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公开(公告)号:US09960204B2
公开(公告)日:2018-05-01
申请号:US15272913
申请日:2016-09-22
发明人: Chunbo Zhang , Peter Ngo , Gershon Akerling , Kevin M. Leong , Patty Chang-Chien , Kelly J. Hennig , William R. Deal
IPC分类号: H01Q13/02 , H01L27/146 , H01L21/762 , H01L23/66 , H01Q23/00 , H01P11/00 , H01L31/18 , H01L23/055 , H01L23/14 , H01L23/00
CPC分类号: H01L27/14685 , H01L21/76254 , H01L23/055 , H01L23/147 , H01L23/66 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/97 , H01L27/14687 , H01L31/186 , H01L31/1876 , H01L2223/6627 , H01L2223/6633 , H01L2223/6677 , H01L2223/6683 , H01L2224/0401 , H01L2224/13109 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/16235 , H01L2224/81022 , H01L2224/81024 , H01L2224/81054 , H01L2224/81191 , H01L2224/81192 , H01L2224/81204 , H01L2224/81805 , H01L2224/81815 , H01L2224/94 , H01L2224/97 , H01L2924/10329 , H01L2924/10335 , H01L2924/12032 , H01L2924/13064 , H01L2924/14215 , H01L2924/1423 , H01L2924/15313 , H01L2924/157 , H01L2924/37001 , H01P11/002 , H01Q13/02 , H01Q23/00 , H01L2924/00 , H01L2224/03 , H01L2224/81 , H01L2924/01079
摘要: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.
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公开(公告)号:US20170018597A1
公开(公告)日:2017-01-19
申请号:US15272913
申请日:2016-09-22
发明人: Chunbo Zhang , Peter Ngo , Gershon Akerling , Kevin M. Leong , Patty Chang-Chien , Kelly J. Hennig , William R. Deal
IPC分类号: H01L27/146 , H01P11/00 , H01Q13/02 , H01L31/18
CPC分类号: H01L27/14685 , H01L21/76254 , H01L23/055 , H01L23/147 , H01L23/66 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/97 , H01L27/14687 , H01L31/186 , H01L31/1876 , H01L2223/6627 , H01L2223/6633 , H01L2223/6677 , H01L2223/6683 , H01L2224/0401 , H01L2224/13109 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/16235 , H01L2224/81022 , H01L2224/81024 , H01L2224/81054 , H01L2224/81191 , H01L2224/81192 , H01L2224/81204 , H01L2224/81805 , H01L2224/81815 , H01L2224/94 , H01L2224/97 , H01L2924/10329 , H01L2924/10335 , H01L2924/12032 , H01L2924/13064 , H01L2924/14215 , H01L2924/1423 , H01L2924/15313 , H01L2924/157 , H01L2924/37001 , H01P11/002 , H01Q13/02 , H01Q23/00 , H01L2924/00 , H01L2224/03 , H01L2224/81 , H01L2924/01079
摘要: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.
摘要翻译: 公开了一种用于将单个III-V MMIC集成到微加工波导封装中的方法和装置。 MMIC在集成之前进行筛选,仅允许已知的芯片集成,从而提高产量。 该方法和装置用于实现用于亚毫米波(SMMW)相机的微集成焦平面阵列(mFPA)技术,尽管许多其他应用是可能的。 不同技术的MMIC可以集成到相同的微加工包装中,从而实现与多晶圆WLP集成相同的技术集成水平。
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公开(公告)号:US20190081381A1
公开(公告)日:2019-03-14
申请号:US16149672
申请日:2018-10-02
摘要: A method of making an electrical structure having a foam housing is set forth. The foam housing includes an interior surface forming a conductive cavity adapted to carry energized waveforms therethrough. An electrical component of the electrical structure is integrally formed with the interior surface as the foam housing of the structure is assembled. The method includes the steps of depositing a plating material into a mold, pouring a foam polymer into the mold and removing the plated foam structure from the mold without etching the section from the mold. The method further includes steps of forming a metallic form into a planar structure, filling the open pores of the foam with a material such as photo-resist, machining a cavity from the foam, electroplating the cavity in the foam then removing the photo-resist material.
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公开(公告)号:US09478458B2
公开(公告)日:2016-10-25
申请号:US14149965
申请日:2014-01-08
发明人: Chunbo Zhang , Peter Ngo , Gershon Akerling , Kevin M. Leong , Patty Chang-Chien , Kelly J. Hennig , William R. Deal
IPC分类号: H01Q13/02 , H01L21/762 , H01L23/66 , H01Q23/00 , H01L23/055 , H01L23/14 , H01P11/00 , H01L23/00
CPC分类号: H01L27/14685 , H01L21/76254 , H01L23/055 , H01L23/147 , H01L23/66 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/97 , H01L27/14687 , H01L31/186 , H01L31/1876 , H01L2223/6627 , H01L2223/6633 , H01L2223/6677 , H01L2223/6683 , H01L2224/0401 , H01L2224/13109 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/16235 , H01L2224/81022 , H01L2224/81024 , H01L2224/81054 , H01L2224/81191 , H01L2224/81192 , H01L2224/81204 , H01L2224/81805 , H01L2224/81815 , H01L2224/94 , H01L2224/97 , H01L2924/10329 , H01L2924/10335 , H01L2924/12032 , H01L2924/13064 , H01L2924/14215 , H01L2924/1423 , H01L2924/15313 , H01L2924/157 , H01L2924/37001 , H01P11/002 , H01Q13/02 , H01Q23/00 , H01L2924/00 , H01L2224/03 , H01L2224/81 , H01L2924/01079
摘要: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.
摘要翻译: 公开了一种用于将单个III-V MMIC集成到微加工波导封装中的方法和装置。 MMIC在集成之前进行筛选,仅允许已知的芯片集成,从而提高产量。 该方法和装置用于实现用于亚毫米波(SMMW)相机的微集成焦平面阵列(mFPA)技术,尽管许多其他应用是可能的。 不同技术的MMIC可以集成到相同的微加工包装中,从而实现与多晶圆WLP集成相同的技术集成水平。
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公开(公告)号:US11056760B2
公开(公告)日:2021-07-06
申请号:US16149672
申请日:2018-10-02
摘要: A method of making an electrical structure having a foam housing is set forth. The foam housing includes an interior surface forming a conductive cavity adapted to carry energized waveforms therethrough. An electrical component of the electrical structure is integrally formed with the interior surface as the foam housing of the structure is assembled. The method includes the steps of depositing a plating material into a mold, pouring a foam polymer into the mold and removing the plated foam structure from the mold without etching the section from the mold. The method further includes steps of forming a metallic form into a planar structure, filling the open pores of the foam with a material such as photo-resist, machining a cavity from the foam, electroplating the cavity in the foam then removing the photo-resist material.
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公开(公告)号:US20160149286A1
公开(公告)日:2016-05-26
申请号:US15013551
申请日:2016-02-02
IPC分类号: H01P11/00
CPC分类号: H01P11/006 , C04B35/6269 , H01B3/30 , H01P3/06 , H01P3/08 , H01P3/087 , H01P3/12 , H01P3/121 , H01P11/001 , H01P11/002 , Y10T29/49016 , Y10T29/49018
摘要: A method of making an electrical structure having a foam housing is set forth. The foam housing includes an interior surface forming a conductive cavity adapted to carry energized waveforms therethrough. An electrical component of the electrical structure is integrally formed with the interior surface as the foam housing of the structure is assembled. The method includes the steps of depositing a plating material into a mold, pouring a foam polymer into the mold and removing the plated foam structure from the mold without etching the section from the mold. The method further includes steps of forming a metallic form into a planar structure, filling the open pores of the foam with a material such as photo-resist, machining a cavity from the foam, electroplating the cavity in the foam then removing the photo-resist material.
摘要翻译: 阐述了制造具有泡沫外壳的电气结构的方法。 泡沫壳体包括形成适于承载通电波形的导电腔的内表面。 当结构的泡沫壳体组装时,电气结构的电气部件与内表面一体地形成。 该方法包括以下步骤:将电镀材料沉积到模具中,将泡沫聚合物注入模具中,并从模具中除去镀覆的泡沫结构物,而不从模具中蚀刻该部分。 该方法还包括以下步骤:将金属形式形成平面结构,用诸如光致抗蚀剂的材料填充泡沫的开孔,从泡沫中加工空腔,将泡沫中的空腔电镀,然后除去光致抗蚀剂 材料。
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公开(公告)号:US10122063B2
公开(公告)日:2018-11-06
申请号:US15013551
申请日:2016-02-02
摘要: A method of making an electrical structure having a foam housing is set forth. The foam housing includes an interior surface forming a conductive cavity adapted to carry energized waveforms therethrough. An electrical component of the electrical structure is integrally formed with the interior surface as the foam housing of the structure is assembled. The method includes the steps of depositing a plating material into a mold, pouring a foam polymer into the mold and removing the plated foam structure from the mold without etching the section from the mold. The method further includes steps of forming a metallic form into a planar structure, filling the open pores of the foam with a material such as photo-resist, machining a cavity from the foam, electroplating the cavity in the foam then removing the photo-resist material.
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公开(公告)号:US20140254979A1
公开(公告)日:2014-09-11
申请号:US14149965
申请日:2014-01-08
发明人: Chunbo Zhang , Peter Ngo , Gershon Akerling , Kevin M. Leong , Patty Chang-Chien , Kelly J. Hennig , William R. Deal
IPC分类号: G02B6/42 , G02B6/13 , H01L21/762
CPC分类号: H01L27/14685 , H01L21/76254 , H01L23/055 , H01L23/147 , H01L23/66 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/97 , H01L27/14687 , H01L31/186 , H01L31/1876 , H01L2223/6627 , H01L2223/6633 , H01L2223/6677 , H01L2223/6683 , H01L2224/0401 , H01L2224/13109 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/16235 , H01L2224/81022 , H01L2224/81024 , H01L2224/81054 , H01L2224/81191 , H01L2224/81192 , H01L2224/81204 , H01L2224/81805 , H01L2224/81815 , H01L2224/94 , H01L2224/97 , H01L2924/10329 , H01L2924/10335 , H01L2924/12032 , H01L2924/13064 , H01L2924/14215 , H01L2924/1423 , H01L2924/15313 , H01L2924/157 , H01L2924/37001 , H01P11/002 , H01Q13/02 , H01Q23/00 , H01L2924/00 , H01L2224/03 , H01L2224/81 , H01L2924/01079
摘要: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.
摘要翻译: 公开了一种用于将单个III-V MMIC集成到微加工波导封装中的方法和装置。 MMIC在集成之前进行筛选,仅允许已知的芯片集成,从而提高产量。 该方法和装置用于实现用于亚毫米波(SMMW)相机的微集成焦平面阵列(mFPA)技术,尽管许多其他应用是可能的。 不同技术的MMIC可以集成到相同的微加工包装中,从而实现与多晶圆WLP集成相同的技术集成水平。
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