-
公开(公告)号：US20230009272A1
公开(公告)日：2023-01-12
申请号：US17731799
申请日：2022-04-28
Applicant: Samsung Display Co., Ltd.
Inventor： MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG
Abstract: A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
-
公开(公告)号：US20220093864A1
公开(公告)日：2022-03-24
申请号：US17336543
申请日：2021-06-02
Applicant: Samsung Display Co., Ltd.
Inventor： YOUNGMIN MOON , MINHO MOON , SEUNGYONG SONG , SUNGSOON IM
Abstract: A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.
-
公开(公告)号：US20230193449A1
公开(公告)日：2023-06-22
申请号：US17981716
申请日：2022-11-07
Applicant: Samsung Display Co., Ltd.
Inventor： JEONGKUK KIM , MINHO MOON , SEUNGYONG SONG , KYU HWAN HWANG
CPC classification number: C23C14/042 , C23C14/24 , H01L27/3246
Abstract: A mask assembly includes an open mask provided with an opening and disposed on a frame, a unit mask disposed on the open mask, the unit mask including a deposition portion and welding portion, deposition openings are defined on the deposition portion to overlap the opening in a plan view, and the welding portions each protrude from the deposition portion in a protrusion direction away from the deposition portion, welding protrusions respectively disposed on the welding portions, and at least one residual structure including a residual welding portion separated from the unit mask and a residual welding protrusion disposed on the residual welding portion. The at least one residual structure is disposed between the welding portions.
-
公开(公告)号：US20220152748A1
公开(公告)日：2022-05-19
申请号：US17392558
申请日：2021-08-03
Applicant: Samsung Display Co., Ltd.
Inventor： MINHO MOON , YOUNGMIN MOON , SEUNGYONG SONG , SUNGSOON IM
Abstract: A mask assembly includes: a mask frame provided with a first opening defined through a center portion thereof and including an outer frame surrounding the first opening and provided with at least one concave portion defined therein; a mask body disposed to correspond to the first opening and provided with second openings defined therethrough and having an area smaller than the first opening; a first sub-mask disposed on the mask body, provided with third openings defined therethrough over an entire area thereof and having an area smaller than each of the second openings, and including a metal material; a second sub-mask disposed on the first sub-mask, provided with fourth openings defined therethrough over an entire area thereof and having an area smaller than each of the third openings in a plane, and including a polymer material; and a welding portion disposed on the second sub-mask in the concave portion.
-
公开(公告)号：US20230022195A1
公开(公告)日：2023-01-26
申请号：US17748596
申请日：2022-05-19
Applicant: Samsung Display Co., Ltd.
Inventor： YOUNGMIN MOON , JEONGKUK KIM , MINHO MOON , JI-HEE SON , SEUNGYONG SONG , AREUM LEE
IPC: C23C16/04
Abstract: A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.
-
Patent Agency Ranking
公开(公告)号：US20220165997A1
公开(公告)日：2022-05-26
申请号：US17396874
申请日：2021-08-09
Applicant: Samsung Display Co., Ltd.
Inventor： SEUL LEE , MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG , SUNGSOON IM
Abstract: A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.
-
公开(公告)号：US20240368747A1
公开(公告)日：2024-11-07
申请号：US18771531
申请日：2024-07-12
Applicant: Samsung Display Co., Ltd.
Inventor： MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG
Abstract: A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
-
公开(公告)号：US20240110273A1
公开(公告)日：2024-04-04
申请号：US18536907
申请日：2023-12-12
Applicant: Samsung Display Co., Ltd.
Inventor： YOUNGMIN MOON , MINHO MOON , SEUNGYONG SONG , SUNGSOON IM
CPC classification number: C23C14/042 , B05C21/005 , H10K71/00 , H10K71/166
Abstract: A mask assembly includes a mask frame in which a first opening is defined, the mask frame including a front surface through which the first opening extends, and a deposition mask which is attached to the front surface of the mask frame and through which a plurality of second openings is defined. The mask frame includes an in which the front surface extends along a direction of gravity, the deposition mask includes an initial mask which is attached to the front surface of the mask frame in the thereof and through which the plurality of second openings is defined, and the of the mask frame having the front surface which extends along the direction of gravity disposes the first opening of the mask frame corresponding to all of the plurality of second openings of the initial mask along the direction of gravity.
-
公开(公告)号：US20220255049A1
公开(公告)日：2022-08-11
申请号：US17452279
申请日：2021-10-26
Applicant: Samsung Display Co., Ltd.
Inventor： YOUNGMIN MOON , MINHO MOON , JI-HEE SON , SEUNGYONG SONG , SUNGSOON IM , JUNHO JO
IPC: H01L51/56 , C23C14/04 , C23C14/24 , B23K26/244 , B23K26/364
Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.
-
10.发明申请公开(公告)号：US20220010421A1
公开(公告)日：2022-01-13
申请号：US17217489
申请日：2021-03-30
Applicant: Samsung Display Co., Ltd.
Inventor： YOUNGMIN MOON , MINHO MOON , SUNGSOON IM , JUNHO JO , SEUNGYONG SONG
Abstract: A mask assembly includes a mask frame through which a plurality of openings is defined and a plurality of cell masks disposed to respectively correspond to the cell openings. Each of the cell masks includes a mask main body substantially parallel to a plane defined by a first direction and a second direction crossing the first direction, where a plurality of holes is defined through the mask main body, a bonding portion disposed along an edge of the mask main body, and a tensile portion extending from the bonding portion and disposed spaced apart from the mask main body. The tensile portion includes first tensile portions spaced apart from each other in the first direction and disposed at opposite sides of the mask main body and second tensile portions spaced apart from each other in the second direction and disposed at opposite sides of the mask main body.
-
-
-
-
-
-
-
-
-
Search Results
15
records
(took 0.015 seconds)
