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公开(公告)号:US20210193703A1
公开(公告)日:2021-06-24
申请号:US16721320
申请日:2019-12-19
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Vincent Venezia , Young Woo Jung , Geunsook Park , Lindsay Alexander Grant
IPC: H01L27/146
Abstract: Backside illuminated sensor pixel structure. In one embodiment, and image sensor includes a plurality of pixels arranged in rows and columns of a pixel array that are disposed in a semiconductor substrate. Individual photodiodes of the pixel array are configured to receive an incoming light through a backside of the semiconductor substrate. A front side of the semiconductor substrate is opposite from the backside. A plurality of transistors disposed proximate to the front side of the semiconductor substrate, are arranged in a row along an outer perimeter of the photodiodes of the respective pixel; and a plurality of isolation structures arranged to bracket the row of transistors along the outer perimeter of the photodiodes. A plurality of contacts electrically contacting the plurality of isolation structures, and the contacts are configured to voltage-bias the plurality of isolation structures.
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公开(公告)号:US20220116516A1
公开(公告)日:2022-04-14
申请号:US17558199
申请日:2021-12-21
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Yuanmei Zheng , Qin Wang , Cunyu Yang , Guannan Chen , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
Abstract: An image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array of color filters is disposed in the spacer pattern.
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公开(公告)号:US10204951B2
公开(公告)日:2019-02-12
申请号:US15882925
申请日:2018-01-29
Applicant: OmniVision Technologies, Inc.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Dyson Hsin-Chih Tai , Lindsay Alexander Grant
IPC: H01L27/146 , H04N9/04 , H04N5/378
Abstract: A multi-color HDR image sensor includes at least a first combination color pixel with a first color filter and an adjacent second combination color pixel with a second color filter which is different from the first color filter, wherein each combination color pixel includes at least two sub-pixels having at least two adjacent photodiodes. Within each combination color pixel, there is a dielectric deep trench isolation (d-DTI) structure to isolate the two adjacent photodiodes of the two adjacent sub-pixels with same color filters in order to prevent the electrical cross talk. Between two adjacent combination color pixels with different color filters, there is a hybrid deep trench isolation (h-DTI) structure to isolate two adjacent photodiodes of two adjacent sub-pixels with different color filters in order to prevent both optical and electrical cross talk. Each combination color pixel is enclosed on all sides by the hybrid deep trench isolation (h-DTI) structure.
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公开(公告)号:US20180286897A1
公开(公告)日:2018-10-04
申请号:US15882925
申请日:2018-01-29
Applicant: OmniVision Technologies, Inc.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Dyson Hsin-Chih Tai , Lindsay Alexander Grant
IPC: H01L27/146 , H04N5/378 , H04N9/04
CPC classification number: H01L27/1463 , H01L27/14612 , H01L27/14621 , H01L27/14627 , H01L27/14645 , H01L27/14683 , H04N5/378 , H04N9/045
Abstract: A multi-color HDR image sensor includes at least a first combination color pixel with a first color filter and an adjacent second combination color pixel with a second color filter which is different from the first color filter, wherein each combination color pixel includes at least two sub-pixels having at least two adjacent photodiodes. Within each combination color pixel, there is a dielectric deep trench isolation (d-DTI) structure to isolate the two adjacent photodiodes of the two adjacent sub-pixels with same color filters in order to prevent the electrical cross talk. Between two adjacent combination color pixels with different color filters, there is a hybrid deep trench isolation (h-DTI) structure to isolate two adjacent photodiodes of two adjacent sub-pixels with different color filters in order to prevent both optical and electrical cross talk. Each combination color pixel is enclosed on all sides by the hybrid deep trench isolation (h-DTI) structure.
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公开(公告)号:US20180249105A1
公开(公告)日:2018-08-30
申请号:US15443783
申请日:2017-02-27
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Qin Wang , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
CPC classification number: H04N5/3696 , H04N5/23212 , H04N5/3742 , H04N5/378 , H04N9/045
Abstract: An image sensor includes an array of split dual photodiode (DPD) pairs. First groupings of the array of split DPD pairs consist entirely of either first-dimension split DPD pairs or entirely of second-dimension split DPD pairs. Each first grouping of the array of split DPD pairs consisting of the first-dimension split DPD pairs is adjacent to an other first grouping of the array of split DPD pairs consisting of the second-dimension split DPD pairs. The first-dimension is orthogonal to the second-dimension. A plurality of floating diffusion (FD) regions is arranged in each first grouping of the split DPD pairs. Each one of a plurality of transfer transistors is coupled to a respective photodiode of a respective split DPD pair, and is coupled between the respective photodiode and a respective one of the plurality of FD regions.
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公开(公告)号:US11750906B2
公开(公告)日:2023-09-05
申请号:US17558199
申请日:2021-12-21
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Yuanwei Zheng , Qin Wang , Cunyu Yang , Guannan Chen , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
Abstract: An image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array of color filters is disposed in the spacer pattern.
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公开(公告)号:US11502120B2
公开(公告)日:2022-11-15
申请号:US16721320
申请日:2019-12-19
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Vincent Venezia , Young Woo Jung , Geunsook Park , Lindsay Alexander Grant
IPC: H01L27/146
Abstract: Backside illuminated sensor pixel structure. In one embodiment, and image sensor includes a plurality of pixels arranged in rows and columns of a pixel array that are disposed in a semiconductor substrate. Individual photodiodes of the pixel array are configured to receive an incoming light through a backside of the semiconductor substrate. A front side of the semiconductor substrate is opposite from the backside. A plurality of transistors disposed proximate to the front side of the semiconductor substrate, are arranged in a row along an outer perimeter of the photodiodes of the respective pixel; and a plurality of isolation structures arranged to bracket the row of transistors along the outer perimeter of the photodiodes. A plurality of contacts electrically contacting the plurality of isolation structures, and the contacts are configured to voltage-bias the plurality of isolation structures.
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公开(公告)号:US11245823B2
公开(公告)日:2022-02-08
申请号:US16539931
申请日:2019-08-13
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Yuanwei Zheng , Qin Wang , Cunyu Yang , Guannan Chen , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
IPC: H04N5/225 , G02B7/00 , G02B5/20 , G02B3/00 , H01L27/146
Abstract: An image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array of color filters is disposed in the spacer pattern.
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公开(公告)号:US20210051250A1
公开(公告)日:2021-02-18
申请号:US16539931
申请日:2019-08-13
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Yuanwei Zheng , Qin Wang , Cunyu Yang , Guannan Chen , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
Abstract: An image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array of color filters is disposed in the spacer pattern.
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公开(公告)号:US10116889B2
公开(公告)日:2018-10-30
申请号:US15443783
申请日:2017-02-27
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Qin Wang , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
Abstract: An image sensor includes an array of split dual photodiode (DPD) pairs. First groupings of the array of split DPD pairs consist entirely of either first-dimension split DPD pairs or entirely of second-dimension split DPD pairs. Each first grouping of the array of split DPD pairs consisting of the first-dimension split DPD pairs is adjacent to an other first grouping of the array of split DPD pairs consisting of the second-dimension split DPD pairs. The first-dimension is orthogonal to the second-dimension. A plurality of floating diffusion (FD) regions is arranged in each first grouping of the split DPD pairs. Each one of a plurality of transfer transistors is coupled to a respective photodiode of a respective split DPD pair, and is coupled between the respective photodiode and a respective one of the plurality of FD regions.
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