Anti-Gravity Device for Supporting Weight and Reducing Transmissibility
    1.
    发明申请
    Anti-Gravity Device for Supporting Weight and Reducing Transmissibility 审中-公开
    用于支撑重量和降低传播率的重力装置

    公开(公告)号:US20070236854A1

    公开(公告)日:2007-10-11

    申请号:US11279296

    申请日:2006-04-11

    IPC分类号: H01H47/00

    CPC分类号: G03F7/709 G03F7/70716

    摘要: Methods and apparatus for supporting the weight of a first stage of a stage apparatus using magnets are disclosed. According to one aspect of the present invention, and apparatus includes a first structure, a second structure, and an anti-gravity device. The anti-gravity device has a first magnet and a piston arrangement that includes a second magnet. The first magnet is coupled to the first structure, and the piston arrangement is movably interfaced with the second structure through an air bearing. The first magnet and the piston arrangement cooperate to support the first structure over the second structure relative to a vertical axis.

    摘要翻译: 公开了一种用于支撑使用磁体的平台装置的第一级的重量的方法和装置。 根据本发明的一个方面,并且装置包括第一结构,第二结构和反重力装置。 反重力装置具有包括第二磁体的第一磁体和活塞装置。 第一磁体联接到第一结构,并且活塞装置通过空气轴承与第二结构可移动地接合。 第一磁体和活塞装置配合以相对于垂直轴线支撑第二结构的第一结构。

    Real-time through lens image measurement system and method
    2.
    发明申请
    Real-time through lens image measurement system and method 审中-公开
    实时透镜图像测量系统及方法

    公开(公告)号:US20050286050A1

    公开(公告)日:2005-12-29

    申请号:US10882131

    申请日:2004-06-29

    IPC分类号: G01B11/00 G03F7/20

    CPC分类号: G03F7/70591

    摘要: Embodiments of the present invention are directed to an apparatus and a method for through lens measurement for a projection system. In one embodiment, an apparatus for through lens image measurement comprises a projection lens housing containing lens elements therein, and a reflective member having a center of curvature on a first plane. The reflective member is attached to the lens housing. An optical system includes a light source, a position detector, and one or more optical elements. The optical system is attached to the lens housing and configured to direct a light from the light source through the lens elements to the reflective member which reflects the light back through the lens elements and toward the position detector. The position detector is configured to detect any image shift at the first plane due to misalignment of the lens elements with respect to the lens housing.

    摘要翻译: 本发明的实施例涉及一种用于投影系统的透镜测量的装置和方法。 在一个实施例中,用于透镜图像测量的装置包括在其中容纳透镜元件的投影透镜壳体和在第一平面上具有曲率中心的反射构件。 反射构件附接到透镜壳体。 光学系统包括光源,位置检测器和一个或多个光学元件。 光学系统附接到透镜壳体并且被配置为将来自光源的光通过透镜元件引导到反射构件,反射构件将光反射回透镜元件并朝向位置检测器。 位置检测器被配置为由于透镜元件相对于透镜壳体的未对准而检测在第一平面处的任何图像偏移。

    Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers
    3.
    发明申请
    Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers 审中-公开
    低弹簧常数,带真空室的气动悬架,空气轴承,主动力补偿和分段真空室

    公开(公告)号:US20070030462A1

    公开(公告)日:2007-02-08

    申请号:US11197576

    申请日:2005-08-03

    IPC分类号: F16M1/00 G03B27/00

    CPC分类号: G02B7/005

    摘要: Embodiments of the present invention are directed to an apparatus for providing a low spring constant, pneumatic suspension using vacuum for the lens in a projection system. In one embodiment, a pneumatic suspension system for a load comprises a frame; and a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define a chamber in the frame above the body, the body being configured to be connected to the load. The frame includes an outlet to draw a gas from the chamber to lower the pressure in the chamber with respect to an ambient pressure outside the frame. An air bearing is formed in the gap between the body and the side wall of the frame to provide non-contact between the body and the frame. The pressure in the chamber is sufficiently lower than the ambient pressure to produce a lift force to lift the body and the load connected thereto with respect to the frame.

    摘要翻译: 本发明的实施例涉及一种用于在投影系统中为透镜提供使用真空的低弹簧常数气动悬架的装置。 在一个实施例中,用于负载的气动悬挂系统包括框架; 以及主体,其可移动地设置在所述框架中并且通过间隙与所述框架的侧壁间隔开以在所述主体中的所述框架中限定室,所述主体被配置为连接到所述负载。 该框架包括从腔室抽出气体的出口,以相对于框架外部的环境压力降低腔室中的压力。 空气轴承形成在主体和框架的侧壁之间的间隙中,以在主体和框架之间提供非接触。 室内的压力足够低于环境压力,以产生升高力以提升主体和相对于框架连接到其上的负载。

    Moving mechanism with high bandwidth response and low force transmissibility
    4.
    发明申请
    Moving mechanism with high bandwidth response and low force transmissibility 有权
    具有高带宽响应和低力传递性的移动机构

    公开(公告)号:US20060033903A1

    公开(公告)日:2006-02-16

    申请号:US10918182

    申请日:2004-08-13

    IPC分类号: G03B27/62

    摘要: Methods and apparatus for providing a stage with a relatively high positioning bandwidth and low transmissibility are disclosed. According to one aspect of the present invention, a method for positioning a stage including providing a first force of a first magnitude to the stage using a primary actuator and providing a second force of a second magnitude to the stage using a secondary actuator. The first force is arranged to cause the stage to translate along a first axis. The secondary actuator is also arranged to cause the stage to translate along the first axis, and has a relatively high positioning bandwidth. The first force is arranged to enable the stage to be relatively coarsely positioned and the second force is arranged to enable the stage to be relatively finely positioned. In one embodiment, the secondary actuator is one of a voice coil motor and a piezoelectric motor.

    摘要翻译: 公开了提供具有相对高的定位带宽和低传输性的平台的方法和装置。 根据本发明的一个方面,一种用于定位平台的方法,包括使用主致动器向舞台提供第一幅度的第一力,并使用辅助致动器向舞台提供第二大小的第二力。 第一力布置成使得台架沿着第一轴线平移。 次级致动器还被布置成使得平台沿着第一轴线平移,并且具有相对较高的定位带宽。 第一力被布置成使得台架能够相对粗略地定位,并且第二力被布置成使得台架能够相对精细地定位。 在一个实施例中,次级致动器是音圈电动机和压电电动机之一。

    Projection Optical Device And Exposure Apparatus
    5.
    发明申请
    Projection Optical Device And Exposure Apparatus 审中-公开
    投影光学装置和曝光装置

    公开(公告)号:US20080068568A1

    公开(公告)日:2008-03-20

    申请号:US11662330

    申请日:2005-07-18

    IPC分类号: G03B27/42 G03B27/54

    摘要: A projection optical device includes a projection optical system which projects an image of a pattern, a support device having a flexible structure to support the projection optical system, and a positioning device having an actuator to position the projection optical system. The projection optical device can include a frame to which one end of the flexible structure is attached. The projection optical system may hang from the frame via the support device, or it may be supported from below by the support device. A projection optical device also can include a liquid supply which supplies a temperature-controlled liquid to a side surface of a projection optical system utilizing gravity to cause the temperature-controlled liquid to flow along the side surface of the projection optical system.

    摘要翻译: 投影光学装置包括投影图案的投影光学系统,具有柔性结构的支撑装置以支撑投影光学系统,以及具有用于定位投影光学系统的致动器的定位装置。 投影光学装置可以包括附接有柔性结构的一端的框架。 投影光学系统可以经由支撑装置从框架悬挂,或者可以由支撑装置从下方支撑投影光学系统。 投影光学装置还可以包括液体供应源,其利用重力将温度控制的液体供应到投影光学系统的侧表面,以使温度控制的液体沿着投影光学系统的侧表面流动。

    Image adjustor including damping assembly
    6.
    发明授权
    Image adjustor including damping assembly 失效
    图像调节器包括阻尼组件

    公开(公告)号:US07061577B2

    公开(公告)日:2006-06-13

    申请号:US10107269

    申请日:2002-03-26

    IPC分类号: G03B27/42 G03B27/58 G03B27/32

    摘要: An adjuster assembly (12) that adjusts the location where an image (18) from an object (20) is transferred onto a device (16) includes an adjuster (54) and a stage mover assembly (244). The stage mover assembly (244) adjusts the position of the adjuster (54). This moves the position where the image (18) is transferred onto the device (16). The adjuster assembly (12) can include a damper assembly (250) that is coupled to the stage mover assembly (244) and reduces the effect of vibration from the stage mover assembly (244) causing vibration on the rest of the apparatus.

    摘要翻译: 调节器(12),其调节来自物体(20)的图像(18)被转移到装置(16)上的位置包括调节器(54)和载物台移动器组件(244)。 平台移动器组件(244)调节调节器(54)的位置。 这将图像(18)传送到设备(16)上的位置移动。 调节器组件(12)可以包括阻尼器组件(250),该阻尼器组件(250)联接到载物台移动器组件(244)并且减小来自载物台组件(244)的振动对设备的其余部分产生振动的影响。

    Active vibration isolation system having pressure control
    7.
    发明授权
    Active vibration isolation system having pressure control 失效
    主动隔振系统具有压力控制

    公开(公告)号:US06590639B1

    公开(公告)日:2003-07-08

    申请号:US09663184

    申请日:2000-09-15

    IPC分类号: G03B2762

    CPC分类号: G03F7/70825 G03F7/709

    摘要: An active vibration isolation system includes a pneumatic control system and an electronic control system. The pneumatic control system supports a mass sensitive to vibration and isolates the mass from high frequency external disturbances. The electronic control system isolates the mass from low frequency external disturbances. The pneumatic control system includes a compliance chamber filled with a fluid to pneumatically support the mass, apparatus for directly measuring a pressure level in the compliance chamber, and apparatus for controlling the pressure level to minimize the effects of pressure variation in the compliance chamber. The measuring apparatus includes an instrument to measure an absolute pressure level of the compliance chamber or an instrument to measure a differential pressure level between the compliance chamber and a reference chamber having a predetermined pressure level.

    摘要翻译: 主动隔振系统包括气动控制系统和电子控制系统。 气动控制系统支持对振动的质量敏感,并将质量与高频外部干扰隔离。 电子控制系统将质量与低频外部干扰隔离开来。 气动控制系统包括填充有流体的顺应室,用于气动地支撑质量,用于直接测量顺应室中的压力水平的装置,以及用于控制压力水平的装置,以使顺应室中的压力变化的影响最小化。 测量装置包括用于测量柔性室的绝对压力水平的仪器或用于测量柔性室与具有预定压力水平的参考室之间的压差水平的仪器。

    Wall-wash fixture for directional light sources
    8.
    发明授权
    Wall-wash fixture for directional light sources 有权
    定向光源洗墙灯

    公开(公告)号:US09234640B2

    公开(公告)日:2016-01-12

    申请号:US13599659

    申请日:2012-08-30

    CPC分类号: F21S8/026 F21V7/0033 F21V7/10

    摘要: A downlight reflector assembly for a light-emitting diode (LED) light source includes a kicker reflector and an upper scoop. The kicker reflector has a reflector wall extending between a small top opening and a large bottom opening along a transverse axis. The reflector wall has an internal surface with an illuminated area and a non-illuminated area. The upper scoop is mounted in the small top opening of the kicker reflector and has a reflective multi-faceted surface with a concave curvature relative to the LED light source. The upper scoop extends from the top opening in part along the transverse axis and covering a portion of the top opening. The multi-faceted surface faces both of the illuminated area of the kicker reflector and the top opening for reflecting light rays received through the top opening towards the illuminated area.

    摘要翻译: 用于发光二极管(LED)光源的筒灯反射器组件包括踢球反射器和上勺。 踢球反射器具有沿着横向轴线在小顶部开口和大的底部开口之间延伸的反射器壁。 反射器壁具有带有照明区域和非照明区域的内表面。 上勺安装在踢球反射器的小顶部开口中,并且具有相对于LED光源具有凹曲率的反射多面面。 上勺从顶部开口部分沿着横向轴线延伸并且覆盖顶部开口的一部分。 多面表面面对踢球反射器的照明区域和顶部开口,用于将通过顶部开口接收的光线反射到照明区域。

    THERMAL THERAPY SYSTEM AND METHOD OF USE
    9.
    发明申请
    THERMAL THERAPY SYSTEM AND METHOD OF USE 审中-公开
    热治疗系统及其使用方法

    公开(公告)号:US20130331914A1

    公开(公告)日:2013-12-12

    申请号:US13837958

    申请日:2013-03-15

    IPC分类号: A61F7/00

    摘要: A system that can be used to provide highly controlled thermal therapy and compression to both cool and heat a skin surface and a joint and surrounding tissue below the skin surface is provided. The system includes a joint conforming wrap; a power supply module for supply power to the joint conforming wrap and a cable operably coupling the wrap and the power supply module. The joint conforming wrap and power supply module include opposing thermoelectric modules. The joint conforming wrap is designed to provide heat transfer processes to the body of a patient to warm or cool the skin and a joint and surrounding tissue disposed under the skin.

    摘要翻译: 提供了可用于提供高度受控的热治疗和压缩以冷却和加热皮肤表面以及皮肤表面下方的关节和周围组织的系统。 该系统包括一个联合的包装; 电源模块,用于将电源供给到接合顺应的包裹件,以及电缆,其可操作地联接包裹件和电源模块。 联合贴合包装和电源模块包括相对的热电模块。 联合贴合包装被设计成为患者的身体提供热传递过程以加热或冷却皮肤,以及设置在皮肤下方的关节和周围组织。