Abstract:
A semiconductor memory device includes a first stacked structure, a first supporter layer, a second stacked structure, a block cut structure, and a second supporter layer on the second stacked structure and separated by a second cut pattern. The first stacked structure includes a first and second stack, the second stacked structure includes a third stack separated by the block cut structure and a fourth stack, the first supporter layer is on the first stack and the second stack, the second supporter layer is on the third stack and the fourth stack, the first cut pattern includes a first connection on the block cut structure and connecting the first supporter layer and the second stack, and the second cut pattern of the second supporter layer includes a second connection on the block cut structure and connecting the second supporter layer placed on the third stack and the fourth stack.
Abstract:
A semiconductor device includes a lower wiring, an interlayer insulation film above the lower wiring and including a first portion having a first density, and a second portion on the first portion, the first portion and the second portion having a same material, and the second portion having a second density smaller than the first density, an upper wiring in the second portion of the interlayer insulating film, and a via in the first portion of the interlayer insulating film, the via connecting the upper wiring and the lower wiring.
Abstract:
A semiconductor device is provided. The provided semiconductor device may have enhanced reliability and operating characteristics. The semiconductor device includes a substrate, a device isolation film formed within the substrate, a first gate structure formed within the substrate, a recess formed on at least one side of the first gate structure and within the substrate and the device isolation film, the recess comprising an upper portion and a lower portion wherein the lower portion of the recess is formed within the substrate and the upper portion of the recess is formed across the substrate and the device isolation film, a buried contact filling the recess and an information storage electrically connected to the buried contact.
Abstract:
A method of fabricating a semiconductor device. A cell area and a core area is defined in a substrate. A bit line structure disposed in the cell area is provided. A gate structure disposed in the core area is provided, and a core capping film disposed on the gate structure is provided. A height of the core capping film is greater than a height of the bit line structure. A first contact film is formed on the bit line structure. A second contact film is formed on the core capping film. A mask is formed on the first contact film. An upper surface of the core capping film is exposed using the mask. The first contact film is etched until a height of the first contact film becomes less than a height of the bit line structure using an etching process. In the etching process, an etching rate for the first contact film is greater than etching rates for the bit line structure and the core capping film.
Abstract:
A method of fabricating a semiconductor device. A cell area and a core area is defined in a substrate. A bit line structure disposed in the cell area is provided. A gate structure disposed in the core area is provided, and a core capping film disposed on the gate structure is provided. A height of the core capping film is greater than a height of the bit line structure. A first contact film is formed on the bit line structure. A second contact film is formed on the core capping film. A mask is formed on the first contact film. An upper surface of the core capping film is exposed using the mask. The first contact film is etched until a height of the first contact film becomes less than a height of the bit line structure using an etching process. In the etching process, an etching rate for the first contact film is greater than etching rates for the bit line structure and the core capping film.
Abstract:
A method of fabricating a semiconductor device is provided. The method may include forming a first interlayer insulating film on a substrate, forming a second interlayer insulating film on the first interlayer insulating film, and forming a third interlayer insulating film on the second interlayer insulating film. Different amounts of carbon may be present in each of the first, second, and third interlayer insulating films. The third interlayer insulating film may be used as a mask pattern to form a via trench that extends at least partially into the first interlayer insulating film and the second interlayer insulating film. Supplying a carbon precursor may be interrupted between the forming of the second and third interlayer insulating films, such that the second interlayer insulating film and the third interlayer insulating film may have a discontinuous boundary therebetween.
Abstract:
An electronic device is provided. The electronic device includes a power receiver (PRx) that includes a receiver coil for receiving a power signal from a wireless power transmitting device and a wireless charging integrated circuit (IC) for converting the power signal into electrical energy, a power management circuit that is electrically connected to the PRx and configured to charge a battery using the electrical energy, and a processor that is electrically connected with the PRx and the power management circuit. The processor activates a power hold mode (PHM) if a charging level of the battery is a fully charged level and controls auxiliary charging of the battery.
Abstract:
Disclosed herein is a control method of a robot hand including recognizing a pre-posture of user's fingers using a master device, changing the shape of the robot hand according to the recognized pre-posture, recognizing a gripping motion of the user's fingers using the master device, and executing a gripping motion of the robot hand according to a gripping posture corresponding to the recognized pre-posture.
Abstract:
A method of tracking a moving object includes measuring displacement of an object to be tracked, obtaining a particle of the object to be tracked using the measured displacement, and tracking the object using pose information of the object in an image thereof and the obtained particle. A control apparatus includes an imaging module to perform imaging of an object and generates an image, and a tracking unit to acquire displacement and pose information of the object using the generated image of the object, to set a particle of the object using the acquired displacement of the object, and to track the object using the pose information of the object and the particle.
Abstract:
A robot control method of controlling a robot that has a flexible module including ‘n’ first nodes participating in pan motion and ‘n’ second nodes participating in tilt motion may include: measuring a translational motion distance, a pan motion angle, and a tilt motion angle of the flexible module; calculating state vectors of the ‘n’ first nodes and the ‘n’ second nodes using the measured translational motion distance; calculating operating angle distribution rates of the ‘n’ first nodes and operating angle distribution rates of the ‘n’ second nodes using the calculated state vectors of the ‘n’ first nodes and the calculated state vectors of the ‘n’ second nodes; and/or calculating operating angles of the ‘n’ first nodes and operating angles of the ‘n’ second nodes using the calculated operating angle distribution rates and the measured pan motion angle and tilt motion angle.