公开(公告)号：US08889517B2

公开(公告)日：2014-11-18

申请号：US14045595

申请日：2013-10-03

Applicant: Richard A. Bradley, Jr. ,  Georg J. Ockenfuss

Inventor： Richard A. Bradley, Jr. ,  Georg J. Ockenfuss

IPC: H01L33/46 ,  H01L33/60 ,  H01L33/64

CPC classification number: H01L33/60 ,  H01L33/46 ,  H01L33/641

Abstract: A broadband, omnidirectional, multi-layer, dielectric reflector for an LED in a white light emitting device provides both near 100% reflectivity across the visible spectrum of light, and electrical insulation between the substrate and the electrical circuitry used to power and control the LED. When a sealant material, having a higher index of refraction than air, is used to protect the LED and the accompanying electrical circuitry, an aluminum reflector layer or substrate is provided to make up for the loss of reflectivity at certain angles of incidence. The dielectric reflector includes two separate sections with two different thicknesses, a thinner section below the LED providing better heat conductivity, and a thicker section surrounding the LED providing better reflectivity.

Abstract translation: 用于白光发射装置中的LED的宽带全向多层介质反射器在可见光光谱上提供接近100％的反射率，并且在基板和用于为LED控制LED的电路之间的电绝缘 。 当使用具有比空气更高的折射率的密封剂材料来保护LED和伴随的电路时，提供铝反射器层或衬底以补偿在某些入射角下的反射率的损失。 电介质反射器包括具有两个不同厚度的两个分开的部分，在LED下方更薄的部分提供更好的导热性，并且围绕LED的较厚部分提供更好的反射率。

公开(公告)号：US20140034986A1

公开(公告)日：2014-02-06

申请号：US14045595

申请日：2013-10-03

Applicant: Richard A. Bradley, JR. ,  Georg J. Ockenfuss

Inventor： Richard A. Bradley, JR. ,  Georg J. Ockenfuss

IPC: H01L33/60

CPC classification number: H01L33/60 ,  H01L33/46 ,  H01L33/641

Abstract: A broadband, omnidirectional, multi-layer, dielectric reflector for an LED in a white light emitting device provides both near 100% reflectivity across the visible spectrum of light, and electrical insulation between the substrate and the electrical circuitry used to power and control the LED. When a sealant material, having a higher index of refraction than air, is used to protect the LED and the accompanying electrical circuitry, an aluminum reflector layer or substrate is provided to make up for the loss of reflectivity at certain angles of incidence. The dielectric reflector includes two separate sections with two different thicknesses, a thinner section below the LED providing better heat conductivity, and a thicker section surrounding the LED providing better reflectivity.

Abstract translation: 用于白光发射装置中的LED的宽带全向多层介质反射器在可见光光谱上提供接近100％的反射率，并且在基板和用于为LED控制LED的电路之间的电绝缘 。 当使用具有比空气更高的折射率的密封剂材料来保护LED和伴随的电路时，提供铝反射器层或衬底以弥补在某些入射角下的反射率的损失。 电介质反射器包括具有两个不同厚度的两个分开的部分，在LED下方更薄的部分提供更好的导热性，并且围绕LED的较厚部分提供更好的反射率。

公开(公告)号：US08500973B2

公开(公告)日：2013-08-06

申请号：US12402322

申请日：2009-03-11

Applicant: Georg J. Ockenfuss ,  Richard I. Seddon

Inventor： Georg J. Ockenfuss ,  Richard I. Seddon

IPC: C23C14/00 ,  C25B11/00 ,  C25B13/00

CPC classification number: H01J37/3405 ,  H01J37/3438

Abstract: A sputtering anode is disclosed wherein the anode is in the form of a container or vessel; and, wherein the conducting surface communicating with a cathode is the inside surface of the container or vessel. The anode can be mounted outside of a coating chamber having its opening communicating with the chamber or alternatively may be mounted within the chamber. The anode may be an inlet port for receiving inert gas for use in forming the plasma and for pressurizing the anode.

Abstract translation: 公开了一种溅射阳极，其中阳极是容器或容器的形式; 并且其中与阴极连通的导电表面是容器或容器的内表面。 阳极可以安装在其开口与腔室连通的涂覆室的外部，或者可以安装在腔室内。 阳极可以是用于接收用于形成等离子体和用于对阳极加压的惰性气体的入口。

公开(公告)号：US07879209B2

公开(公告)日：2011-02-01

申请号：US11177465

申请日：2005-07-08

Applicant: Markus K. Tilsch ,  Georg J. Ockenfuss ,  Richard I. Seddon ,  Robert E. Hahn

Inventor： Markus K. Tilsch ,  Georg J. Ockenfuss ,  Richard I. Seddon ,  Robert E. Hahn

IPC: C23C14/42

CPC classification number: H01J37/34 ,  H01J37/32541 ,  H01J37/3438

Abstract: A magnetron sputtering cathode for use in a vacuum deposition process is disclosed wherein the cathode is coated on its sides with an electrically insulating material such as alumina to prevent arcing, and wherein the first end surface of the cathode supports a material to be sputtered. The bottom of the cathode may also be coated with an electrically insulating coating or may be resting upon an insulating platform.

Abstract translation: 公开了一种用于真空沉积工艺中的磁控溅射阴极，其中阴极通过电绝缘材料如氧化铝在其侧面上涂覆以防止电弧，并且其中阴极的第一端面支撑待溅射的材料。 阴极的底部也可以涂覆有电绝缘涂层，或者可以搁置在绝缘平台上。

公开(公告)号：US08480865B2

公开(公告)日：2013-07-09

申请号：US13087301

申请日：2011-04-14

Applicant: Georg J. Ockenfuss

Inventor： Georg J. Ockenfuss

IPC: C23C14/34

CPC classification number: H01J37/3405 ,  C23C14/0036 ,  C23C14/3407 ,  C23C14/35 ,  C23C14/505 ,  H01J37/3417 ,  H01J37/3423 ,  H01J37/3438 ,  H01J37/347 ,  H01L21/68764 ,  H01L21/68771

Abstract: The present invention relates to a magnetron sputtering device including a large ring cathode having a defined inner radius. The position of the ring cathode is offset in relation to a center point of a planetary drive system. An anode or reactive gas source may be located within the inner radius of the ring cathode. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.

Abstract translation: 本发明涉及一种磁控管溅射装置，其包括具有确定的内半径的大环形阴极。 环形阴极的位置相对于行星驱动系统的中心点偏移。 阳极或反应气体源可以位于环形阴极的内半径内。 通过阴极处的较低的功率密度获得较低的缺陷率，其抑制电弧，同时径流通过阴极至行星几何形状而被最小化，而不使用掩模。

公开(公告)号：US20080223716A1

公开(公告)日：2008-09-18

申请号：US12045473

申请日：2008-03-10

Applicant: Georg J. Ockenfuss ,  Markus K. Tilsch

Inventor： Georg J. Ockenfuss ,  Markus K. Tilsch

IPC: C23C14/54 ,  C23C14/34

CPC classification number: C23C14/34 ,  C23C14/3492 ,  C23C14/52 ,  C23C14/54 ,  H01J37/32935 ,  H01J37/34

Abstract: A method and control system are provided for depositing a layer in a sputter-deposition system having a target cathode. A first dependence relationship of a deposition rate of the layer on an operating parameter, selected from cathode voltage, cathode current, and cathode power, is provided prior to deposition of the layer. A second dependence relationship of the operating parameter on time is measured during deposition of the layer, while a different operating parameter, also selected from cathode voltage, cathode current, and cathode power, is held substantially constant. On the basis of the first and second dependence relationships, a deposition time for the layer is dynamically determined during deposition of the layer.

Abstract translation: 提供了一种用于在具有目标阴极的溅射沉积系统中沉积层的方法和控制系统。 在层的沉积之前提供了层的沉积速率与从阴极电压，阴极电流和阴极功率中选择的工作参数的第一依赖关系。 在层的沉积期间测量操作参数随时间的第二依赖关系，而从阴极电压，阴极电流和阴极功率中选择的不同操作参数保持基本恒定。 基于第一和第二依赖关系，在层的沉积期间动态地确定该层的沉积时间。

公开(公告)号：US08658001B2

公开(公告)日：2014-02-25

申请号：US12045473

申请日：2008-03-10

Applicant: Georg J. Ockenfuss ,  Markus K. Tilsch

Inventor： Georg J. Ockenfuss ,  Markus K. Tilsch

IPC: C23C14/34

CPC classification number: C23C14/34 ,  C23C14/3492 ,  C23C14/52 ,  C23C14/54 ,  H01J37/32935 ,  H01J37/34

Abstract: A method and control system are provided for depositing a layer in a sputter-deposition system having a target cathode. A first dependence relationship of a deposition rate of the layer on an operating parameter, selected from cathode voltage, cathode current, and cathode power, is provided prior to deposition of the layer. A second dependence relationship of the operating parameter on time is measured during deposition of the layer, while a different operating parameter, also selected from cathode voltage, cathode current, and cathode power, is held substantially constant. On the basis of the first and second dependence relationships, a deposition time for the layer is dynamically determined during deposition of the layer.

Abstract translation: 提供了一种用于在具有目标阴极的溅射沉积系统中沉积层的方法和控制系统。 在层的沉积之前提供了层的沉积速率与从阴极电压，阴极电流和阴极功率中选择的工作参数的第一依赖关系。 在层的沉积期间测量操作参数随时间的第二依赖关系，而从阴极电压，阴极电流和阴极功率中选择的不同操作参数保持基本恒定。 基于第一和第二依赖关系，在层的沉积期间动态地确定该层的沉积时间。

公开(公告)号：US20120012459A1

公开(公告)日：2012-01-19

申请号：US13244145

申请日：2011-09-23

Applicant: Georg J. Ockenfuss

Inventor： Georg J. Ockenfuss

IPC: C23C14/35

CPC classification number: H01J37/3488 ,  C23C14/0063 ,  C23C14/35 ,  H01J37/3244 ,  H01J37/3405 ,  H01J37/3423 ,  H01J2237/006

Abstract: The invention relates to an integrated anode and activated reactive gas source for use in a magnetron sputtering device and a magnetron sputtering device incorporating the same. The integrated anode and activated reactive gas source comprises a vessel having an interior conductive surface, comprising the anode, and an insulated outer body isolated from the chamber walls of the coating chamber. The vessel has a single opening with a circumference smaller that that of the vessel in communication with the coating chamber. Sputtering gas and reactive gas are coupled through an input into the vessel and through the single opening into the coating chamber. A plasma is ignited by the high density of electrons coming from the cathode and returning to the power supply through the anode. A relatively low anode voltage is sufficient to maintain a plasma of activated reactive gas to form stoichiometric dielectric coatings.

Abstract translation: 本发明涉及一种用于磁控溅射装置的集成阳极和活化反应气体源，以及包含该阳极和活化气体的磁控溅射装置。 集成的阳极和活化的反应性气体源包括具有内部导电表面的容器，包括阳极和与涂覆室的室壁隔离的绝缘的外部主体。 容器具有单个开口，其周长小于与涂覆室连通的容器的周长。 溅射气体和反应性气体通过输入端连接到容器中并通过单个开口连接到涂覆室中。 等离子体被来自阴极的高密度电子点燃并通过阳极返回到电源。 相对较低的阳极电压足以维持活化的反应气体的等离子体形成化学计量的电介质涂层。

公开(公告)号：US20140168761A1

公开(公告)日：2014-06-19

申请号：US13720728

申请日：2012-12-19

Applicant: Georg J. Ockenfuss

Inventor： Georg J. Ockenfuss

IPC: G02B5/22

CPC classification number: G02B5/208 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/26 ,  G02B1/14 ,  G02B5/201 ,  G02B5/283 ,  H01L27/14625

Abstract: A sensor device including one or more sensor elements and one or more optical filters is provided. The one or more optical filters each include a plurality of dielectric layers and a plurality of metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

Abstract translation: 提供了包括一个或多个传感器元件和一个或多个光学滤光器的传感器装置。 一个或多个光学滤光器各自包括多个电介质层和交替堆叠的多个金属层。 金属层被电介质层固有地保护。 特别地，金属层具有由一个或多个电介质层保护性地覆盖的锥形边缘。

公开(公告)号：US07429111B2

公开(公告)日：2008-09-30

申请号：US11288568

申请日：2005-11-29

Applicant: Georg J. Ockenfuss

Inventor： Georg J. Ockenfuss

IPC: G03B21/14 ,  G03B21/28 ,  G02B1/10 ,  G02B5/30 ,  G02B27/14 ,  H01S3/00 ,  G09G5/00 ,  F21V7/04 ,  G02F1/1335 ,  G02F1/00 ,  C09K19/02

CPC classification number: G03B21/2073 ,  G03B21/206 ,  G03B33/08 ,  H04N9/3114 ,  H04N9/3117 ,  H04N9/315

Abstract: The invention provides a two-panel color management system for projection display applications, wherein color sequencing is accomplished using achromatic beam switching and static color separation. In a preferred embodiment, a liquid-crystal polarization switch alternates a polarization of an input light beam between two orthogonal states. A polarization beam splitter directs the beam comprising three primary color components alternately along a first and second paths, wherein first and second different secondary color filters are disposed for forming first and second secondary colored beams, each having two different primary color components. A dichroic color separator alternately receives the first and second secondary colored beams, separates their primary color components and directs them to first and second imager panels. A beam combiner combines the first polarized primary color beam from the first imager and the second polarized primary color beam from the second imager to form a projection beam.

Abstract translation: 本发明提供了一种用于投影显示应用的双面板颜色管理系统，其中使用消色差光束切换和静态分色来完成色彩排序。 在优选实施例中，液晶偏振开关在两个正交状态之间交替输入光束的偏振。 偏振分束器沿着第一和第二路径交替地引导包括三个原色分量的光束，其中设置第一和第二不同次级滤色器以形成第一和第二次级着色光束，每个具有两个不同的原色分量。 二向色分离器交替地接收第一和第二二次着色光束，分离其原色成分并将其引导到第一和第二成像面板。 光束组合器将来自第一成像器的第一偏振原色光束和来自第二成像器的第二极化原色光束组合以形成投影光束。