Piezoelectric sensor and robot hand

    公开(公告)号:US12078565B2

    公开(公告)日:2024-09-03

    申请号:US17852451

    申请日:2022-06-29

    发明人: Takayuki Yonemura

    IPC分类号: G01L5/167 B25J13/08 B25J19/02

    摘要: A piezoelectric sensor includes an elastic body having a first surface, a regulatory section which is disposed at a position where the regulatory section faces the first surface of the elastic body, and which is configured to limit a deformation of the elastic body, and a first piezoelectric element which is partially fixed to the regulatory section, and which deforms in accordance with the deformation of the elastic body, wherein the first piezoelectric element outputs a voltage signal which increases and decreases from a reference voltage in accordance with a direction of the deformation.

    Liquid detecting apparatus and liquid container

    公开(公告)号:US10386222B2

    公开(公告)日:2019-08-20

    申请号:US15801662

    申请日:2017-11-02

    IPC分类号: G01F23/296 B41J2/175

    摘要: A liquid detecting apparatus includes an ultrasonic sensor that transmits and receives an ultrasonic wave, and includes a piezoelectric layer which is formed of a thin film and an ultrasonic element which is provided with a first electrode and a second electrode to interpose the piezoelectric layer between the first electrode and the second electrode, on a diaphragm which is disposed on a substrate having a cavity, and a flow path that forms the same liquid level as a liquid level of a liquid which is stored in a container, in which an acoustic matching layer and a detection surface of a surface of a lens, which are disposed on a side of the ultrasonic sensor that transmits and receives the ultrasonic wave, are disposed to be in contact with the liquid within the flow path.

    Piezoelectric device, liquid ejection head, and printer

    公开(公告)号:US11171280B2

    公开(公告)日:2021-11-09

    申请号:US16553876

    申请日:2019-08-28

    摘要: A piezoelectric device includes: a first electrode provided above a substrate; a piezoelectric layer provided above the first electrode; and a second electrode provided above the piezoelectric layer. The piezoelectric layer includes a plurality of layers that includes a composite oxide of a Perovskite structure containing potassium, sodium, and niobium. The piezoelectric layer has a first region and a second region in a 3 μm×3 μm region of a plane perpendicular to a thickness direction of the piezoelectric layer. The first region is a region in which the ratio of an atomic concentration (atm %) of potassium with respect to the sum of the atomic concentration (atm %) of potassium and an atomic concentration (atm %) of sodium is 0.30 to 0.45, and the second region is a region in which the ratio is 0.55 to 0.75.