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    ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD
    2.
    发明申请
    ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD 审中-公开
    有机层沉积装置，使用其的有机发光显示装置的制造方法以及由该方法制造的有机发光显示装置

    公开(公告)号：US20140014921A1

    公开(公告)日：2014-01-16

    申请号：US13794743

    申请日：2013-03-11

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Young-Mook Choi

    IPC: H01L51/56 ,  H01L51/52

    CPC classification number: H01L51/56 ,  C23C14/24 ,  C23C14/243 ,  C23C14/50 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L51/52

    Abstract: An organic layer deposition apparatus includes: a conveyer unit including a transfer unit for attaching a substrate, a first conveyer unit, and a second conveyer unit; and a deposition unit including a vacuum chamber and an organic layer deposition assembly for depositing an organic layer on the substrate. The organic layer deposition assembly includes: a deposition source for discharging a deposition material; a deposition source nozzle unit including a plurality of deposition source nozzles; a patterning slit sheet including a plurality of patterning slits that are arranged in a first direction; and a deposition source shutter that moves in the first direction, and selectively blocks the deposition material that is vaporized in the deposition source. The transfer unit moves between the first and second conveyer units. The transfer unit keeps the attached substrate spaced apart from the organic layer deposition assembly while being transferred by the first conveyer unit.

    Abstract translation: 有机层沉积设备包括：输送单元，包括用于附接基板的转印单元，第一输送单元和第二输送单元; 以及包括真空室和用于在基板上沉积有机层的有机层沉积组件的沉积单元。 有机层沉积组件包括：用于排出沉积材料的沉积源; 包括多个沉积源喷嘴的沉积源喷嘴单元; 图案化缝隙片，其包括沿第一方向布置的多个图案化缝隙; 以及沿第一方向移动并且选择性地阻挡在沉积源中蒸发的沉积材料的沉积源快门。 转印单元在第一和第二输送单元之间移动。 传送单元在被第一传送单元传送的同时保持连接的基板与有机层沉积组件间隔开。

    THIN FILM DEPOSITION APPARATUS
    3.
    发明申请
    THIN FILM DEPOSITION APPARATUS 有权
    薄膜沉积装置

    公开(公告)号：US20150176131A1

    公开(公告)日：2015-06-25

    申请号：US14642360

    申请日：2015-03-09

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Jong-Won Hong ,  Seok-Rak Chang ,  Chang-Mog JO ,  Young-Mook Choi ,  Jae-Kwang Ryu

    IPC: C23C16/52 ,  C23C16/04

    CPC classification number: C23C16/52 ,  C23C14/042 ,  C23C14/243 ,  C23C14/54 ,  C23C14/568 ,  C23C16/042 ,  H01L51/5253 ,  H01L51/56

    Abstract: A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.

    Abstract translation: 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离， 薄膜沉积设备和基板相对于彼此移动。

    Thin film deposition apparatus
    5.
    发明授权
    Thin film deposition apparatus 有权

    公开(公告)号：US09624580B2

    公开(公告)日：2017-04-18

    申请号：US14203212

    申请日：2014-03-10

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Young-Mook Choi ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Hyun-Sook Park

    IPC: C23C16/52 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H01L51/00 ,  H01L51/56

    CPC classification number: C23C16/52 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L51/0011 ,  H01L51/56

    Abstract: A method for forming a thin film on a substrate includes discharging a deposition material from a deposition source through a plurality of deposition source nozzles arranged in a first direction on a deposition source nozzle unit disposed at a side of the deposition source; passing the deposition material through a patterning slit sheet; and depositing the deposition material on the substrate, while moving the substrate and the patterning slit sheet relative to each other. The patterning slit sheet is spaced apart from the substrate by a distance. A blocking member is disposed between the substrate and the deposition source and is moved along with the substrate to be positioned to screen at least one portion of the substrate, and the patterning slit sheet is disposed opposite to and spaced apart from the deposition source nozzle unit, and includes a plurality of patterning slits arranged in the first direction.

    DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY USING DEPOSITION APPARATUS
    9.
    发明申请
    DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY USING DEPOSITION APPARATUS 有权
    沉积装置，使用其制造有机发光显示装置的方法和使用沉积装置制造的有机发光显示装置

    公开(公告)号：US20140312316A1

    公开(公告)日：2014-10-23

    申请号：US14012924

    申请日：2013-08-28

    Applicant: Samsung Display Co., Ltd.

    Inventor： Young-Mook Choi ,  Jong-Won Hong

    IPC: H01L27/32 ,  H01L21/66

    CPC classification number: C23C14/56 ,  C23C14/042 ,  C23C14/50 ,  H01L21/67259 ,  H01L21/67309 ,  H01L21/67709 ,  H01L51/0001 ,  H01L51/56

    Abstract: A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.

    Abstract translation: 一种沉积装置，包括：转印单元，包括第一转印单元和第二转印单元，其中第一转印单元沿第一方向转移基板可拆卸地固定到其上的移动单元，并且第二转印单元转移到 第一方向相反的方向，从基板分离的移动单元和包括沉积组件的沉积单元，其中沉积组件将材料沉积在与沉积组件间隔开的衬底上，同时第一转移单元转移衬底 其固定到所述移动单元，其中所述第一传送单元包括支撑所述移动单元的所述第一方向的两端的第一支撑单元和支撑所述移动单元的与所述移动单元的靠近的一侧相对的一侧的第二支撑单元 沉积组件。

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