NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20250089341A1

    公开(公告)日:2025-03-13

    申请号:US18818855

    申请日:2024-08-29

    Abstract: A non-volatile memory device may include a channel layer extending in a first direction, a plurality of gate electrodes and a plurality of insulating layers spaced apart from the channel layer and alternately arranged in the first direction, a charge trap layer between the channel layer and the plurality of gate electrodes, and a charge tunneling layer between the channel layer and the charge trap layer. The plurality of gate electrodes may include M, A, and X, where M may include a metal; A may include a Group 13 element, a Group 14 element, or V, or a combination thereof; X may include carbon or nitrogen, and M, A, and X may be arranged to have a layered crystal structure.

    FERROELECTRIC FIELD EFFECT TRANSISTOR, MEMORY DEVICE, AND NEURAL NETWORK DEVICE

    公开(公告)号:US20250126802A1

    公开(公告)日:2025-04-17

    申请号:US18761688

    申请日:2024-07-02

    Abstract: A ferroelectric field effect transistor includes a channel, a gate electrode provided to face the channel, a ferroelectric layer provided between the channel and the gate electrode, an interfacial layer provided between the channel and the ferroelectric layer, and a diffusion barrier layer provided between the ferroelectric layer and the gate electrode, wherein the diffusion barrier layer includes SiON, the diffusion barrier layer has an oxygen concentration gradient that gradually decreases from a first surface of the diffusion barrier layer facing the gate electrode toward a second surface of the diffusion barrier layer facing the ferroelectric layer, and the diffusion barrier layer may have a nitrogen concentration gradient that gradually increases from the first surface toward the second surface.

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