公开(公告)号：US5473409A

公开(公告)日：1995-12-05

申请号：US309874

申请日：1994-09-20

申请人： Minoru Takeda ,  Shigeo Kubota ,  Michio Oka ,  Tohru Ogawa

发明人： Minoru Takeda ,  Shigeo Kubota ,  Michio Oka ,  Tohru Ogawa

IPC分类号： G03F7/20 ,  G03B27/42

CPC分类号： G03F7/70575

摘要： An exposure device in which a reticle having a circuit pattern of a semiconductor device formed on it is irradiated with light beam emanated from a light source, such as a laser light source, for exposing the circuit pattern formed on the reticle on a semiconductor wafer. The exposure device includes a light beam generator for illuminating the reticle having a semiconductor circuit pattern formed on it, an image-forming optical system for forming an image on a wafer of a light image produced on radiating a light beam on the reticle from the light beam generator. The exposure device also includes a movement unit for moving the wafer relative to the image-forming optical system, and an alignment unit for detecting the position on the wafer of the image formed on the wafer by the image-forming optical system for position matching the image by the image-forming optical system relative to the wafer. The light beam generator includes a light source for excitation, a first resonator and a second resonator. The first resonator is illuminated by the light beam from the light source for excitation and outputs the light beam from the light source for excitation after waveform conversion. The second resonator is illuminated by the light beam from the first resonator and outputs the light beam from the first resonator after waveform conversion.

摘要翻译： 照射具有形成在其上的半导体器件的电路图形的掩模版的曝光装置，用于从诸如激光源的光源发射的光束照射用于使形成在半导体晶片上的掩模版上的电路图案曝光。 曝光装置包括用于照亮其上形成有半导体电路图案的掩模版的光束发生器，用于在光线上形成光图像的图像的图像形成光学系统，该光图像在光线上从光线照射光线 光束发生器。 曝光装置还包括用于相对于图像形成光学系统移动晶片的移动单元和用于通过图像形成光学系统检测在晶片上形成的图像在晶片上的位置的对准单元，用于位置匹配 通过图像形成光学系统相对于晶片的图像。 光束发生器包括用于激发的光源，第一谐振器和第二谐振器。 第一谐振器由来自光源的光束照射用于激发，并且在波形转换之后输出来自光源的光束用于激发。 第二谐振器由来自第一谐振器的光束照射，并且在波形转换之后从第一谐振器输出光束。

公开(公告)号：US5696581A

公开(公告)日：1997-12-09

申请号：US824311

申请日：1997-03-26

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： G01M11/00 ,  G01M11/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

CPC分类号： G03F7/706 ,  G01M11/0292

摘要： A lens evaluating device for measuring the optical transfer function of the lens under evaluation for evaluating the lens. The lens evaluating device includes an exposure light source, a converging lens for converging a light beam radiated from the exposure light source at a point, a characteristics evaluating pattern onto which the light beam outputted from the converging lens is converged by the lens under evaluation to form an image on it, a detection unit for receiving a return light beam having scanned the characteristics evaluating pattern via the lens under evaluation for detecting changes in reflection intensity of the return light beam, and an analysis unit for executing frequency analysis of the detected results from the detection unit for measuring the optical transfer function. The results of detection by the detection unit are subjected to a frequency analysis using a spectrum analyzer for measuring the optical transfer function of the lens under evaluation for evaluating the lens. An exposure light source includes a first resonator and a second resonator. The first resonator has a laser medium illuminated by an excited light radiated by an exciting light source and a first non-linear optical crystal device for wavelength-converting the light beam radiated from the laser medium. The second resonator has a second non-linear optical crystal device for wavelength-converting a light beam radiated from the first resonator.

公开(公告)号：US5822287A

公开(公告)日：1998-10-13

申请号：US648147

申请日：1996-06-05

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： G11B7/00 ,  G11B7/0045 ,  G11B7/09 ,  G11B7/125 ,  G11B7/135 ,  G11B7/24 ,  G11B7/26 ,  G11B19/12 ,  G11B20/00 ,  G11B23/28 ,  G11B23/36

CPC分类号： G11B7/127 ,  G11B23/36 ,  G11B7/0045 ,  G11B7/0903 ,  G11B7/128 ,  G11B7/1372 ,  G11B7/24 ,  G11B20/00086 ,  G11B2019/121 ,  G11B23/284 ,  G11B7/0908 ,  G11B7/26

摘要： The UV laser light outgoing from a UV laser light source 1 is modulated in intensity by a light modulator 2 in accordance with the subsidiary information so as to fall on a mirror 14 via lenses 3, 4, a phase diffraction lattice 5 and a half mirror 11. The UV laser light is then reflected by the mirror 14 and condensed by an objective lens 6 so as to be radiated on an optical disc 8. The UV laser light outgoing from the UV laser light source 1 falls on a phase diffraction lattice via a light modulator 2 and lenses 3 and 4 so as to be radiated on the optical disc 8 via the half mirror 11, mirror 14 and the objective lens 6. On the other hand, the reflected light of the visible laser light reflected by the optical disc 8 falls on the half mirror 11 via the objective lens 6 and the mirror 14 so as to be reflected by the half mirror 11 to fall on a photodetector 13 via a cylindrical lens 12. By effecting focusing control and tracking control based upon an output signal of the photodetector 13, a light spot of the UV laser may be formed at a precise position in the subsidiary information recording area for correctly recording the subsidiary information.

摘要翻译： PCT No.PCT / JP95 / 01895第 371日期：1996年6月5日 102（e）日期1996年6月5日PCT 1995年9月20日PCT PCT。 公开号WO96 / 10250 PCT 日期1996年04月4日根据辅助信息，通过光调制器2强度地从UV激光光源1输出的UV激光经由透镜3,4落在反射镜14上，相位衍射光栅 5和半反射镜11.然后，UV激光被反射镜14反射并被物镜6聚光，以便辐射在光盘8上。从UV激光光源1出射的UV激光落在 经由光调制器2和透镜3和4的相位衍射格栅，以便经由半反射镜11，反射镜14和物镜6照射在光盘8上。另一方面，可见激光的反射光 由光盘8反射的光经由物镜6和反射镜14落在半反射镜11上，以被半反射镜11反射，经由柱面透镜12落在光电检测器13上。通过进行聚焦控制和跟踪 基于t的输出信号进行控制 在紫外线激光器的光点可以形成在辅助信息记录区域中的精确位置，以正确地记录辅助信息。

公开(公告)号：US5638168A

公开(公告)日：1997-06-10

申请号：US313387

申请日：1994-09-27

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： G01M11/00 ,  G01M11/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

CPC分类号： G03F7/706 ,  G01M11/0292

摘要： A lens evaluating device for measuring the optical transfer function of the lens under evaluation for evaluating the lens. The lens evaluating device includes an exposure light source, a converging lens for converging a light beam radiated from the exposure light source at a point, a characteristics evaluating pattern onto which the light beam outputted from the converging lens is converged by the lens under evaluation to form an image on it, a detection unit for receiving a return light beam having scanned the characteristics evaluating pattern via the lens under evaluation for detecting changes in reflection intensity of the return light beam, and an analysis unit for executing frequency analysis of the detected results from the detection unit for measuring the optical transfer function. The results of detection by the detection unit are subjected to a frequency analysis using a spectrum analyzer for measuring the optical transfer function of the lens under evaluation for evaluating the lens. An exposure light source includes a first resonator and a second resonator. The first resonator has a laser medium illuminated by an excited light radiated by an exciting light source and a first non-linear optical crystal device for wavelength-converting the light beam radiated from the laser medium. The second resonator has a second non-linear optical crystal device for wavelength-converting a light beam radiated from the first resonator.

摘要翻译： 一种用于测量透镜评估透镜的光学传递函数的透镜评估装置。 透镜评估装置包括曝光光源，用于将从曝光光源照射的光束会聚在一点的会聚透镜，从会聚透镜输出的光束被评估的镜片会聚的特性评估图案， 在其上形成图像;检测单元，用于接收通过经评估的镜片扫描特性评估图案的返回光束，用于检测返回光束的反射强度的变化;以及分析单元，用于执行检测结果的频率分析 来自用于测量光学传递函数的检测单元。 使用用于测量透镜评估用透镜的光学传递函数的光谱分析仪对检测单元的检测结果进行频率分析。 曝光光源包括第一谐振器和第二谐振器。 第一谐振器具有由激发光源辐射的激发光照射的激光介质和用于对从激光介质辐射的光束进行波长转换的第一非线性光学晶体装置。 第二谐振器具有用于对从第一谐振器辐射的光束进行波长转换的第二非线性光学晶体装置。

公开(公告)号：US06628681B2

公开(公告)日：2003-09-30

申请号：US10098148

申请日：2002-03-15

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： H01S310

CPC分类号： H01S3/2383 ,  B23K26/0604 ,  B23K26/0613 ,  B23K26/067 ,  G02B6/03633 ,  G02B6/2848 ,  G02B6/2861 ,  H01L27/1285 ,  H01L29/66765 ,  H01S3/005 ,  H01S3/0604 ,  H01S3/0627 ,  H01S3/06745 ,  H01S3/06754 ,  H01S3/094007

摘要： A laser apparatus includes a master laser for emitting reference laser pulse light RPref having a wavelength of 914 nm and a pulse width of 0.5 ns; a microlens array for dividing the reference laser pulse light RPref into N pieces of light; optical fiber amplifiers 14-1 to 14-N being set to increase their length progressively in that order so as to have a propagation delay time of 0.5 ns, which is the pulse width of the divided pieces of reference laser pulse light DRPref1 to DRPrefN; a third harmonic generating unit for receiving the divided pieces of reference laser pulse light on which amplifying and delaying effects have been produced, and generating third harmonics TRD1 to TRDN having a wavelength of 305 nm and a pulse width of 0.5 ns; and an illuminating optical system for successively disposing the N third harmonics TRD1 to TRDN in parallel with each other, subjecting the N third harmonics TRD1 to TRDN to time multiplexing, and emitting the result.

公开(公告)号：US5376993A

公开(公告)日：1994-12-27

申请号：US126192

申请日：1993-09-24

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： G02B13/18 ,  G02B27/64 ,  G03B5/00 ,  G03B5/02 ,  G03B17/00 ,  H04N5/232 ,  G03B7/08

CPC分类号： H04N5/23258 ,  H04N5/23248 ,  H04N5/23287

摘要： A system for correcting for positional deviations in a hand-held video camera caused by small movements or shaping of the user's hands includes an afocal optical system constituted by a positive meniscus lens and a negative meniscus lens. The positional deviations of the camera caused by minute tremors or shaking of the user's hands are detected by a pitch sensor and a roll sensor and a micro-computer is responsive to the detected amount of the positional deviations to drive the positive meniscus lens and the negative meniscus lens in vertical and horizontal directions with respect to the optical axis, thereby controlling the position of the image pickup light being radiated onto a CCD image sensor of the video camera.

摘要翻译： 用于校正手持式摄像机的位置偏差的系统，其由小的移动或用户的手的形状引起的包括由正弯月透镜和负弯月形透镜构成的无焦光学系统。 通过音调传感器和滚动传感器检测由微小震动或用户手抖动引起的相机的位置偏差，并且微型计算机响应于检测到的位置偏差量来驱动正弯月形透镜和负的 相对于光轴在垂直和水平方向上的弯月透镜，从而控制图像拾取光被照射到摄像机的CCD图像传感器上的位置。

公开(公告)号：US6115175A

公开(公告)日：2000-09-05

申请号：US577160

申请日：1995-12-22

申请人： Koichi Maruyama ,  Makoto Iwaki ,  Syunitirou Wakamiya ,  Shigeo Kubota ,  Hiroshi Suganuma ,  Minoru Takeda

发明人： Koichi Maruyama ,  Makoto Iwaki ,  Syunitirou Wakamiya ,  Shigeo Kubota ,  Hiroshi Suganuma ,  Minoru Takeda

IPC分类号： G02B13/14 ,  G02B13/24 ,  G03F7/20 ,  H01L21/027 ,  G01B11/00 ,  G02B11/00

CPC分类号： G03F7/70241 ,  G02B13/143

摘要： A UV image forming optical system includes a collimating lens for collimating light emitted from a UV light source, an imaging lens for forming an image of the collimated light transmitted through the collimating lens, and a beam splitting optical system positioned in an optical path of the collimated light between the collimating lens and the imaging lens. At least one of the collimated light emitted from the collimating lens and the light transmitted through the imaging lens, reflected by a reflector and transmitted again through the imaging lens is made incident upon an external viewing optical system.

摘要翻译： UV图像形成光学系统包括用于准直从UV光源发射的光的准直透镜，用于形成通过准直透镜透射的准直光的图像的成像透镜，以及位于所述准直透镜的光路中的分束光学系统 准直透镜与成像透镜之间的准直光。 从准直透镜发射的准直光中的至少一个和透过成像透镜的光被反射器反射并再次透过成像透镜，被入射到外部观察光学系统上。

公开(公告)号：US07885461B2

公开(公告)日：2011-02-08

申请号：US12586667

申请日：2009-09-25

申请人： Ko Ishimoto ,  Koichiro Kakinuma ,  Takehiro Nakatsue ,  Tatsuhiko Matsumoto ,  Shuichi Haga ,  Hiroshi Takizuka ,  Yoshiki Shirochi ,  Naoya Katoh ,  Hiroshi Yamashita ,  Koichi Oura ,  Yoshihiro Kosugi ,  Junichi Iwai ,  Kazuji Uemura ,  Shigeo Kubota ,  Hideo Morita

发明人： Ko Ishimoto ,  Koichiro Kakinuma ,  Takehiro Nakatsue ,  Tatsuhiko Matsumoto ,  Shuichi Haga ,  Hiroshi Takizuka ,  Yoshiki Shirochi ,  Naoya Katoh ,  Hiroshi Yamashita ,  Koichi Oura ,  Yoshihiro Kosugi ,  Junichi Iwai ,  Kazuji Uemura ,  Shigeo Kubota ,  Hideo Morita

IPC分类号： G06K9/00

CPC分类号： H04N9/77 ,  G06T5/001 ,  G09G5/02 ,  G09G2340/06 ,  H04N1/60 ,  H04N1/64 ,  H04N9/64 ,  H04N9/67 ,  H04N9/69 ,  H04N9/735

摘要： Signals are provided which allow colors in a wider color range than predetermined standards, which can be handled by apparatus according to such predetermined standards. A primary color converter converts first color signals having primary color points in a wider color range than the primary color points according to BT.709 into second color signals based on the primary colors according to BT.709. A photoelectric transducer converts the second color signals into third color signals according to photoelectric transducer characteristics defined in a numerical range wider than a range from 0 to 1.0 of color signals corresponding to a luminance signal and color difference signals according to BT.709. A color signal converter converts the third color signals into a luminance signal and color difference signals. A corrector incorporated in the color signal converter corrects the color difference signals into color difference signals.

摘要翻译： 提供信号，其允许比预定标准更宽的颜色范围的颜色，其可以根据这样的预定标准由设备处理。 原色转换器根据BT.709将具有比根据BT.709的原色色更宽的颜色范围的原色点转换成基于根据BT.709的原色的第二颜色信号的第一颜色信号。 根据BT.709，光电传感器根据光电转换器特性将第二颜色信号转换为第三颜色信号，该光电转换器特征在对应于亮度信号和色差信号的0至1.0范围内的数值范围内定义。 彩色信号转换器将第三颜色信号转换成亮度信号和色差信号。 结合在彩色信号转换器中的校正器将色差信号校正为色差信号。

公开(公告)号：US20090273727A1

公开(公告)日：2009-11-05

申请号：US11720712

申请日：2005-12-02

申请人： Shigeo Kubota ,  Junichi Osako ,  Satoshi Tomioko ,  Mitsunori Ueda ,  Tetsuyuki Yoshida ,  Naoji Nada

发明人： Shigeo Kubota ,  Junichi Osako ,  Satoshi Tomioko ,  Mitsunori Ueda ,  Tetsuyuki Yoshida ,  Naoji Nada

IPC分类号： G02F1/13357 ,  F21V7/06 ,  F21V13/04 ,  F21K7/00

CPC分类号： G02B17/0856 ,  G02B5/265 ,  G02F1/133603 ,  H01L33/58 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/13091 ,  H01L2924/00014 ,  H01L2924/00

摘要： There is provided a lens formed from a circular bottom face (11), lateral face (14) and top face (15) and having a surface light source (13) of a finite size disposed at the center of the bottom face (11). The top face (15) is an aspheric surface rotational symmetric with respect to a z-axis and which totally reflects a part of a component, whose polar angle is smaller than a polar angle Θ0 at the intersection between the lateral face (14) and top face (15), of light emitted from the surface light source (13). The lateral face (14) is an aspheric surface rotational symmetric with respect to the z-axis and pervious to a component, whose polar angle is larger than the polar angle Θ0, and component, totally reflected at the top face (15), of the light emitted from the surface light source (13). A function r=fS(z) where z is a variable representing the lateral face (14) increases monotonously as the variable z decreases in a closed zone defined by 0≦z≦z1 (z-coordinate of an intersection between the lateral face (14) and top face (15)), and has at least one point where a absolute value |d2r/dz2| is maximum in the closed zone.

摘要翻译： 提供了由圆形底面（11），侧面（14）和顶面（15）形成并具有设置在底面（11）的中心处的有限尺寸的表面光源（13）的透镜， 。 顶面（15）是相对于z轴旋转对称的非球面，其全部反射部分的一部分，其极角小于侧面（14）与侧面（14）的交点处的极角θta 从表面光源（13）发射的光的顶面（15）。 侧面（14）是相对于z轴旋转对称的非球面，并且可以透视其极角大于极角（θ）的部分，并且在顶面（15）处全反射的分量 从表面光源（13）发射的光。 函数r = fS（z）其中z是表示横向面（14）的变量随着变量z在由0 <= z <= z1定义的关闭区域中减小而单调增加（横向 面（14）和顶面（15）），并且具有至少一个绝对值| d2r / dz2 | 在封闭区域最大。

公开(公告)号：US20050252894A1

公开(公告)日：2005-11-17

申请号：US11177574

申请日：2005-07-08

申请人： Yutaka Imai ,  Nobuhiko Umezu ,  Akihiko Asano ,  Shin Hotta ,  Koichi Tatsuki ,  Atsushi Fukumoto ,  Shigeo Kubota

发明人： Yutaka Imai ,  Nobuhiko Umezu ,  Akihiko Asano ,  Shin Hotta ,  Koichi Tatsuki ,  Atsushi Fukumoto ,  Shigeo Kubota

IPC分类号： B23K26/06 ,  B23K26/067 ,  H01L21/20 ,  H01L21/268 ,  B23K26/02

CPC分类号： B23K26/0613 ,  B23K26/0604 ,  B23K26/0622 ,  B23K26/067 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/268 ,  H01L27/1285

摘要： A laser annealing device (10) includes a laser oscillator (12), radiating a pulsed laser light beam of a preset period, and an illuminating optical system (15) for illuminating a pulsed laser light beam to an amorphous silicon film (1). The illuminating optical system (15) manages control for moving a laser spot so that a plural number of light pulses will be illuminated on the same location on the amorphous silicon film (1). The laser oscillator (12) radiates a laser light beam of a pulse generation period shorter than the reference period. The reference period is a time interval as from the radiation timing of illumination of a pulsed laser light beam on the surface of the film (1) until the timing of reversion of the substrate temperature raised due to the illumination of the laser light beam to the original substrate temperature.

摘要翻译： 激光退火装置（10）包括激光振荡器（12），辐射预设周期的脉冲激光束，以及用于将脉冲激光束照射到非晶硅膜（1）的照明光学系统（15）。 照明光学系统（15）管理用于移动激光光斑的控制，使得多个光脉冲将被照射在非晶硅膜（1）上的相同位置。 激光振荡器（12）辐射比参考周期短的脉冲发生时段的激光束。 参考周期是从在膜（1）的表面上的脉冲激光束的照射的辐射定时直到由于激光束照射到基板温度升高的定时的时间间隔 原始基板温度。