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公开(公告)号:US20240237332A1
公开(公告)日:2024-07-11
申请号:US18394884
申请日:2023-12-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungmin PARK , Hanjin LIM , Hyungsuk JUNG
IPC: H10B12/00
CPC classification number: H10B12/315 , H01L28/60 , H10B12/34
Abstract: A semiconductor device includes a structure including a conductive region, and a capacitor electrically connected to the conductive region of the structure. The capacitor includes a first electrode electrically connected to the conductive region, a second electrode on the first electrode, and a dielectric layer between the first electrode and the second electrode. At least one of the first electrode and the second electrode includes a first material layer including a first material region including a first crystalline region and a second crystalline region different from the first crystalline region, and a second material region between the first crystalline region and the second crystalline region, and a second material layer on the first material layer. At least a portion of the first material layer is between the second material layer and the dielectric layer. A material of the first material region is different from a material of the second material region.
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公开(公告)号:US20230337414A1
公开(公告)日:2023-10-19
申请号:US18300180
申请日:2023-04-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungmin PARK , Hanjin LIM , Hyungsuk JUNG
IPC: H10B12/00
CPC classification number: H10B12/315
Abstract: A semiconductor device includes a cell capacitor disposed on a substrate and that and includes a first electrode, a dielectric layer structure, and a second electrode. The dielectric layer structure includes a first dielectric layer disposed on the first electrode and that includes a ferroelectric material, a second dielectric layer disposed on the first dielectric layer and that includes an antiferroelectric material, and dielectric particles dispersed in at least one of the first dielectric layer or the second dielectric layer and that include a paraelectric material.
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公开(公告)号:US20240213302A1
公开(公告)日:2024-06-27
申请号:US18394644
申请日:2023-12-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungmin PARK , Hanjin LIM , Hyungsuk JUNG
IPC: H01G4/08
CPC classification number: H01L28/40 , H10B12/315
Abstract: An integrated circuit device may include a transistor on a substrate and a capacitor structure electrically connected to the transistor. The capacitor structure may include a first electrode, a dielectric layer structure on the first electrode, and a second electrode on the dielectric layer structure. The dielectric layer structure may include a plurality of first dielectric layers and a plurality of second dielectric layers that are alternately stacked. The plurality of first dielectric layers may include a ferroelectric material, and the plurality of second dielectric layers may include an anti-ferroelectric material. The distribution proportion of internal defect dipoles gradually may vary in a thickness direction of the dielectric layer structure.
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公开(公告)号:US20230320075A1
公开(公告)日:2023-10-05
申请号:US17979187
申请日:2022-11-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jungmin PARK , Hanjin LIM , Hyungsuk JUNG
IPC: H10B12/00
CPC classification number: H10B12/315 , H10B12/033
Abstract: An integrated circuit (IC) device includes a lower electrode on a substrate. The lower electrode includes a metal-containing film including a first metal. A dielectric film covers the lower electrode. An upper electrode faces the lower electrode with the dielectric film therebetween. The lower electrode includes a main lower electrode layer including no metal dopant of a different type from the first metal. The main lower electrode layer is apart from the dielectric film. An interfacial lower electrode layer is in contact with the dielectric film and includes a first metal dopant and a second metal dopant. The first metal dopant is in a first valence state and includes a second metal, which is different from the first metal. The second metal dopant is in a second valence state, which is less than the first valence state, and includes a third metal, which is different from the first and second metals.
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公开(公告)号:US20230062485A1
公开(公告)日:2023-03-02
申请号:US17683506
申请日:2022-03-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hanjin LIM , Younsoo KIM , Sunmin MOON , Jungmin PARK , Hyungsuk JUNG
Abstract: A batch-type apparatus for atomic layer etching (ALE), which is capable of ALE-processing several wafers at the same time, and an ALE method and a semiconductor device manufacturing method based on the batch-type apparatus, are provided. The batch-type apparatus for ALE includes a wafer stacking container in which a plurality of wafers are arranged in a vertical direction, an inner tube extending in the vertical direction, a plurality of nozzles arranged in a first outer portion in the inner tube in a horizontal direction, and a heater surrounding the inner tube and configured to adjust a temperature in the inner tube, wherein gas injection holes are formed corresponding to a height of the plurality of wafers in each of the plurality of nozzles, and a gas outlet is formed in a second outer portion in the inner tube, opposite to the first outer portion.
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公开(公告)号:US20250137123A1
公开(公告)日:2025-05-01
申请号:US18830845
申请日:2024-09-11
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungmin PARK , Haeryong KIM , Boeun PARK , Jeongil BANG , Jooho LEE , Hanjin LIM , Hyungsuk JUNG , Sumin HWANG
IPC: C23C16/455 , C23C16/40 , C23C16/44 , H01L27/06 , H10B12/00
Abstract: A method of manufacturing a multi-component thin film includes providing a substrate into a process chamber, performing a first cycle, the first cycle including forming a first atomic layer including a first precursor on the substrate by using an atomic layer deposition process, performing a third cycle, the third cycle including injecting an additive onto the first atomic layer, and performing a second cycle, the second cycle including forming a second atomic layer including a second precursor on the first atomic layer and the additive by using an atomic layer deposition process, wherein a thermal decomposition temperature of the additive is lower than each of a thermal decomposition temperature of the first precursor and a thermal decomposition temperature of the second precursor.
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公开(公告)号:US20240072106A1
公开(公告)日:2024-02-29
申请号:US18238028
申请日:2023-08-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jungmin PARK , Hanjin LIM , Hyungsuk JUNG
Abstract: An integrated circuit device may include a transistor on a substrate, and a capacitor structure electrically connected to the transistor. The capacitor structure may include a first electrode, a dielectric layer structure on the first electrode, and a second electrode on the dielectric layer structure. The dielectric layer structure may include a plurality of first dielectric layers and a plurality of second dielectric layers which are alternately stacked. Each of the plurality of first dielectric layers may include an anti-ferroelectric material, and each of the plurality of second dielectric layers includes Hf1-xZrxO2 in which 0
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公开(公告)号:US20230380141A1
公开(公告)日:2023-11-23
申请号:US18169721
申请日:2023-02-15
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jungmin PARK , Hanjin LIM , Hyungsuk JUNG
IPC: H10B12/00
CPC classification number: H10B12/315 , H10B12/033
Abstract: A semiconductor device includes an upper electrode, a lower electrode, a dielectric layer between the upper electrode and the lower electrode, and a low-bandgap interfacial layer including at least one of a first low-bandgap interfacial layer between the dielectric layer and the upper electrode and a second low-bandgap interfacial layer between the dielectric layer and the lower electrode, wherein each of the first low-bandgap interfacial layer and the second low-bandgap interfacial layer includes a metal oxide having a bandgap energy of more than about 2.5 eV and less than or equal to about 3.5 eV.
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公开(公告)号:US20240315045A1
公开(公告)日:2024-09-19
申请号:US18495038
申请日:2023-10-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungmin PARK , Ji-Sung KIM , Hanjin LIM , Hyungsuk JUNG
IPC: H10B53/30
CPC classification number: H10B53/30
Abstract: A semiconductor device may include a substrate including a first impurity region and a second impurity region; a first word line in a region of the substrate with the first impurity region on one side of the first word line and the second impurity region on an other side of the first word line; a bit line connected to the first impurity region; a first conductive pattern connected to the second impurity region; a first partial electrode and a second partial electrode on the first conductive pattern; a first dielectric layer in contact with an upper surface of the first partial electrode and an upper surface of the second partial electrode; and a common electrode on the first dielectric layer. An area of the upper surface of the first partial electrode may be different from an area of the upper surface of the second partial electrode.
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公开(公告)号:US20240096931A1
公开(公告)日:2024-03-21
申请号:US18462394
申请日:2023-09-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungmin PARK , Hanjin LIM , Hyungsuk JUNG
IPC: H10B12/00
CPC classification number: H01L28/91 , H01L28/75 , H10B12/0335 , H10B12/315
Abstract: A capacitor structure includes a lower electrode structure disposed on a substrate, including an oxide of a first metal having 4 valence electrons, and being doped with a second metal having 3, 5, 6, or 7 valence electrons, a dielectric pattern disposed on a sidewall of the lower electrode structure, and an upper electrode disposed on a sidewall of the dielectric pattern.
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