METHOD OF FORMING TRANSITION METAL DICHALCOGENIDE THIN FILM

    公开(公告)号:US20230114347A1

    公开(公告)日:2023-04-13

    申请号:US18063909

    申请日:2022-12-09

    Abstract: Disclosed herein are a method of forming a transition metal dichalcogenide thin film and a method of manufacturing a device including the same. The method of forming a transition metal dichalcogenide thin film includes: providing a substrate in a reaction chamber; depositing a transition metal dichalcogenide thin film on the substrate using a sputtering process that uses a transition metal precursor and a chalcogen precursor and is performed at a first temperature; and injecting the chalcogen precursor in a gas state and heat-treating the transition metal dichalcogenide thin film at a second temperature that is higher than the first temperature. The substrate may include a sapphire substrate, a silicon oxide (SiO2) substrate, a nanocrystalline graphene substrate, or a molybdenum disulfide (MoS2) substrate.

    Memory system for performing RAID recovery and a method of operating the memory system

    公开(公告)号:US10521303B2

    公开(公告)日:2019-12-31

    申请号:US15442969

    申请日:2017-02-27

    Abstract: In a method of operating the memory system, the method includes detecting whether data of a read-out unit read from a first cell region has an error correction code (ECC) failure, in response to an external read-out request for the read-out unit, recovering and outputting the data of the read-out unit by performing Redundant Array of Inexpensive Disk (RAID) recovery by using data and RAID parity read from other cell regions, recovering a plurality of pieces of data stored in the first cell region by performing the RAID recovery using the data and RAID parity read from the other cell regions, and migrating the recovered plurality of pieces of data to a second cell region in units of cell regions.

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