METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    10.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
    制造半导体器件的方法

    公开(公告)号:US20150056795A1

    公开(公告)日:2015-02-26

    申请号:US14445284

    申请日:2014-07-29

    Abstract: A method of manufacturing a semiconductor devices includes providing a semiconductor substrate that includes a channel region. The method includes forming a gate electrode material film including a stepped portion on the channel region. A sacrificial material film that has an etch selectivity that is the same as an etch selectivity of the gate electrode material film is formed. The sacrificial material film is planarized until a top surface of the gate electrode material film is exposed. The stepped portion is reduced by removing an exposed portion of the gate electrode material film.

    Abstract translation: 制造半导体器件的方法包括提供包括沟道区的半导体衬底。 该方法包括在沟道区上形成包括阶梯部分的栅电极材料膜。 形成具有与栅电极材料膜的蚀刻选择性相同的蚀刻选择性的牺牲材料膜。 将牺牲材料膜平坦化,直到露出栅电极材料膜的顶表面。 通过去除栅电极材料膜的暴露部分来减小阶梯部分。

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