上的半透明层。 半透明层相对于紫外线具有约20％至约80％的透射率。