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公开(公告)号：US10996109B1
公开(公告)日：2021-05-04
申请号：US16655983
申请日：2019-10-17
Applicant: LightMachinery Inc.
Inventor： Hubert Jean-Ruel , Jesse Dean , John H. Hunter , Ian J. Miller , Edward S. Williams
Abstract: Conventional etalon based spectrometers have either a limited range of evaluation wavelengths or require continuous scanning of the etalon. Conventional etalon based spectrometers also have limited contrast between the peak transmission of a frequency on resonance and the minimum transmission of a frequency off resonance. An improved optical spectrometer includes a cylindrical lens configured to converge the input beam of light in only one direction, whereby the input beam of light is focused along a focal line. Accordingly, a first etalon receives the input beam of light, and transmits a series of sub-beams, each sub-beam transmitted at a different angle from the normal, and each sub-beam including multiple frequencies based on the FSR, whereby a secondary dispersive element receives each sub-beam, and disperses each sub-beam into individual frequencies. Ideally, a second etalon receives and transmits the sub-beams with increased contrast, and a second thickness of the second etalon is substantially identical to the first thickness of the first etalon.
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公开(公告)号：US08929419B1
公开(公告)日：2015-01-06
申请号：US13965551
申请日：2013-08-13
Applicant: LightMachinery Inc.
Inventor： Jesse Dean , Ian J. Miller , Edward S. Williams , John H. Hunter
Abstract: An excimer laser system in which the expensive noble gases are reclaimed, while the halogen gas is sacrificed, and the impurities developed during operation of the excimer laser are removed. In the approach disclosed a multi-stage gas purifier is used with a single, premix gas bottle containing a halogen-rich laser gas mixture comprising noble, buffer and halogen gas, to maintain the optimum halogen content of the laser, while also maintaining a consistent ratio of noble, buffer and halogen gases without complicated control apparatus.
Abstract translation: 一种准分子激光系统，其中废弃昂贵的惰性气体，同时牺牲卤素气体，并且在准分子激光器操作期间产生的杂质被去除。 在所公开的方法中，多级气体净化器与单一的预混合气瓶一起使用，其包含含有富含卤素的激光气体混合物，其包含贵重物质，缓冲剂和卤素气体，以保持激光器的最佳卤素含量，同时保持一致 贵金属，缓冲液和卤素气体的比例没有复杂的控制装置。
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Patent Agency Ranking
公开(公告)号：US20210003450A1
公开(公告)日：2021-01-07
申请号：US16503885
申请日：2019-07-05
Applicant: LightMachinery Inc.
Inventor： John H. Hunter , Ian J. Miller , Hubert Jean-Ruel , Edward S. Williams
Abstract: A conventional spatial heterodyne spectrometer (SHS) comprises a beam splitter and a pair of diffraction gratings, one in each arm of the SHS. The beam splitter separates an input beam of light into first and second sub-beams for transmission to a respective diffraction grating, and then recombines the diffracted sub-beams for focusing onto a camera. A field widened SHS enables much larger range of input angles of the original beam to be focused onto the camera, so that a broader range of wavelengths may be collected. Increasing the range of wavelengths may be provided by one or more of the following: combining the beam splitter with a field widening prism, making one diffraction grating farther from the beam splitter than the other, and placing a plurality of diffraction gratings in each arm of the SHS.
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公开(公告)号：US09478934B1
公开(公告)日：2016-10-25
申请号：US14868535
申请日：2015-09-29
Applicant: LightMachinery Inc.
Inventor： Adam Donaldson , Edward S. Williams , John H. Hunter , Tekai Akuetteh , Ian J. Miller
Abstract: The disclosure relates to the removal of hydrogen fluoride (HF) from an excimer laser either in operation or in standby using a metal halide salt reactor. Removal of HF is desirable because the contaminant not only absorbs laser emission, thus reducing laser power, but it is also chemically reactive, and degrades the lifetime of internal laser components. The metal halide salt reactor may be provided either in the laser vessel or in an external conduit loop.
Abstract translation: 本公开涉及在使用金属卤化物盐反应器的操作或备用中从准分子激光器除去氟化氢（HF）。 需要去除HF是因为污染物不仅吸收激光发射，从而降低激光功率，而且还具有化学反应性，并降低了内部激光部件的寿命。 金属卤化物盐反应器可以设置在激光容器中或外部导管回路中。
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公开(公告)号：US20210116302A1
公开(公告)日：2021-04-22
申请号：US16655983
申请日：2019-10-17
Applicant: LightMachinery Inc.
Inventor： Hubert Jean-Ruel , Jesse Dean , John H. Hunter , Ian J. Miller , Edward S. Williams
Abstract: Conventional etalon based spectrometers have either a limited range of evaluation wavelengths or require continuous scanning of the etalon. Conventional etalon based spectrometers also have limited contrast between the peak transmission of a frequency on resonance and the minimum transmission of a frequency off resonance. An improved optical spectrometer includes a cylindrical lens configured to converge the input beam of light in only one direction, whereby the input beam of light is focused along a focal line. Accordingly, a first etalon receives the input beam of light, and transmits a series of sub-beams, each sub-beam transmitted at a different angle from the normal, and each sub-beam including multiple frequencies based on the FSR, whereby a secondary dispersive element receives each sub-beam, and disperses each sub-beam into individual frequencies. Ideally, a second etalon receives and transmits the sub-beams with increased contrast, and a second thickness of the second etalon is substantially identical to the first thickness of the first etalon.
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公开(公告)号：US10908023B2
公开(公告)日：2021-02-02
申请号：US16503885
申请日：2019-07-05
Applicant: LightMachinery Inc.
Inventor： John H. Hunter , Ian J. Miller , Hubert Jean-Ruel , Edward S. Williams
Abstract: A conventional spatial heterodyne spectrometer (SHS) comprises a beam splitter and a pair of diffraction gratings, one in each arm of the SHS. The beam splitter separates an input beam of light into first and second sub-beams for transmission to a respective diffraction grating, and then recombines the diffracted sub-beams for focusing onto a camera. A field widened SHS enables much larger range of input angles of the original beam to be focused onto the camera, so that a broader range of wavelengths may be collected. Increasing the range of wavelengths may be provided by one or more of the following: combining the beam splitter with a field widening prism, making one diffraction grating farther from the beam splitter than the other, and placing a plurality of diffraction gratings in each arm of the SHS.
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公开(公告)号：US10162186B2
公开(公告)日：2018-12-25
申请号：US14703944
申请日：2015-05-05
Applicant: LightMachinery Inc.
Inventor： John H. Hunter , Ian J. Miller , Shane Boisclair , Edward S. Williams , Chris Wimperis , Vaz Zastera
Abstract: A virtual image phase array (VIPA) includes two parallel surfaces, a first highly-reflective surface with a highly-reflective coating, and a second partially-reflective surface. The first highly-reflective surface also requires an input zone with an anti-reflection coating, which abuts the highly-reflective coating, with a transition zone therebetween. Light enters the VIPA through the input zone, and reflects back and forth between the highly and partially reflective surfaces, gradually leaking out through the partially reflective surface. To minimize the transition zone and thereby minimize the input angle of incidence and maximize the number of reflections per unit of length, the substrate coated with the highly-reflective coating is subsequently polished at an acute angle resulting in the transition zone having the same sharp angle.
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