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公开(公告)号：US20230009272A1
公开(公告)日：2023-01-12
申请号：US17731799
申请日：2022-04-28
Applicant: Samsung Display Co., Ltd.
Inventor： MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG
Abstract: A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
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公开(公告)号：US20240368747A1
公开(公告)日：2024-11-07
申请号：US18771531
申请日：2024-07-12
Applicant: Samsung Display Co., Ltd.
Inventor： MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG
Abstract: A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
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公开(公告)号：US20220255049A1
公开(公告)日：2022-08-11
申请号：US17452279
申请日：2021-10-26
Applicant: Samsung Display Co., Ltd.
Inventor： YOUNGMIN MOON , MINHO MOON , JI-HEE SON , SEUNGYONG SONG , SUNGSOON IM , JUNHO JO
IPC: H01L51/56 , C23C14/04 , C23C14/24 , B23K26/244 , B23K26/364
Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.
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公开(公告)号：US20240138245A1
公开(公告)日：2024-04-25
申请号：US18400547
申请日：2023-12-29
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： YOUNGMIN MOON , MINHO MOON , JI-HEE SON , SEUNGYONG SONG , SUNGSOON IM , JUNHO JO
IPC: H10K71/00 , B23K26/244 , B23K26/364 , C23C14/04 , C23C14/24
CPC classification number: H10K71/00 , B23K26/244 , B23K26/364 , C23C14/042 , C23C14/24 , B23K26/0622
Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.
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Patent Agency Ranking
公开(公告)号：US20220136093A1
公开(公告)日：2022-05-05
申请号：US17383787
申请日：2021-07-23
Applicant: Samsung Display Co., Ltd.
Inventor： JI-HEE SON , MINHO MOON , YOUNGMIN MOON , SEUNGYONG SONG , SEUL LEE , SUNGSOON IM
Abstract: A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.
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公开(公告)号：US20220081753A1
公开(公告)日：2022-03-17
申请号：US17196639
申请日：2021-03-09
Applicant: Samsung Display Co., Ltd.
Inventor： JI-HEE SON , YOUNGMIN MOON , DUCKJUNG LEE , MINHO MOON , SEUNGYONG SONG , SEUL LEE , SUNGSOON IM
Abstract: An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.
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公开(公告)号：US20230022195A1
公开(公告)日：2023-01-26
申请号：US17748596
申请日：2022-05-19
Applicant: Samsung Display Co., Ltd.
Inventor： YOUNGMIN MOON , JEONGKUK KIM , MINHO MOON , JI-HEE SON , SEUNGYONG SONG , AREUM LEE
IPC: C23C16/04
Abstract: A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.
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公开(公告)号：US20220178016A1
公开(公告)日：2022-06-09
申请号：US17478083
申请日：2021-09-17
Applicant: Samsung Display Co., Ltd.
Inventor： JI-HEE SON , YOUNGMIN MOON , JAEUOON KIM , SEUNGYONG SONG , SUNGSOON IM , JONG-HYUN CHOUNG , HYUNMIN CHO
Abstract: A deposition apparatus includes a chamber, a deposition source disposed in the chamber, a mask assembly, and a base substrate disposed on the mask assembly. The mask assembly includes a frame including frame openings, a mask disposed on the frame and including deposition holes, and a welding stick disposed on the mask. A welding groove is disposed along an edge of the frame and has a depth in the thickness direction of the frame. The welding stick overlaps the welding groove.
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公开(公告)号：US20220165997A1
公开(公告)日：2022-05-26
申请号：US17396874
申请日：2021-08-09
Applicant: Samsung Display Co., Ltd.
Inventor： SEUL LEE , MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG , SUNGSOON IM
Abstract: A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.
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