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公开(公告)号：US20210129535A1
公开(公告)日：2021-05-06
申请号：US16472783
申请日：2017-12-05
Inventor： Daisuke YAMADA , Motoki TAKABE , Yasuyiikl MATSUMOTO , Yoichi NAGANUMA , Eiju HIRAI
Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.
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公开(公告)号：US20240165951A1
公开(公告)日：2024-05-23
申请号：US18512270
申请日：2023-11-17
Applicant: SEIKO EPSON CORPORATION
Inventor： Motoki TAKABE , Eiju HIRAI , Masaki MORI
IPC: B41J2/14
CPC classification number: B41J2/14233
Abstract: A liquid ejecting head includes: a piezoelectric element that includes a first drive electrode, a piezoelectric body, and a second drive electrode in a lamination direction; a vibration plate that is provided on one side of the lamination direction with respect to the piezoelectric element and is deformed by driving of the piezoelectric element; a pressure chamber substrate that is provided on the one side of the lamination direction with respect to the vibration plate and is provided with a plurality of pressure chambers; an interlayer that is laminated on at least one of the piezoelectric body, the vibration plate, or the pressure chamber substrate and of which capacitance changes according to humidity; a first detection electrode that is in contact with the interlayer; and a second detection electrode that is in contact with the interlayer and is disposed to be separated from the first detection electrode.
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公开(公告)号：US20230166506A1
公开(公告)日：2023-06-01
申请号：US18059878
申请日：2022-11-29
Applicant: SEIKO EPSON CORPORATION
Inventor： Yu SHIOZAWA , Masaki MORI , Motoki TAKABE , Hitoshi TAKAAI , Eiju HIRAI
CPC classification number: B41J2/14233 , B41J2/04581 , B41J2002/14362 , B41J2002/14459 , B41J2002/14491
Abstract: A liquid discharge head includes an individual electrode that is individually provided for the plurality of pressure chambers, a common electrode that is commonly provided for the plurality of pressure chambers, a piezoelectric body that is provided between the individual electrode and the common electrode for applying pressure to liquid in the pressure chambers, a drive wiring that is electrically coupled to the individual electrode and the common electrode, and applies a voltage for driving the piezoelectric body, a detection resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring for detecting temperature of the liquid in the pressure chambers, and a first layer that is provided on a surface opposite to a surface facing the pressure chamber substrate in the detection resistor, and has a lower thermal conductivity than the detection resistor.
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公开(公告)号：US20230166498A1
公开(公告)日：2023-06-01
申请号：US18059885
申请日：2022-11-29
Applicant: SEIKO EPSON CORPORATION
Inventor： Masaki MORI , Yu SHIOZAWA , Hitoshi TAKAAI , Motoki TAKABE , Eiju HIRAI
IPC: B41J2/045
CPC classification number: B41J2/04563 , B41J2/04581
Abstract: A liquid discharge head includes a pressure chamber substrate that is provided with a plurality of pressure chambers, a piezoelectric body that is driven to apply pressure to liquid in the pressure chambers, an upper electrode that is provided above the piezoelectric body for applying a voltage to the piezoelectric body, a lower electrode that is provided below the piezoelectric body for applying a voltage to the piezoelectric body, a detection resistor that is provided below the piezoelectric body for detecting temperature of the liquid in the pressure chambers, and a first wiring portion that is electrically coupled to the detection resistor. The first wiring portion includes a first part that is extended above the piezoelectric body, and a second part that is provided in at least a part of a through hole penetrating the piezoelectric body and electrically coupled to the detection resistor.
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公开(公告)号：US20210362498A1
公开(公告)日：2021-11-25
申请号：US17328104
申请日：2021-05-24
Applicant: Seiko Epson Corporation
Inventor： Shotaro TAMAI , Yoichi NAGANUMA , Yuma FUKUZAWA , Hitoshi TAKAAI , Eiju HIRAI
Abstract: A liquid ejecting head includes: a pressure chamber; a piezoelectric element that generates energy for applying pressure to an ink in the pressure chamber; a nozzle channel that extends in the X-axis direction and communicates with a nozzle for ejecting the ink; a supply communication channel which enables the pressure chamber and the nozzle channel to communicate with each other; a discharge communication channel which communicates with the nozzle channel; a wiring substrate electrically coupled to a drive circuit that drives the piezoelectric element; and a wiring section that electrically couples the wiring substrate and the piezoelectric element, in which, as viewed in the Z-axis direction orthogonal to the X-axis direction, the wiring section is provided at a position at which the wiring section overlaps the nozzle channel, and the wiring section extends in the ±Q direction, which differs from the X-axis direction.
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Patent Agency Ranking
公开(公告)号：US20210023844A1
公开(公告)日：2021-01-28
申请号：US16934684
申请日：2020-07-21
Applicant: SEIKO EPSON CORPORATION
Inventor： Hiroaki OKUI , Eiju HIRAI , Toru KASHIMURA , Yuki WATANABE
Abstract: A length of a path between the input section and the third energy generation element in the wiring section is shorter than a length of a path between the input section and the first energy generation element in the wiring section and shorter than a length of a path between the input section and the second energy generation element in the wiring section.
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公开(公告)号：US20190389218A1
公开(公告)日：2019-12-26
申请号：US16449584
申请日：2019-06-24
Applicant: Seiko Epson Corporation
Inventor： Satoshi TAKEMOTO , Eiju HIRAI , Masao NAKAYAMA , Naoto YOKOYAMA , Osamu TONOMURA
IPC: B41J2/14
Abstract: A liquid ejecting head includes a vibration plate constituting a part of a wall surface of a pressure chamber accommodating a liquid; a piezoelectric element vibrating the vibration plate; and a reinforcing film disposed on a surface of the vibration plate on a pressure chamber side, in which a vibration region, which is a region of the vibration plate and is vibrated by the piezoelectric element, has an elongated shape in a plan view viewed in a thickness direction of the vibration plate, and the vibration region includes a first region in which the reinforcing film is not disposed and a second region which is located at a position closer to a center of the vibration region in a longitudinal direction than the first region, and in which the reinforcing film is disposed.
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公开(公告)号：US20190381796A1
公开(公告)日：2019-12-19
申请号：US16442831
申请日：2019-06-17
Applicant: Seiko Epson Corporation
Inventor： Eiju HIRAI , Daisuke YAMADA , Shingo TOMIMATSU
IPC: B41J2/14
Abstract: There is provided a liquid discharge head including a first wiring through which a drive signal is input to a wiring substrate, in which the wiring substrate has a substrate having a first surface and a second surface that opposes the first surface, a second wiring formed on the first surface, a third wiring formed on the second surface, a fourth wiring and a fifth wiring that pass through the substrate and electrically couples the second wiring with the third wiring, and an electrode provided on the second wiring and electrically couples the second wiring with the first wiring, and the electrode is positioned between a first coupling point at which the fourth wiring is electrically coupled to the second wiring and a second coupling point at which the fifth wiring is electrically coupled to the second wiring, in the second wiring.
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公开(公告)号：US20190291432A1
公开(公告)日：2019-09-26
申请号：US16357405
申请日：2019-03-19
Applicant: Seiko Epson Corporation
Inventor： Naoto YOKOYAMA , Eiju HIRAI , Masao NAKAYAMA
Abstract: A piezoelectric device includes a vibration plate, and a first piezoelectric element and a second piezoelectric element that vibrate the vibration plate. The first piezoelectric element and the second piezoelectric element include a piezoelectric layer extending between the first piezoelectric element and the second piezoelectric element. In a region between the first piezoelectric element and the second piezoelectric element in the piezoelectric layer, a first opening portion and a second opening portion are formed in a second direction intersecting a first direction in which the first piezoelectric element and the second piezoelectric element are disposed so as to interpose a vibration suppressing portion, which is a portion of the piezoelectric layer.
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公开(公告)号：US20190143690A1
公开(公告)日：2019-05-16
申请号：US16188768
申请日：2018-11-13
Applicant: SEIKO EPSON CORPORATION
Inventor： Masashi FUJIOKA , Eiju HIRAI , Isao YANAGISAWA , Ikuya MIYAZAWA
Abstract: In an MEMS device, in a Z direction that is a direction in which a first core portion, a plurality of first bump wiring, and a plurality of first individual wiring are laminated, a width between the first core portion and a wiring substrate is wider than a maximum particle diameter of solid particles contained in an adhesive, and a width between a first wiring and a second wiring and a width between a third wiring and a fourth wiring are wider than the maximum particle diameter of the solid particles.
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