-
公开(公告)号:US20150145378A1
公开(公告)日:2015-05-28
申请号:US14209544
申请日:2014-03-13
发明人: Je Hong KYOUNG
IPC分类号: H01L41/053 , H03H9/13 , H01L41/29
CPC分类号: H03H3/04 , H03H9/02023 , H03H9/19 , H03H2003/0428 , Y10T29/42
摘要: Embodiments of the invention provide a quartz vibrator and a method for manufacturing the same. The quartz vibrator includes a quartz substrate vibrating depending on an electrical signal, first and second electrodes formed on both surfaces of the quartz substrate, and a first protective layer including an opening corresponding to a trimming region of the first electrode and formed on the first electrode.
摘要翻译: 本发明的实施例提供一种石英振动器及其制造方法。 石英振子包括根据电信号振动的石英基板,形成在石英基板的两个表面上的第一和第二电极,以及包括与第一电极的修整区域对应的开口并形成在第一电极上的第一保护层 。
-
公开(公告)号:US20160054352A1
公开(公告)日:2016-02-25
申请号:US14590994
申请日:2015-01-07
发明人: Pil Joong KANG , Je Hong KYOUNG , Masayoshi ESASHI , Jung Won LEE
CPC分类号: G01P15/123 , G01C19/5719 , G01L9/0045 , G01L9/0055 , G01L19/0092 , G01P15/18 , G01P2015/0842 , G01R33/0047 , G01R33/0052 , G01R33/0206 , G01R33/12
摘要: There are provided a multi-axis sensor and a method for manufacturing the same. The multi-axis sensor includes: a first sensor mounted on a board and detecting inertial force; and a second sensor mounted on the board and detecting a position and a motion, wherein the first sensor and the board have a seal formed therebetween so as to prevent permeation from the outside and are electrically connected to each other.
摘要翻译: 提供了一种多轴传感器及其制造方法。 多轴传感器包括:安装在板上并检测惯性力的第一传感器; 以及安装在所述板上并检测位置和运动的第二传感器,其中所述第一传感器和所述板具有形成在其间的密封,从而防止从外部渗出并彼此电连接。
-
公开(公告)号:US20190058451A1
公开(公告)日:2019-02-21
申请号:US16039952
申请日:2018-07-19
发明人: Tae Kyung LEE , Ran Hee SHIN , Je Hong KYOUNG , Hwa Sun LEE , Jin Suk SON , Sung Sun KIM
IPC分类号: H03H9/02
CPC分类号: H03H9/131 , H03H9/02015 , H03H9/173 , H03H9/175
摘要: A bulk acoustic wave resonator includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer at least partially disposed on the lower electrode; and an upper electrode disposed on the piezoelectric layer, wherein either one or both of the lower electrode and the upper electrode includes a layer of aluminum alloy including scandium (Sc).
-
公开(公告)号:US20180351534A1
公开(公告)日:2018-12-06
申请号:US15875541
申请日:2018-01-19
发明人: Tae Kyung LEE , Jin Suk SON , Je Hong KYOUNG , Ran Hee SHIN , Sung Sun KIM
摘要: An acoustic resonator includes a membrane layer disposed on an insulating layer; a cavity formed by the insulating layer and the membrane layer and having a hydrophobic layer disposed on at least one of a portion of an upper surface of the cavity and a portion of a lower surface of the cavity; and a resonating portion disposed on the cavity and having a second electrode on a piezoelectric layer on a first electrode.
-
公开(公告)号:US20180123554A1
公开(公告)日:2018-05-03
申请号:US15704225
申请日:2017-09-14
发明人: Je Hong KYOUNG , Jin Suk SON , Hwa Sun LEE , Sang Hyun YI
CPC分类号: H03H9/02047 , H03H3/02 , H03H9/02015 , H03H9/02086 , H03H9/02118 , H03H9/02157 , H03H9/173 , H03H2003/021 , H03H2003/0435 , H03H2003/0442
摘要: A bulk acoustic wave resonator includes a substrate protective layer disposed on a top surface of a substrate, a cavity defined by a membrane layer and the substrate, and a resonating part disposed on the membrane layer. The membrane layer includes a first layer and a second layer, the second layer having the same material as the first layer and having a density greater than that of the first layer.
-
公开(公告)号:US20170070208A1
公开(公告)日:2017-03-09
申请号:US15179248
申请日:2016-06-10
发明人: Jae Sang LEE , Ho Phil JUNG , Sung Wook KIM , Tae Joon PARK , In Young KANG , Dong Joon OH , Je Hong KYOUNG , Kyo Yeol LEE , Jong Pil LEE , Seung Mo LIM
CPC分类号: H03H9/19 , H03H3/02 , H03H9/02023 , H03H9/02157 , H03H2003/022
摘要: A piezoelectric oscillator, and method of making the same, includes an oscillation substrate comprising an oscillating part and a surrounding part, wherein a the surrounding part is thinner than the oscillating part, and oscillating electrodes disposed on an upper surface and a lower surface of the oscillating part. The oscillation substrate is configured according to H=400.59×X+1.75±1.5, wherein H=100×(T2/T1) and S=T2/(L1−L2), wherein L1 represents an entire length of the oscillation substrate, L2 represents a length of the oscillating part, T1 represents a thickness of the oscillating part, and T2 represents a step height between the oscillating part and the surrounding part.
摘要翻译: 压电振荡器及其制造方法包括振荡基板,其包括振荡部和周围部,其中周围部比振荡部更薄,振荡电极设置在振荡部的上表面和下表面 摆动部分。 振荡基板根据H = 400.59×X + 1.75±1.5配置,其中H = 100×(T2 / T1)和S = T2 /(L1-L2),其中L1表示振荡基板的整个长度,L2 表示振荡部的长度,T1表示振动部的厚度,T2表示振动部与周围部之间的台阶高度。
-
公开(公告)号:US20230318562A1
公开(公告)日:2023-10-05
申请号:US18319603
申请日:2023-05-18
发明人: Tae Kyung LEE , Je Hong KYOUNG , Sung Sun KIM , Jin Suk SON , Ran Hee SHIN , Hwa Sun LEE
CPC分类号: H03H9/02102 , H03H9/176 , H03H9/174 , H03H9/02031
摘要: A bulk-acoustic wave resonator comprises a substrate, a resonant portion comprising a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on the substrate, and further comprising a center portion and an extension portion that is disposed along a periphery of the center portion, and an insertion layer that is disposed in the extension portion between the first electrode and the piezoelectric layer, and the insertion layer is formed of an aluminum alloy containing scandium (Sc).
-
公开(公告)号:US20200252046A1
公开(公告)日:2020-08-06
申请号:US16418107
申请日:2019-05-21
发明人: Ran Hee SHIN , Tae Kyung LEE , Sung Jun LEE , Hwa Sun LEE , Je Hong KYOUNG , Sung Sun KIM , Jin Suk SON
摘要: A bulk acoustic wave resonator includes a substrate, a seed layer disposed on the substrate, a first electrode disposed on the seed layer and including an aluminum alloy layer containing scandium (Sc), a piezoelectric layer disposed on the first electrode and including a layer having a cation (Al) polarity, and a second electrode disposed on the piezoelectric layer.
-
公开(公告)号:US20200036359A1
公开(公告)日:2020-01-30
申请号:US16356333
申请日:2019-03-18
发明人: Ran Hee SHIN , Tae Kyung LEE , Je Hong KYOUNG , Jin Suk SON , Hwa Sun LEE , Sung Sun KIM
IPC分类号: H03H9/13 , H01L41/047 , H01L41/187 , H03H9/02 , H01L41/316 , H03H3/02 , H03H9/17 , C22C21/00
摘要: A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer, of which at least a portion is disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a passivation layer disposed to cover the first electrode and the second electrode. Either one or both of the first electrode and the second electrode includes an aluminum alloy layer. Either one or both of the piezoelectric layer and the passivation layer has aluminum nitride, or aluminum nitride added with a doping material, having a ratio of an out-of-plane lattice constant “c” to an in-plane lattice constant “a” (c/a) of less than 1.58.
-
公开(公告)号:US20150229291A1
公开(公告)日:2015-08-13
申请号:US14616232
申请日:2015-02-06
发明人: Seung Mo LIM , Ho Phil JUNG , In Young KANG , Je Hong KYOUNG , Sung Wook KIM , Jong Pil LEE
IPC分类号: H03H9/19
CPC分类号: H03H9/19
摘要: Embodiments of the invention provide a quartz crystal vibrator including an AT-cut quartz crystal piece having a long side in an X axis direction and including first and second crystal planes formed on at least one side surface thereof in a Y′ axis direction, and an electrode layer formed on the AT-cut quartz crystal piece.
摘要翻译: 本发明的实施例提供一种石英振子,其包括在X轴方向上具有长边的AT切割石英晶体片,并且包括在Y轴方向的至少一个侧表面上形成的第一和第二晶面,以及 形成在AT切割石英晶片上的电极层。
-
-
-
-
-
-
-
-
-