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33 条记录 (耗时 0.021 秒)

    PIEZOELECTRIC DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS
    4.
    发明申请
    PIEZOELECTRIC DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS 有权

    公开(公告)号：US20210162761A1

    公开(公告)日：2021-06-03

    申请号：US17104117

    申请日：2020-11-25

    申请人： Seiko Epson Corporation

    发明人： Toshihiro SHIMIZU ,  Koji SUMI

    IPC分类号： B41J2/14 ,  H01L41/09

    摘要： A piezoelectric device including a flow path forming substrate in which pressure chambers are formed, a diaphragm, and piezoelectric actuators. Active portions, each having a piezoelectric layer interposed between a first electrode and a second electrode, are each, in plan view, provided from an edge portion opposing the pressure chamber to a portion outside the pressure chamber, and a ratio of a film thickness of the piezoelectric layer to a film thickness of the diaphragm is 4.7 or less.

    LIQUID DISCHARGE HEAD AND PRINTER
    5.
    发明申请
    LIQUID DISCHARGE HEAD AND PRINTER 审中-公开

    公开(公告)号：US20200331268A1

    公开(公告)日：2020-10-22

    申请号：US16851198

    申请日：2020-04-17

    申请人： Seiko Epson Corporation

    发明人： Motoki TAKABE ,  Yasuhiro ITAYAMA ,  Koji SUMI

    IPC分类号： B41J2/14

    摘要： Provided is a liquid discharge head that includes a nozzle plate provided with a nozzle hole that discharges a liquid, a silicon substrate provided with a pressure generating chamber that communicates with the nozzle hole, a vibration plate provided on the silicon substrate, and a piezoelectric element that is provided on the vibration plate and changes a volume of the pressure generating chamber. The piezoelectric element includes a piezoelectric layer including a composite oxide of a perovskite structure containing lead, zirconium, and titanium. A difference between a peak position derived from a (100) surface of the piezoelectric layer and a peak position derived from a (220) surface of the silicon substrate in an X-ray diffraction of the piezoelectric layer is less than 25.00°.

    VIBRATING PLATE STRUCTURE AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
    7.
    发明申请
    VIBRATING PLATE STRUCTURE AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE 审中-公开

    公开(公告)号：US20170179368A1

    公开(公告)日：2017-06-22

    申请号：US15358261

    申请日：2016-11-22

    申请人： Seiko Epson Corporation

    发明人： Koji SUMI ,  Eiji OSAWA

    IPC分类号： H01L41/09 ,  H01L41/187 ,  H01L41/047

    CPC分类号： H01L41/081 ,  B06B1/0622 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  H01L41/0973

    摘要： A vibrating plate is provided between a substrate and a piezoelectric element formed of electrodes and a piezoelectric layer and includes a first layer which is formed of a silicon oxide and a second layer which is formed of a ceramic having a Young's modulus larger than that of the silicon oxide. Under the condition in which the following expression (1) has a constant value, where in the expression (1), Ev1, dv1, Ev2, and dv2 represent Young's modulus of the first layer, the thickness thereof, Young's modulus of the second layer, and the thickness thereof, Ev1×dv12+Ev2×dv22  (1) when the combination of dv1 and dv2 which sets the value of the following expression (2) in a range of from the minimum value to +2% thereof is represented by (Dv1, Dv2), Ev1×dv13+Ev2×dv23  (2) the thickness of the first layer and the thickness of the second layer are represented by Dv1 and Dv2.