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公开(公告)号：US20240357221A1
公开(公告)日：2024-10-24
申请号：US18758063
申请日：2024-06-28
申请人： Orbotech Ltd.
发明人： Yigal Katzir , Ilia Lutsker , Elie Meimoun
IPC分类号： H04N23/56 , G01N21/00 , G01N21/17 , G01N21/88 , G01N21/956 , G02B5/00 , G02B27/30 , H04N23/55 , H04N23/90
CPC分类号： H04N23/56 , G01N21/00 , G02B5/001 , G02B27/30 , H04N23/55 , H04N23/90 , G01N2021/177 , G01N21/8806 , G01N2021/95638
摘要： An image acquisition device including a first plurality of cameras arranged in a mutually spaced configuration, each having a field of view, each field of view lying in a plane and a second plurality of photon emitters arranged in a multiplicity of generally circumferential arrangements about each camera of the first plurality of cameras, at least one photon emitter within the generally circumferential arrangement directing light to a field of view of one of the first plurality of cameras that is not the closest field of view thereto.
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公开(公告)号：US20220155574A1
公开(公告)日：2022-05-19
申请号：US17441279
申请日：2020-07-09
申请人： Orbotech Ltd.
发明人： David Fisch , Avraham Adler , Ilia Lutsker , Yigal Katzir , Avinoam Rosenberg
摘要： Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.
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公开(公告)号：US20190266693A1
公开(公告)日：2019-08-29
申请号：US16282766
申请日：2019-02-22
申请人： Orbotech Ltd.
发明人： Shai WISEMAN , Yigal Katzir , Ofir Shnit , Ilia Lutsker , Chay Goldenberg
摘要： A range differentiator useful for auto-focusing, the range differentiator including an image generator providing an image of a scene at various physical depths, a depth differentiator distinguishing portions of the image at depths below a predetermined threshold, irrespective of a shape of the portions, and providing a depth differentiated image and a focus distance ascertainer ascertaining a focus distance based on the depth differentiated image.
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4.发明授权公开(公告)号：US09232114B2
公开(公告)日：2016-01-05
申请号：US13966672
申请日：2013-08-14
申请人： Orbotech Ltd.
发明人： Yigal Katzir , Itay Gur-Arie , Yacov Malinovich
IPC分类号： H04N3/14 , G01N21/88 , G01N21/89 , G01N21/956 , H01L27/146 , H04N5/374
CPC分类号： H04N3/155 , G01N21/8851 , G01N21/8901 , G01N21/956 , H01L27/14645 , H04N5/3743 , H04N5/37455
摘要： An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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公开(公告)号：US20240241358A1
公开(公告)日：2024-07-18
申请号：US18622193
申请日：2024-03-29
申请人： Orbotech Ltd.
发明人： David Fisch , Avraham Adler , Ilia Lutsker , Yigal Katzir , Avinoam Rosenberg
CPC分类号： G02B19/0066 , G02B3/08 , G02B21/361 , G02B26/0833 , G02F1/29
摘要： Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.
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公开(公告)号：US11977211B2
公开(公告)日：2024-05-07
申请号：US17441279
申请日：2020-07-09
申请人： Orbotech Ltd.
发明人： David Fisch , Avraham Adler , Ilia Lutsker , Yigal Katzir , Avinoam Rosenberg
CPC分类号： G02B19/0066 , G02B3/08 , G02B21/361 , G02B26/0833 , G02F1/29
摘要： Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.
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公开(公告)号：US20220070343A1
公开(公告)日：2022-03-03
申请号：US17420136
申请日：2020-01-09
申请人： Orbotech Ltd.
发明人： Yigal Katzir , Ilia Lutsker , Elie Meimoun
摘要： An image acquisition device including a first plurality of cameras arranged in a mutually spaced configuration, each having a field of view, each field of view lying in a plane and a second plurality of photon emitters arranged in a multiplicity of generally circumferential arrangements about each camera of the first plurality of cameras, at least one photon emitter within the generally circumferential arrangement directing light to a field of view of one of the first plurality of cameras that is not the closest field of view thereto.
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公开(公告)号：US11974046B2
公开(公告)日：2024-04-30
申请号：US17274046
申请日：2019-08-27
申请人： ORBOTECH LTD.
发明人： Yigal Katzir , Ilia Lutsker , Elie Meimoun
IPC分类号： G01N21/956 , H04N5/265 , H04N23/74
CPC分类号： H04N23/74 , G01N21/956 , H04N5/265 , G01N2021/95638
摘要： An inspection system including an illumination subsystem and an image sensing subsystem, the illumination subsystem providing a plurality of illumination modalities, the system simultaneously illuminating at least two areas of an object with different ones of the plurality of illumination modalities, images of which are acquired by a single sensor forming part of the image sensing subsystem.
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公开(公告)号：US11159712B2
公开(公告)日：2021-10-26
申请号：US16282766
申请日：2019-02-22
申请人： Orbotech Ltd.
发明人： Shai Wiseman , Yigal Katzir , Ofir Shnit , Ilia Lutsker , Chay Goldenberg
摘要： A range differentiator useful for auto-focusing, the range differentiator including an image generator providing an image of a scene at various physical depths, a depth differentiator distinguishing portions of the image at depths below a predetermined threshold, irrespective of a shape of the portions, and providing a depth differentiated image and a focus distance ascertainer ascertaining a focus distance based on the depth differentiated image.
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