公开(公告)号：US10607810B2

公开(公告)日：2020-03-31

申请号：US16237775

申请日：2019-01-02

Applicant: NuFlare Technology, Inc.

Inventor： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Kiyoshi Nakaso ,  Keita Ideno ,  Shintaro Yamamoto ,  Keisuke Goto ,  Hitoshi Matsushita ,  Hirokazu Yoshioka ,  Ryouta Inoue ,  Yuuki Fukuda

IPC: H01J37/244 ,  H01J37/317 ,  H01J37/06

Abstract: The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.

公开(公告)号：US11049688B2

公开(公告)日：2021-06-29

申请号：US16586254

申请日：2019-09-27

Applicant: NuFlare Technology, Inc.

Inventor： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Keita Ideno ,  Kota Iwasaki ,  Keisuke Goto ,  Kiyoshi Nakaso ,  Shintaro Yamamoto ,  Hitoshi Matsushita ,  Ryota Inoue ,  Yuki Fukuda

IPC: H01J37/244 ,  H01J37/02 ,  H01J37/26 ,  H05H7/00

Abstract: A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.

公开(公告)号：US20190214224A1

公开(公告)日：2019-07-11

申请号：US16237775

申请日：2019-01-02

Applicant: NuFlare Technology, Inc.

Inventor： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Kiyoshi Nakaso ,  Keita Ideno ,  Shintaro Yamamoto ,  Keisuke Goto ,  Hitoshi Matsushita ,  Hirokazu Yoshioka ,  Ryouta Inoue ,  Yuuki Fukuda

IPC: H01J37/244 ,  H01J37/317 ,  H01J37/06

CPC classification number: H01J37/244 ,  H01J37/06 ,  H01J37/3174 ,  H01J2237/0216 ,  H01J2237/20264

Abstract: The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.

公开(公告)号：US09466465B2

公开(公告)日：2016-10-11

申请号：US14674054

申请日：2015-03-31

Applicant: NuFlare Technology, Inc.

Inventor： Keita Ideno

IPC: H01J37/20 ,  H01J37/317

CPC classification number: H01J37/3174 ,  H01J37/20 ,  H01J2237/20292 ,  H01J2237/30438

Abstract: A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; and a support body supporting the detection unit.

Abstract translation: 根据实施例的带电粒子束描绘装置包括： 真空容器，包括基板; 提供在真空容器中并支撑样品的阶段; 设置在真空容器中并移动台的台架移动机构; 设置在舞台的下表面上的二维刻度; 设置在所述二维刻度下的检测单元，并且通过使用所述二维刻度来检测所述载物台的位置; 以及支撑所述检测单元的支撑体。