公开(公告)号：US20230374655A1

公开(公告)日：2023-11-23

申请号：US18125178

申请日：2023-03-23

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  SEUNGYONG SONG ,  WONJE CHO ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: C23C16/04

CPC classification number: C23C16/042 ,  H10K59/12

Abstract: A mask replacement method includes providing the mask assembly including a frame including an opening, a first mask disposed on the frame, and first welding portions overlapping the first mask in a plan view, removing the first mask from the frame, and forming a second mask and second welding portions overlapping the second mask in a plan view on the frame on which the first welding portions are disposed. The first welding portions may be spaced apart from the second mask, and the first welding portions and the second welding portions may be arranged in a direction.

公开(公告)号：US20230154941A1

公开(公告)日：2023-05-18

申请号：US17949346

申请日：2022-09-21

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  HWI KIM ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  AREUM LEE ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: H01L27/12 ,  H01L51/00

CPC classification number: H01L27/1288 ,  H01L51/0011 ,  H01L51/0014

Abstract: A mask assembly includes a frame including a frame opening, and a mask disposed on the frame. The mask includes a body portion including an upper surface and a lower surface opposing each other and deposition openings spaced apart from each other, protrusions protruding from the upper surface and surrounding the corresponding deposition openings, and at least one step formation pattern overlapping the protrusions in a plan view and disposed in the body portion.

公开(公告)号：US20230265555A1

公开(公告)日：2023-08-24

申请号：US18103587

申请日：2023-01-31

Applicant: Samsung Display Co., Ltd.

Inventor： HWI KIM ,  JEONGKUK KIM ,  SEUNGYONG SONG ,  AREUM LEE ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: C23C16/04

CPC classification number: C23C16/042

Abstract: A manufacturing method of a mask assembly includes tensioning a mask sheet, connecting the tensioned mask sheet with a mask frame, and defining opening processing areas in the tensioned mask sheet to form openings respectively corresponding to the opening processing areas. The defining of the opening processing areas includes defining initial opening processing areas in the tensioned mask sheet in a first direction and in a second direction crossing the first direction to determine a processing sequence of the initial opening processing areas, calculating cumulative deformation amounts accumulated in each of the initial opening processing areas based on the processing sequence, and correcting a size and a position of each of the initial opening processing areas based on the cumulative deformation amounts.

公开(公告)号：US20230146922A1

公开(公告)日：2023-05-11

申请号：US17961645

申请日：2022-10-07

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  HWI KIM ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  AREUM LEE ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: C23C14/04 ,  H01L51/00

CPC classification number: C23C14/042 ,  H01L51/0011 ,  H01L51/56

Abstract: A repairing method of a mask assembly includes providing a mask assembly including a frame, an open mask including a first opening disposed on an upper surface of the frame, and a first unit mask including a plurality of first deposition openings to overlap the first opening in a plan view and disposed on an upper surface of the open mask, first cutting the open mask at an outside of the first unit mask such that a second opening having a size greater than a size of the first opening is defined, and connecting the second unit mask including a plurality of second deposition openings corresponding to the plurality of first deposition openings to the first cut open mask.