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公开(公告)号:US20250140316A1
公开(公告)日:2025-05-01
申请号:US18909041
申请日:2024-10-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kwangsoo Kim
IPC: G11C16/04 , H01L25/065 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B80/00
Abstract: A semiconductor device includes a peripheral circuit structure and a cell structure stacked on the peripheral circuit structure, the cell structure including gate electrodes spaced apart from each other in a vertical direction, a channel structure arranged within a channel hole extending in the vertical direction by passing through the gate electrodes, including a channel layer and a back gate electrode spaced apart from the channel layer, and including a first end portion arranged adjacent to the peripheral circuit structure and a second end portion opposite to the first end portion, a common source layer connected to the channel layer at the second end portion of the channel structure, an upper insulating layer on the common source layer, and a back gate contact arranged within a first backside contact hole passing through the upper insulating layer and the common source layer and connected to the back gate electrode.
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公开(公告)号:US11988495B2
公开(公告)日:2024-05-21
申请号:US17156049
申请日:2021-01-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kwangsoo Kim , Sungyoon Ryu , Daejun Park , Seong Yun , Seungryeol Oh , Sujin Lee , Jaeyong Lee , Minho Rim , Chungsam Jun , Myungjun Lee
CPC classification number: G01B11/02 , G01N21/8806 , G01N21/8851 , G03F7/70625 , G03F7/7065 , G01B2210/56 , G01N2021/8887
Abstract: Provided is a through-focus image-based metrology device including an optical device, and a computing device configured to acquire at least one through-focus image of a target from the optical device, generate an intensity profile based on the acquired at least one through-focus image, and perform metrology on the target based on the generated intensity profile, wherein the optical device includes a stage on which the target is disposed, the stage being configured to move by one step in at least one direction based on control of the computing device, and to acquire the at least one through-focus image, an image sensor disposed on the stage, an objective lens disposed between the image sensor and the stage, the objective lens being configured to transmit reflected light from the target, and a light source configured to emit illumination light to the target through the objective lens.
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公开(公告)号:US10699927B1
公开(公告)日:2020-06-30
申请号:US16509835
申请日:2019-07-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Wookrae Kim , Kwangsoo Kim , Gwangsik Park
Abstract: An inspection apparatus includes a first optical module including a first light source configured to emit first light to a semiconductor structure, a second light source configured to emit second light different from the first light to a portion adjacent to a portion to which the first light is emitted in the semiconductor structure, a detector configured to detect the second light reflected toward the second light source, and a lock-in amplifier connected to the first optical module and the detector.
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公开(公告)号:US11158651B2
公开(公告)日:2021-10-26
申请号:US16773103
申请日:2020-01-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyunghwan Lee , Kwangsoo Kim , Taehun Kim , Yongseok Kim , Kohji Kanamori
IPC: H01L29/792 , H01L27/11582 , G11C16/04 , G11C5/02
Abstract: A vertical memory device includes gate electrodes on a substrate. The gate electrodes are spaced apart from each other in a vertical direction. A channel penetrates the gate electrodes and extends in the vertical direction. A tunnel insulation pattern is formed on an outer sidewall of the channel. A charge trapping pattern structure is formed on an outer sidewall of the tunnel insulation pattern adjacent the gate electrodes in a horizontal direction. The charge trapping pattern structure includes upper and lower charge trapping patterns. A blocking pattern is formed between the charge trapping pattern structure and each of the adjacent gate electrodes. An upper surface of the upper charge trapping pattern is higher than an upper surface of the adjacent gate electrode. A lower surface of the lower charge trapping pattern is lower than a lower surface of an adjacent gate electrode.
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公开(公告)号:US20250054846A1
公开(公告)日:2025-02-13
申请号:US18633688
申请日:2024-04-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jaesun Kim , Kwangsoo Kim , Yiseul Han
IPC: H01L23/498 , H01L23/00 , H01L23/31 , H01L23/538 , H01L25/065 , H10B80/00
Abstract: Provided is a semiconductor package having a multi-chip package structure including a lower semiconductor chip and an upper semiconductor chip. The upper semiconductor chip includes a plurality of upper semiconductor chips, and one of the plurality of upper semiconductor chips is integrally connected to an adjacent one of the plurality of upper semiconductor chips with a scribe lane therebetween on a same plane.
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公开(公告)号:US12165976B2
公开(公告)日:2024-12-10
申请号:US17861700
申请日:2022-07-11
Applicant: Samsung Electronics Co., Ltd.
Inventor: Junhyoung Kim , Joongshik Shin , Kwangsoo Kim
IPC: H10B41/27 , H01L21/768 , H01L23/522 , H01L23/528 , H01L23/535 , H10B41/35 , H10B41/41 , H10B43/27 , H10B43/35 , H10B43/40
Abstract: A three-dimensional semiconductor device may include a substrate having a cell area and an extension area, a word line stack disposed above the substrate, the word line stack including mold layers and word lines alternately stacked, vertical channel structures vertically penetrating the word line stack in the cell area, and a first extension through-via structure vertically penetrating the word line stack in the extension area. The first extension through-via structure may include a first via plug and a first via liner layer surrounding sidewalls of the first via plug. The first via liner layer may include first dents respectively disposed at the same levels horizontally as the word lines of the word line stack.
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公开(公告)号:US20210396510A1
公开(公告)日:2021-12-23
申请号:US17156049
申请日:2021-01-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kwangsoo Kim , Sungyoon Ryu , Daejun Park , Seong Yun , Seungryeol Oh , Sujin Lee , Jaeyong Lee , Minho Rim , Chungsam Jun , Myungjun Lee
Abstract: Provided is a through-focus image-based metrology device including an optical device, and a computing device configured to acquire at least one through-focus image of a target from the optical device, generate an intensity profile based on the acquired at least one through-focus image, and perform metrology on the target based on the generated intensity profile, wherein the optical device includes a stage on which the target is disposed, the stage being configured to move by one step in at least one direction based on control of the computing device, and to acquire the at least one through-focus image, an image sensor disposed on the stage, an objective lens disposed between the image sensor and the stage, the objective lens being configured to transmit reflected light from the target, and a light source configured to emit illumination light to the target through the objective lens.
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公开(公告)号:US20250158001A1
公开(公告)日:2025-05-15
申请号:US18780621
申请日:2024-07-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyunsoo Chung , Kwangsoo Kim , Chiwoo Lee
Abstract: A chip structure including a semiconductor chip, a photonic integrated circuit chip spaced apart from the semiconductor chip in a horizontal direction, an electronic integrated circuit chip on the semiconductor chip and the photonic integrated circuit chip, a first molding layer surrounding the semiconductor chip and the photonic integrated circuit chip, and a second molding layer on the semiconductor chip, the photonic integrated circuit chip, and the first molding layer and surrounding the electronic integrated circuit chip. A portion of the electronic integrated circuit chip overlaps the photonic integrated circuit chip in a vertical direction, and another portion of the electronic integrated circuit chip overlaps the semiconductor chip in the vertical direction.
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公开(公告)号:US20250062237A1
公开(公告)日:2025-02-20
申请号:US18648683
申请日:2024-04-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kwangsoo Kim , Hyunsoo Chung , Jungul Hwang
IPC: H01L23/538 , H01L23/00 , H01L23/31 , H01L23/498 , H01L25/10
Abstract: Provided is a semiconductor package including a first redistribution layer, a first semiconductor chip disposed on the first redistribution layer, a circuit board disposed between the first redistribution layer and the first semiconductor chip, bonding wires connecting the first semiconductor chip and the circuit board to each other, a second redistribution layer disposed on the first semiconductor chip, a second semiconductor chip disposed on the second redistribution layer, and conductive posts connecting the first redistribution layer and the second redistribution layer to each other.
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公开(公告)号:US20250095759A1
公开(公告)日:2025-03-20
申请号:US18796585
申请日:2024-08-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Ilho Myeong , Kwangsoo Kim , Suseong Noh
Abstract: A method of operating a memory device, the method including: applying a program inhibition voltage to an unselected bit line in a first program loop of a plurality of program loops; applying a program permission voltage to a selected bit line in the first program loop; applying a pass voltage to an unselected word line in the first program loop; applying a program voltage to a selected word line in the first program loop; applying a pulse voltage having a polarity opposite to a polarity of the program voltage to the selected word line after applying the program voltage to the selected word line, in the first program loop; and applying a verification voltage to the selected word line after applying the pulse voltage to the selected word line, in the first program loop.
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