NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20250089341A1

    公开(公告)日:2025-03-13

    申请号:US18818855

    申请日:2024-08-29

    Abstract: A non-volatile memory device may include a channel layer extending in a first direction, a plurality of gate electrodes and a plurality of insulating layers spaced apart from the channel layer and alternately arranged in the first direction, a charge trap layer between the channel layer and the plurality of gate electrodes, and a charge tunneling layer between the channel layer and the charge trap layer. The plurality of gate electrodes may include M, A, and X, where M may include a metal; A may include a Group 13 element, a Group 14 element, or V, or a combination thereof; X may include carbon or nitrogen, and M, A, and X may be arranged to have a layered crystal structure.

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