公开(公告)号：US09138997B2

公开(公告)日：2015-09-22

申请号：US13440282

申请日：2012-04-05

Applicant: Motoki Takabe ,  Takumi Yamaoka ,  Takahiro Kamijo

Inventor： Motoki Takabe ,  Takumi Yamaoka ,  Takahiro Kamijo

IPC: B41J2/16 ,  B41J2/145 ,  B41J2/14 ,  C04B35/499 ,  B81B3/00

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1612 ,  B41J2/1639 ,  B41J2/1646 ,  B41J2002/14491 ,  B81B3/0078 ,  C04B35/499 ,  Y10T29/42 ,  Y10T29/49124 ,  Y10T29/49155 ,  Y10T29/49163 ,  Y10T29/49401

Abstract: A method for manufacturing a liquid ejecting head which includes forming a first electrode on a vibration plate, forming a piezoelectric body on the first electrode, and forming a first layer having a greater thermal expansion rate than the piezoelectric body and the same conductivity as the second electrode, on the piezoelectric body. The method also includes forming a sacrifice layer on the first layer, heating the vibration plate, the first electrode, the piezoelectric body, the first layer, and the sacrifice layer to oxidize the sacrifice layer, and then cooling the vibration plate, the first electrode, the piezoelectric body, the first layer, and the sacrifice layer after the heating. Lastly, a second layer having the same conductivity as the second electrode is formed on the first layer and the sacrifice layer, after the cooling.

Abstract translation: 一种液体喷射头的制造方法，其特征在于，在振动板上形成第一电极，在所述第一电极上形成压电体，形成具有比所述压电体高的热膨胀率的第一层， 电极，在压电体上。 该方法还包括在第一层上形成牺牲层，加热振动板，第一电极，压电体，第一层和牺牲层以氧化牺牲层，然后冷却振动板，第一电极 ，压电体，第一层和牺牲层。 最后，在冷却之后，在第一层和牺牲层上形成具有与第二电极相同导电性的第二层。

公开(公告)号：US08966729B2

公开(公告)日：2015-03-03

申请号：US13039869

申请日：2011-03-03

Applicant: Hironobu Kazama ,  Takahiro Kamijo ,  Masato Shimada ,  Hiroyuki Kamei ,  Yuka Yonekura ,  Motoki Takabe

Inventor： Hironobu Kazama ,  Takahiro Kamijo ,  Masato Shimada ,  Hiroyuki Kamei ,  Yuka Yonekura ,  Motoki Takabe

IPC: B41J2/16 ,  H01L41/09 ,  H01L41/187 ,  H01L41/318 ,  H01L41/314 ,  C23C16/52 ,  H01L21/3213 ,  H01L21/3065 ,  B41J2/14

CPC classification number: B41J2/1646 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2002/14241 ,  B41J2002/14419 ,  C23C16/52 ,  H01L21/3065 ,  H01L21/32136 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/314 ,  H01L41/318 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49401

Abstract: In sputter etching to improve the adhesion between upper electrodes and lead electrodes, the sputter etching of surfaces of the upper electrodes under an Ar gas flow at a flow rate of 60 sccm or more can reduce the residence time of Ar ions on the surfaces of the upper electrodes because of the Ar gas flow. This can prevent the charging of the upper electrodes due to the buildup of ionized Ar gas on the surfaces, reduce the influence of charging on piezoelectric elements, and provide a method for manufacturing a piezoelectric actuator that includes the piezoelectric elements each including a piezoelectric layer having small variations in hysteresis characteristics and deformation characteristics.

Abstract translation: 在溅射蚀刻以改善上电极和引线电极之间的粘附性的同时，以60sccm或更大的流速在Ar气流下对上电极的表面的溅射蚀刻可以减少Ar离子在表面上的停留时间 上电极由于Ar气流。 这可以防止由于表面上的电离Ar气体的积聚而导致的上部电极的充电，减少了对压电元件的充电的影响，并且提供了一种压电致动器的制造方法，该压电致动器包括压电元件，每个压电元件包括​​压电元件， 滞后特性和变形特性变化小。

公开(公告)号：US08147041B2

公开(公告)日：2012-04-03

申请号：US12611823

申请日：2009-11-03

Applicant: Akira Kuriki ,  Koji Sumi ,  Tatsuo Sawasaki ,  Tatsuro Torimoto ,  Motoki Takabe

Inventor： Akira Kuriki ,  Koji Sumi ,  Tatsuo Sawasaki ,  Tatsuro Torimoto ,  Motoki Takabe

IPC: B41J2/045 ,  H01L41/00 ,  H02N2/00

CPC classification number: B41J2/161 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  Y10T29/42

Abstract: A piezoelectric element includes a piezoelectric film containing lead (Pb), zirconium (Zr), and titanium (Ti). The piezoelectric film has a composition satisfying the relationship of Zr/(Ti+Zr)>Ti/(Ti+Zr) and has a polarization-electric field hysteresis loop having a Pm/2Pr of 1.95 or more and a Vc(−) of −1.75 V or more, wherein Pm denotes saturation polarization, Pr denotes remanent polarization, and Vc(−) denotes a negative coercive electric field intensity.

Abstract translation: 压电元件包括​​含铅（Pb），锆（Zr）和钛（Ti）的压电膜。 该压电膜具有满足Zr /（Ti + Zr）> Ti /（Ti + Zr）的关系的组成，并且具有Pm / 2Pr为1.95以上的极化电场磁滞回线，Vc（ - -1.75V以上，其中Pm表示饱和极化，Pr表示剩余极化，Vc（ - ）表示负矫顽电场强度。

公开(公告)号：US20070007860A1

公开(公告)日：2007-01-11

申请号：US11482689

申请日：2006-07-10

Applicant: Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

Inventor： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

IPC: H01L41/187

CPC classification number: B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/20 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

Abstract: An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO2); at least one buffer layer provided on the layer made of silicon dioxide (SiO2); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.

Abstract translation: 致动器装置包括：设置在单晶硅（Si）衬底上的由二氧化硅（SiO 2）构成的层; 设置在由二氧化硅（SiO 2）构成的层上的至少一个缓冲层; 设置在缓冲层上的由具有（100）面取向的氧化镧（LNO）制成的基层; 和压电元件。 压电元件包括​​：设置在基底层上并由具有（100）面取向的铂（Pt）制成的下电极; 由平面取向为（100）取向的铁电体层构成的压电层，通过外延生长在下部电极上形成的压电体，其中选自四方晶系，单斜晶系 系统和菱方系统主导其他晶体系统; 以及设置在压电层上的上电极。

公开(公告)号：US20060268073A1

公开(公告)日：2006-11-30

申请号：US11390222

申请日：2006-03-28

Applicant: Motoki Takabe ,  Koji Sumi

Inventor： Motoki Takabe ,  Koji Sumi

IPC: B41J2/045

CPC classification number: B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/11 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

Abstract: Provided are a piezoelectric element, an actuator device, a liquid-jet head and a liquid-jet apparatus which exhibit excellent displacement characteristics; and the piezoelectric element is configured of a lower electrode, a piezoelectric layer and an upper electrode, in which piezoelectric element the proportion of the (100) planes present in the face surface of the piezoelectric layer to the (100), (110) and (111) planes present therein is not less than 70%, and in which piezoelectric element the proportion of the (100), (110) and (210) planes present in the vertical surface orthogonal to the face surface of the piezoelectric layer to the (100), (110), (210), (111) and (211) planes present therein is not less than 80%.

Abstract translation: 提供具有优异的位移特性的压电元件，致动器装置，液体喷射头和液体喷射装置; 并且压电元件由下电极，压电层和上电极构成，其中压电元件在压电层的表面中存在的（100）面的比例与（100），（110）和 其中存在的（111）面不小于70％，并且在压电元件中，垂直于压电层的表面的垂直表面中存在的（100），（110）和（210）面的比例与 （100），（110），（210），（111）和（211）面不少于80％。

公开(公告)号：US07757362B2

公开(公告)日：2010-07-20

申请号：US12167930

申请日：2008-07-03

Applicant: Akira Kuriki ,  Koji Sumi ,  Hironobu Kazama ,  Motoki Takabe ,  Motohisa Noguchi

Inventor： Akira Kuriki ,  Koji Sumi ,  Hironobu Kazama ,  Motoki Takabe ,  Motohisa Noguchi

IPC: H01L41/22 ,  H04R17/00

CPC classification number: H01L41/318 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  C23C18/1216 ,  C23C18/1283 ,  H01L41/0973 ,  H01L41/1876 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49155

Abstract: A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C., to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].

Abstract translation: 一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧制电介质前体膜以形成电介质膜的烧制步骤，其中干燥步骤包括将电介质前体膜加热至低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤 并且将介电前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃的温度下将电介质前体膜干燥至170℃ ℃，脱脂步骤在350℃至450℃的脱脂温度和15℃/秒以上的加热速率下进行，并且烧成步骤在 升温速度为100 [℃/秒]至150℃/秒。

公开(公告)号：US20080018716A1

公开(公告)日：2008-01-24

申请号：US11879628

申请日：2007-07-18

Applicant: Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

Inventor： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

IPC: B41J2/045 ,  H01L41/187

CPC classification number: B41J2/14233 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319

Abstract: A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

Abstract translation: 一种压电装置，包括：基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极，通过X射线衍射摇摆曲线法测量的具有（100）面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。

公开(公告)号：US20080012911A1

公开(公告)日：2008-01-17

申请号：US11730644

申请日：2007-04-03

Applicant: Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

Inventor： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

IPC: B41J2/045

CPC classification number: B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

Abstract: Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.

Abstract translation: 公开了一种致动器装置，其包括振动板和压电元件。 振动板包括由氧化硅（SiO 2）构成的弹性膜，并且形成在基板上，同时压电元件形成在振动板上并且包括下电极，压电层 和上电极。 该振动板具有这样的应力，即对处于移动状态的压电元件产生在300MPa至500MPa之间的拉伸应力。

公开(公告)号：US07810915B2

公开(公告)日：2010-10-12

申请号：US11730645

申请日：2007-04-03

Applicant: Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

Inventor： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

IPC: B41J2/045 ,  H01L41/00

CPC classification number: B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

Abstract: Disclosed is an actuator device that includes a piezoelectric element provided as being freely displaceable on a substrate. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode. In the actuator device, the Young's modulus of the lower electrode is not less than 200 GPa.

Abstract translation: 公开了一种致动器装置，其包括被设置为可在基板上自由移位的压电元件。 压电元件包括​​下电极，压电层和上电极。 在致动器装置中，下电极的杨氏模量不小于200GPa。

公开(公告)号：US07717546B2

公开(公告)日：2010-05-18

申请号：US11879628

申请日：2007-07-18

Applicant: Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

Inventor： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

IPC: B41J2/045

CPC classification number: B41J2/14233 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319

Abstract: A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

Abstract translation: 一种压电装置，包括：基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极，通过X射线衍射摇摆曲线法测量的具有（100）面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。