公开(公告)号：US20230154941A1

公开(公告)日：2023-05-18

申请号：US17949346

申请日：2022-09-21

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  HWI KIM ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  AREUM LEE ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: H01L27/12 ,  H01L51/00

CPC classification number: H01L27/1288 ,  H01L51/0011 ,  H01L51/0014

Abstract: A mask assembly includes a frame including a frame opening, and a mask disposed on the frame. The mask includes a body portion including an upper surface and a lower surface opposing each other and deposition openings spaced apart from each other, protrusions protruding from the upper surface and surrounding the corresponding deposition openings, and at least one step formation pattern overlapping the protrusions in a plan view and disposed in the body portion.

公开(公告)号：US20230068722A1

公开(公告)日：2023-03-02

申请号：US17729463

申请日：2022-04-26

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  YOUNGHO PARK ,  JUNHO JO ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: B23K37/04 ,  B23K26/21 ,  B23K26/38 ,  C23C14/04 ,  C23C14/24

Abstract: A display processing mask manufacturing apparatus includes a stage, a clamp arranged outside the stage, and a chuck configured to move in a direction and arranged above the stage. The clamp includes a first clamp and a second clamp spaced apart from the first clamp in a first direction and arranged at a position opposite to a position of the first clamp with respect to the stage, and the chuck includes a first chuck and a second chuck spaced apart from the first chuck in a second direction crossing the first direction.

公开(公告)号：US20220152748A1

公开(公告)日：2022-05-19

申请号：US17392558

申请日：2021-08-03

Applicant: Samsung Display Co., Ltd.

Inventor： MINHO MOON ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: B23K31/02 ,  C03C17/32

Abstract: A mask assembly includes: a mask frame provided with a first opening defined through a center portion thereof and including an outer frame surrounding the first opening and provided with at least one concave portion defined therein; a mask body disposed to correspond to the first opening and provided with second openings defined therethrough and having an area smaller than the first opening; a first sub-mask disposed on the mask body, provided with third openings defined therethrough over an entire area thereof and having an area smaller than each of the second openings, and including a metal material; a second sub-mask disposed on the first sub-mask, provided with fourth openings defined therethrough over an entire area thereof and having an area smaller than each of the third openings in a plane, and including a polymer material; and a welding portion disposed on the second sub-mask in the concave portion.

公开(公告)号：US20240110272A1

公开(公告)日：2024-04-04

申请号：US18340329

申请日：2023-06-23

Applicant: Samsung Display Co., Ltd.

Inventor： HEEMIN PARK ,  ARONG KIM ,  YOUNGMIN MOON ,  YOUNGHO PARK ,  AREUM LEE ,  SUNGSOON IM ,  JUNHO JO

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A mask assembly includes an open mask including first and second open openings defined therethrough and alternately arranged in a first direction, first unit masks respectively corresponding to the first open openings, and second unit masks respectively corresponding to the second open openings. Each of the first unit masks includes a first deposition portion through which first deposition openings are defined and first and second welding portions extending from the first deposition portion to the first direction and a direction opposite to the first direction, respectively. Each of the second unit masks includes a second deposition portion through which second deposition openings are defined and third and fourth welding portions extending from the second deposition portion to a second direction and a direction opposite to the second direction.

公开(公告)号：US20240035145A1

公开(公告)日：2024-02-01

申请号：US18329662

申请日：2023-06-06

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  YOUNGHO PARK ,  JUNHO JO ,  ARONG KIM ,  HEEMIN PARK ,  AREUM LEE ,  SUNGSOON IM

IPC: C23C14/04 ,  C23C16/04

CPC classification number: C23C14/042 ,  C23C16/042

Abstract: A mask assembly manufacturing apparatus includes a stage and a tensioner. A preliminary mask assembly including an open mask including a first opening and a second opening and a frame connected to the open mask disposed on the stage. The tensioner tensions a unit mask including a cell area including deposition openings and a holding area extending from the cell area, in a first direction. The cell area has a first width parallel to the first direction and a second width parallel to the second direction intersecting the first direction and greater than the first width.

公开(公告)号：US20230009272A1

公开(公告)日：2023-01-12

申请号：US17731799

申请日：2022-04-28

Applicant: Samsung Display Co., Ltd.

Inventor： MINHO MOON ,  YOUNGMIN MOON ,  JI-HEE SON ,  SEUNGYONG SONG

IPC: C23C14/04 ,  H01L51/00

Abstract: A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.

公开(公告)号：US20220093864A1

公开(公告)日：2022-03-24

申请号：US17336543

申请日：2021-06-02

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  MINHO MOON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: H01L51/00 ,  H01L51/56 ,  B23K26/38

Abstract: A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.

公开(公告)号：US20240035144A1

公开(公告)日：2024-02-01

申请号：US18318832

申请日：2023-05-17

Applicant: Samsung Display Co., Ltd.

Inventor： HEEMIN PARK ,  ARONG KIM ,  YOUNGMIN MOON ,  YOUNGHO PARK ,  AREUM LEE ,  SUNGSOON IM ,  JUNHO JO

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A mask frame includes a first surface facing a mask, a second surface extending from a side of the first surface at an angle, a third surface extending from another side of the first surface at an angle to define a frame opening, and a first flow path including a first opening defined through the first surface and extending in a first direction and a second opening extending the first opening, defined through the second surface, and extending in a second direction different from the first direction.

公开(公告)号：US20230146922A1

公开(公告)日：2023-05-11

申请号：US17961645

申请日：2022-10-07

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  HWI KIM ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  AREUM LEE ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: C23C14/04 ,  H01L51/00

CPC classification number: C23C14/042 ,  H01L51/0011 ,  H01L51/56

Abstract: A repairing method of a mask assembly includes providing a mask assembly including a frame, an open mask including a first opening disposed on an upper surface of the frame, and a first unit mask including a plurality of first deposition openings to overlap the first opening in a plan view and disposed on an upper surface of the open mask, first cutting the open mask at an outside of the first unit mask such that a second opening having a size greater than a size of the first opening is defined, and connecting the second unit mask including a plurality of second deposition openings corresponding to the plurality of first deposition openings to the first cut open mask.

公开(公告)号：US20230022195A1

公开(公告)日：2023-01-26

申请号：US17748596

申请日：2022-05-19

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  JEONGKUK KIM ,  MINHO MOON ,  JI-HEE SON ,  SEUNGYONG SONG ,  AREUM LEE

IPC: C23C16/04

Abstract: A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.