-
1.
公开(公告)号:US09553013B2
公开(公告)日:2017-01-24
申请号:US14633024
申请日:2015-02-26
Applicant: QUALCOMM Incorporated
Inventor: Michael A. Stuber , George Imthurn
IPC: H01L21/30 , H01L21/762 , H01L21/84 , H01L21/02 , H01L21/20 , H01L21/768 , H01L21/302 , H01L23/48 , H01L29/78 , H01L27/12 , B81C1/00
CPC classification number: H01L21/76251 , B81C1/00238 , B81C1/00698 , H01L21/02164 , H01L21/02167 , H01L21/02178 , H01L21/2007 , H01L21/302 , H01L21/76224 , H01L21/76256 , H01L21/76898 , H01L21/84 , H01L23/481 , H01L27/1203 , H01L29/7803 , H01L2224/80001 , H01L2224/9202 , H01L2924/1461 , H01L2924/00
Abstract: A method is disclosed. The method comprises fabricating a device layer on a top portion of a semiconductor wafer that comprises a substrate. The device layer comprises an active device. The method also comprises forming a trap rich layer at a top portion of a handle wafer. The forming comprises etching the top portion of the handle wafer to form a structure in the top portion of the handle wafer that configures the trap rich layer. The method also comprises bonding a top surface of the handle wafer to a top surface of the semiconductor wafer. The method also comprises removing a bottom substrate portion of the semiconductor wafer.
Abstract translation: 公开了一种方法。 该方法包括在包括衬底的半导体晶片的顶部上制造器件层。 器件层包括有源器件。 该方法还包括在处理晶片的顶部形成富含阱的层。 成形包括蚀刻处理晶片的顶部部分,以在构造陷阱富集层的手柄晶片的顶部部分中形成结构。 该方法还包括将手柄晶片的顶表面接合到半导体晶片的顶表面。 该方法还包括去除半导体晶片的底部衬底部分。
-
公开(公告)号:US10418465B1
公开(公告)日:2019-09-17
申请号:US15969986
申请日:2018-05-03
Applicant: QUALCOMM Incorporated
Inventor: Qingqing Liang , Francesco Carobolante , Sinan Goktepeli , George Imthurn , Fabio Alessio Marino , Narasimhulu Kanike
IPC: H01L29/792 , H01L29/66 , H01L29/788 , H01L27/11556 , G11C16/34 , G11C16/04 , H01L27/105 , H01L27/11 , H01L29/78
Abstract: Certain aspects of the present disclosure provide a memory device. One example memory device generally includes a first semiconductor region having a first region, a second region, and a third region, the second region being between the first region and the third region and having a different doping type than the first region and the third region. In certain aspects, the memory device also includes a first non-insulative region, a first insulative region being disposed between the first non-insulative region and the first semiconductor region. In certain aspects, the memory device may include a second non-insulative region, and a second insulative region disposed between the second region and the second non-insulative region, wherein the first insulative region and the second insulative region are disposed adjacent to opposite sides of the second region.
-