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公开(公告)号:US20210379694A1
公开(公告)日:2021-12-09
申请号:US17197701
申请日:2021-03-10
Applicant: Samsung Display Co., LTD.
Inventor: JUNHO JO , SEUNGWON KIM , YOUNGHO PARK , SEUNGYONG SONG , YOUNGCHUL LEE , SUNGSOON IM , YOUNGSUCK CHOI
Abstract: A mask manufacturing equipment includes a first stage on which a mask frame is disposed, the mask frame including cell openings arranged in a first direction and a second direction intersecting the first direction, a transfer module that places cell masks on the mask frame to respectively overlap the cell openings of the mask frame and the cell masks, a camera module that photographs the cell masks, a first processing module that irradiates a first laser beam between a border portion corresponding to a portion of the mask frame adjacent to an N-th cell opening and a first edge area of an N-th cell mask disposed on the border portion, and a second processing module that irradiates a second laser beam to a boundary area between the first edge area and a second edge area extending from the first edge area.