公开(公告)号：US20220165997A1

公开(公告)日：2022-05-26

申请号：US17396874

申请日：2021-08-09

Applicant: Samsung Display Co., Ltd.

Inventor： SEUL LEE ,  MINHO MOON ,  YOUNGMIN MOON ,  JI-HEE SON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: H01L51/56 ,  G03F7/00 ,  C23C14/04 ,  C23C16/04

Abstract: A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.

公开(公告)号：US20220136093A1

公开(公告)日：2022-05-05

申请号：US17383787

申请日：2021-07-23

Applicant: Samsung Display Co., Ltd.

Inventor： JI-HEE SON ,  MINHO MOON ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  SEUL LEE ,  SUNGSOON IM

IPC: C23C14/04 ,  C23C16/56 ,  C23C16/40 ,  C23C16/34 ,  G03F7/16 ,  G03F7/00

Abstract: A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.

公开(公告)号：US20220081753A1

公开(公告)日：2022-03-17

申请号：US17196639

申请日：2021-03-09

Applicant: Samsung Display Co., Ltd.

Inventor： JI-HEE SON ,  YOUNGMIN MOON ,  DUCKJUNG LEE ,  MINHO MOON ,  SEUNGYONG SONG ,  SEUL LEE ,  SUNGSOON IM

IPC: C23C14/04 ,  H01L51/56 ,  C23C14/34

Abstract: An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.