公开(公告)号：US20230068722A1

公开(公告)日：2023-03-02

申请号：US17729463

申请日：2022-04-26

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  YOUNGHO PARK ,  JUNHO JO ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: B23K37/04 ,  B23K26/21 ,  B23K26/38 ,  C23C14/04 ,  C23C14/24

Abstract: A display processing mask manufacturing apparatus includes a stage, a clamp arranged outside the stage, and a chuck configured to move in a direction and arranged above the stage. The clamp includes a first clamp and a second clamp spaced apart from the first clamp in a first direction and arranged at a position opposite to a position of the first clamp with respect to the stage, and the chuck includes a first chuck and a second chuck spaced apart from the first chuck in a second direction crossing the first direction.

公开(公告)号：US20220152748A1

公开(公告)日：2022-05-19

申请号：US17392558

申请日：2021-08-03

Applicant: Samsung Display Co., Ltd.

Inventor： MINHO MOON ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: B23K31/02 ,  C03C17/32

Abstract: A mask assembly includes: a mask frame provided with a first opening defined through a center portion thereof and including an outer frame surrounding the first opening and provided with at least one concave portion defined therein; a mask body disposed to correspond to the first opening and provided with second openings defined therethrough and having an area smaller than the first opening; a first sub-mask disposed on the mask body, provided with third openings defined therethrough over an entire area thereof and having an area smaller than each of the second openings, and including a metal material; a second sub-mask disposed on the first sub-mask, provided with fourth openings defined therethrough over an entire area thereof and having an area smaller than each of the third openings in a plane, and including a polymer material; and a welding portion disposed on the second sub-mask in the concave portion.

公开(公告)号：US20210379694A1

公开(公告)日：2021-12-09

申请号：US17197701

申请日：2021-03-10

Applicant: Samsung Display Co., LTD.

Inventor： JUNHO JO ,  SEUNGWON KIM ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  SUNGSOON IM ,  YOUNGSUCK CHOI

IPC: B23K26/03 ,  B23K26/08 ,  B23K26/00 ,  B23K26/06 ,  B23K26/362 ,  B23K26/40

Abstract: A mask manufacturing equipment includes a first stage on which a mask frame is disposed, the mask frame including cell openings arranged in a first direction and a second direction intersecting the first direction, a transfer module that places cell masks on the mask frame to respectively overlap the cell openings of the mask frame and the cell masks, a camera module that photographs the cell masks, a first processing module that irradiates a first laser beam between a border portion corresponding to a portion of the mask frame adjacent to an N-th cell opening and a first edge area of an N-th cell mask disposed on the border portion, and a second processing module that irradiates a second laser beam to a boundary area between the first edge area and a second edge area extending from the first edge area.

公开(公告)号：US20240035144A1

公开(公告)日：2024-02-01

申请号：US18318832

申请日：2023-05-17

Applicant: Samsung Display Co., Ltd.

Inventor： HEEMIN PARK ,  ARONG KIM ,  YOUNGMIN MOON ,  YOUNGHO PARK ,  AREUM LEE ,  SUNGSOON IM ,  JUNHO JO

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A mask frame includes a first surface facing a mask, a second surface extending from a side of the first surface at an angle, a third surface extending from another side of the first surface at an angle to define a frame opening, and a first flow path including a first opening defined through the first surface and extending in a first direction and a second opening extending the first opening, defined through the second surface, and extending in a second direction different from the first direction.

公开(公告)号：US20220178016A1

公开(公告)日：2022-06-09

申请号：US17478083

申请日：2021-09-17

Applicant: Samsung Display Co., Ltd.

Inventor： JI-HEE SON ,  YOUNGMIN MOON ,  JAEUOON KIM ,  SEUNGYONG SONG ,  SUNGSOON IM ,  JONG-HYUN CHOUNG ,  HYUNMIN CHO

IPC: C23C16/04 ,  C23C16/06 ,  H01L51/56

Abstract: A deposition apparatus includes a chamber, a deposition source disposed in the chamber, a mask assembly, and a base substrate disposed on the mask assembly. The mask assembly includes a frame including frame openings, a mask disposed on the frame and including deposition holes, and a welding stick disposed on the mask. A welding groove is disposed along an edge of the frame and has a depth in the thickness direction of the frame. The welding stick overlaps the welding groove.

公开(公告)号：US20220165997A1

公开(公告)日：2022-05-26

申请号：US17396874

申请日：2021-08-09

Applicant: Samsung Display Co., Ltd.

Inventor： SEUL LEE ,  MINHO MOON ,  YOUNGMIN MOON ,  JI-HEE SON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: H01L51/56 ,  G03F7/00 ,  C23C14/04 ,  C23C16/04

Abstract: A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.

公开(公告)号：US20240110272A1

公开(公告)日：2024-04-04

申请号：US18340329

申请日：2023-06-23

Applicant: Samsung Display Co., Ltd.

Inventor： HEEMIN PARK ,  ARONG KIM ,  YOUNGMIN MOON ,  YOUNGHO PARK ,  AREUM LEE ,  SUNGSOON IM ,  JUNHO JO

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A mask assembly includes an open mask including first and second open openings defined therethrough and alternately arranged in a first direction, first unit masks respectively corresponding to the first open openings, and second unit masks respectively corresponding to the second open openings. Each of the first unit masks includes a first deposition portion through which first deposition openings are defined and first and second welding portions extending from the first deposition portion to the first direction and a direction opposite to the first direction, respectively. Each of the second unit masks includes a second deposition portion through which second deposition openings are defined and third and fourth welding portions extending from the second deposition portion to a second direction and a direction opposite to the second direction.

公开(公告)号：US20240035145A1

公开(公告)日：2024-02-01

申请号：US18329662

申请日：2023-06-06

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  YOUNGHO PARK ,  JUNHO JO ,  ARONG KIM ,  HEEMIN PARK ,  AREUM LEE ,  SUNGSOON IM

IPC: C23C14/04 ,  C23C16/04

CPC classification number: C23C14/042 ,  C23C16/042

Abstract: A mask assembly manufacturing apparatus includes a stage and a tensioner. A preliminary mask assembly including an open mask including a first opening and a second opening and a frame connected to the open mask disposed on the stage. The tensioner tensions a unit mask including a cell area including deposition openings and a holding area extending from the cell area, in a first direction. The cell area has a first width parallel to the first direction and a second width parallel to the second direction intersecting the first direction and greater than the first width.

公开(公告)号：US20220093864A1

公开(公告)日：2022-03-24

申请号：US17336543

申请日：2021-06-02

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  MINHO MOON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: H01L51/00 ,  H01L51/56 ,  B23K26/38

Abstract: A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.

公开(公告)号：US20210217956A1

公开(公告)日：2021-07-15

申请号：US17014841

申请日：2020-09-08

Applicant: Samsung Display Co., Ltd.

Inventor： SUNGSOON IM ,  Youngmin MOON ,  Ji-Hee SON ,  Minho MOON ,  SEUNGYONG SONG ,  DuckJung LEE ,  Seul LEE

IPC: H01L51/00 ,  C23C14/04 ,  H01L51/56

Abstract: Provided is a mask which includes a mask body having a plurality of through hole portions and including a polymer film and a plurality of magnetic particles dispersed in the polymer film, and a polymer coating layer disposed on an outer surface of the mask body. Accordingly, the time and cost of manufacturing a mask are reduced and the precision of a deposition process is improved as well, so that the manufacturing yield of a display panel using the mask is improved and a display panel manufactured using the same has improved reliability.