公开(公告)号：US07358579B2

公开(公告)日：2008-04-15

申请号：US10185283

申请日：2002-06-28

申请人： Qing Ma ,  Tsung-Kuan Allen Chou ,  Valluri Rao

发明人： Qing Ma ,  Tsung-Kuan Allen Chou ,  Valluri Rao

IPC分类号： H01L21/00 ,  H01L29/82

CPC分类号： H01H59/0009 ,  B81B3/007 ,  B81B2201/014 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81B2203/0353 ,  B81B2203/04 ,  B81C2201/056 ,  H01H1/20 ,  H01H2001/0084 ,  H01H2059/0036 ,  H01H2059/0063

摘要： A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation voltage that is needed and compensates for the relative stiffness of the cantilevered beam in closing the switch. In opening the switch, the stiffness of the cantilevered beam may advantageously enable quicker operation which may be desirable in higher frequency situations.

摘要翻译： 微机电系统开关可以包括在其自由端上耦合到更顺从或柔性延伸部的相对刚性的悬臂梁。 触点可以位于悬臂梁的自由端。 该延伸部分减小了所需的致动电压，并补偿了关闭开关时悬臂梁的相对刚度。 在打开开关时，悬臂梁的刚度可以有利地实现更快的操作，这在更高的频率情况下是可取的。

公开(公告)号：US20120196384A1

公开(公告)日：2012-08-02

申请号：US13444045

申请日：2012-04-11

申请人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

发明人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

IPC分类号： G01N33/53

CPC分类号： G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N27/126 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  G01N29/348 ,  G01N33/0031 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  Y10T436/11 ,  Y10T436/143333 ,  Y10T436/144444 ,  Y10T436/25375

摘要： Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator's frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator's frequency response.

摘要翻译： 使用包含具有功能化表面以与靶生物分子反应的共振器的生物传感器来检测样品中存在生物分子的系统和方法。 在一个实施例中，器件包括压电谐振器，其具有被配置为与靶分子反应的官能化表面，从而改变谐振器的质量和/或电荷，从而改变谐振器的频率响应。 将曝光后的谐振器频率响应与参考值进行比较，例如在暴露于采样之前的频率响应，存储的基准频率响应或控制谐振器的频率响应。

公开(公告)号：US07914740B2

公开(公告)日：2011-03-29

申请号：US11317405

申请日：2005-12-22

申请人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

发明人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

IPC分类号： G01N33/50

CPC分类号： G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N27/126 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  G01N29/348 ,  G01N33/0031 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  Y10T436/11 ,  Y10T436/143333 ,  Y10T436/144444 ,  Y10T436/25375

摘要： Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator's frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator's frequency response.

公开(公告)号：US07867786B2

公开(公告)日：2011-01-11

申请号：US11958826

申请日：2007-12-18

申请人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

发明人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

IPC分类号： H01L21/00 ,  H01L21/02

CPC分类号： G11B9/02 ,  C30B23/02 ,  C30B25/02 ,  C30B29/32 ,  H01L21/28291

摘要： The present invention describes a method including: providing a substrate; forming an underlying layer over the substrate; heating the substrate; forming a ferroelectric layer over the underlying layer, the ferroelectric layer having a thickness below a critical thickness, the underlying layer having a smaller lattice constant than the ferroelectric layer; cooling the substrate to room temperature; and inducing a compressive strain in the ferroelectric layer.

摘要翻译： 本发明描述了一种方法，包括：提供衬底; 在衬底上形成下层; 加热基板; 在所述下层上形成铁电层，所述铁电层的厚度低于临界厚度，所述下层具有比所述铁电层更小的晶格常数; 将基板冷却至室温; 并在铁电层中产生压应变。

公开(公告)号：US20090323506A1

公开(公告)日：2009-12-31

申请号：US12215992

申请日：2008-06-30

申请人： Robert Chen ,  Qing Ma ,  Valluri Rao

发明人： Robert Chen ,  Qing Ma ,  Valluri Rao

IPC分类号： G11B9/00 ,  G11B3/70

CPC分类号： G11B9/02 ,  G11B9/065

摘要： A data storage medium includes a piezoelectric film (101) having a surface (111) including a halogen. In one embodiment, the halogen exists in an atomic concentration of at least approximately 10 percent. The result is a hydrophobic surface conducive to long-lasting scanning probe tips, low contamination, and stable surface charge. A data storage device incorporating the data storage medium includes an enclosure (205) containing the data storage medium and an adjacent scanning probe (230) wherein the enclosure has a relative humidity of at least approximately 40 percent and at least a portion of the scanning probe is coated with a layer of water.

摘要翻译： 数据存储介质包括具有包括卤素的表面（111）的压电膜（101）。 在一个实施方案中，卤素以至少约10％的原子浓度存在。 其结果是疏水性表面有利于长时间的扫描探针尖端，低污染和稳定的表面电荷。 结合数据存储介质的数据存储设备包括容纳数据存储介质的外壳（205）和相邻的扫描探针（230），其中外壳具有至少大约40％的相对湿度和扫描探针的至少一部分 涂有一层水。

公开(公告)号：US07559242B2

公开(公告)日：2009-07-14

申请号：US11097059

申请日：2005-03-31

申请人： Li-Peng Wang ,  Qing Ma ,  Valluri Rao ,  Goutam Paul

发明人： Li-Peng Wang ,  Qing Ma ,  Valluri Rao ,  Goutam Paul

IPC分类号： G01D21/00

CPC分类号： G01H1/00

摘要： An apparatus comprising a substrate and an array of vibration sensors formed on the substrate, the array comprising two or more vibration sensors, wherein each vibration sensor in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. A process comprising forming an array of vibration sensors on a substrate, the array comprising two or more vibration sensors, wherein each of the two or more vibration sensors in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. Other embodiments are disclosed and claimed.

摘要翻译： 一种包括衬底和形成在衬底上的振动传感器阵列的装置，该阵列包括两个或更多个振动传感器，其中阵列中的每个振动传感器具有与任何其它振动传感器不同的本底噪声和不同的工作频率范围 在阵列中。 一种方法，包括在衬底上形成振动传感器阵列，所述阵列包括两个或更多个振动传感器，其中所述阵列中的所述两个或更多个振动传感器中的每一个具有不同于其他噪声的基底和不同的工作频率范围 阵列中的振动传感器。 公开和要求保护其他实施例。

公开(公告)号：US20070000305A1

公开(公告)日：2007-01-04

申请号：US11174059

申请日：2005-06-30

申请人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

发明人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

IPC分类号： G01N29/02

CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N33/54373 ,  G01N2291/021 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  G01N2291/106

摘要： An FBAR device may be chemically functionalized by depositing an interactive layer so that targeted chemicals are preferentially adsorbed. Such miniaturized chemical sensors may be combined with wireless network technology. For example, a chemical sensor may be integrated in a cell phone, PDA, a watch, or a car with wireless connection and GPS. Since such devices are widely populated, a national sensor network may be established. Consequently, a national toxicity map can be generated in real time. Detailed chemical information may be obtained, such as if a chemical is released by a source fixed on ground or by a moving object, or if is spread by explosives or by wind and so on.

摘要翻译： FBAR器件可以通过沉积交互层进行化学功能化，从而优先吸附目标化学物质。 这种小型化学传感器可以与无线网络技术组合。 例如，化学传感器可以集成在具有无线连接和GPS的手机，PDA，手表或汽车中。 由于这样的设备被广泛地填充，所以可以建立国家传感器网络。 因此，可以实时生成国家毒性图。 可以获得详细的化学信息，例如化学品被固定在地面上的源或被移动的物体释放，或者如果被爆炸物或风等传播。

公开(公告)号：US06975184B2

公开(公告)日：2005-12-13

申请号：US10448915

申请日：2003-05-30

申请人： Li-Peng Wang ,  Michael Dibattista ,  Seth Fortuna ,  Qing Ma ,  Valluri Rao

发明人： Li-Peng Wang ,  Michael Dibattista ,  Seth Fortuna ,  Qing Ma ,  Valluri Rao

IPC分类号： H03H3/04 ,  H03H9/17 ,  H03H9/00

CPC分类号： H03H3/04 ,  H03H2003/0428 ,  H03H2003/0435

摘要： A material may be removed from the top electrode of a film bulk acoustic resonator to alter the mass loading effect and to adjust the frequency of one film bulk acoustic resonator on a wafer relative to other resonators on the same wafer. Similarly, the piezoelectric layer or the bottom electrode may be selectively milled with a focused ion beam to trim the resonator.

摘要翻译： 可以从膜体声波谐振器的顶部电极去除材料以改变质量负载效应并且调整晶片上相对于同一晶片上的其它谐振器的一个膜体声波谐振器的频率。 类似地，可以用聚焦离子束选择性地研磨压电层或底部电极以修整谐振器。

公开(公告)号：US20050248420A1

公开(公告)日：2005-11-10

申请号：US10841402

申请日：2004-05-07

申请人： Qing Ma ,  Li-Peng Wang ,  Dong Shim ,  Valluri Rao

发明人： Qing Ma ,  Li-Peng Wang ,  Dong Shim ,  Valluri Rao

IPC分类号： H01L41/08 ,  H03H3/04 ,  H03H9/205 ,  H03H9/58

CPC分类号： H03H3/04 ,  H03H2003/0471 ,  H03H2003/0478

摘要： Plural band film bulk acoustic resonators may be formed on the same integrated circuit using lithographic techniques. As a result, high volume production of reproducible components can be achieved, wherein the resonators, as manufactured, are designed to have different frequencies.

摘要翻译： 可以使用平版印刷技术在相同的集成电路上形成多个带状薄膜体声共振器。 结果，可以实现大量生产可重复组件，其中制造的谐振器被设计成具有不同的频率。

公开(公告)号：US06940367B2

公开(公告)日：2005-09-06

申请号：US10939286

申请日：2004-09-10

申请人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

发明人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

IPC分类号： H03H3/02 ,  H03H9/17 ,  H03H9/00

CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H2003/023 ,  Y10T29/42

摘要： A film bulk acoustic resonator may be formed with a piezoelectric film having improved quality. The piezoelectric film may be deposited directly onto a single crystal silicon substrate. That substrate may be removed and selectively replaced with a lower electrode to form the film bulk acoustic resonator.

摘要翻译： 膜体声波谐振器可以形成为具有改进质量的压电膜。 压电膜可以直接沉积在单晶硅衬底上。 可以去除该衬底并且用下电极选择性地替换以形成膜体声波谐振器。