SEMICONDUCTOR DEVICE
    3.
    发明申请

    公开(公告)号:US20250169062A1

    公开(公告)日:2025-05-22

    申请号:US18936133

    申请日:2024-11-04

    Abstract: Provided is a semiconductor device including a lower electrode, an upper electrode on the lower electrode, and a dielectric layer structure between the lower electrode and the upper electrode. The dielectric layer structure includes a first dielectric layer in contact with the lower electrode, a second dielectric layer in contact with the first dielectric layer, and a third dielectric layer in contact with the upper electrode. The first dielectric layer, the second dielectric layer, and the third dielectric layer include an anti-ferroelectric material. The anti-ferroelectric material of the first, second, and third dielectric layers are of the same material type, and a silicon dopant is included in a region adjacent to an interface between the first dielectric layer and the lower electrode, and a region adjacent to an interface between the third dielectric layer and the upper electrode.

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