SYSTEM AND METHOD FOR THREE-DIMENSIONAL IMAGING OF SAMPLES USING A MACHINE LEARNING ALGORITHM

    公开(公告)号:US20240378716A1

    公开(公告)日:2024-11-14

    申请号:US18195098

    申请日:2023-05-09

    Applicant: Orbotech Ltd.

    Inventor: Chay Goldenberg

    Abstract: A method for 3D imaging of samples using a machine learning algorithm is disclosed. The method uses multimodality focal stacks, which consist of a plurality of images acquired at two or more distances between the sample and a front focal plane, with at least one image acquired using the first modality and additional images acquired using additional modalities. The modalities may have different illumination angles and optionally different spectral distributions. The method may include receiving training images of samples, which include a plurality of training focal stacks, and ground truth 3D data (depth maps) for each training focal stack, and training a machine learning algorithm based on the training images and the ground truth data. The method subsequently receives product images of a sample, the product images including a focal stack from an optical assembly, and generates a 3D depth map.

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