Invention Grant
- Patent Title: Actuator device, liquid-jet head and liquid-jet apparatus
- Patent Title (中): 执行器装置，喷液头和液体喷射装置
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Application No.: US11730645Application Date: 2007-04-03
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Publication No.: US07810915B2Publication Date: 2010-10-12
- Inventor: Motoki Takabe , Koji Sumi , Motohisa Noguchi , Naoto Yokoyama , Takeshi Saito
- Applicant: Motoki Takabe , Koji Sumi , Motohisa Noguchi , Naoto Yokoyama , Takeshi Saito
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2006-102353 20060403
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/00
Abstract:
Disclosed is an actuator device that includes a piezoelectric element provided as being freely displaceable on a substrate. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode. In the actuator device, the Young's modulus of the lower electrode is not less than 200 GPa.
Public/Granted literature
- US20080074473A1 Actuator device, liquid-jet head and liquid-jet apparatus Public/Granted day:2008-03-27
Information query
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