公开(公告)号：US09478934B1

公开(公告)日：2016-10-25

申请号：US14868535

申请日：2015-09-29

Applicant: LightMachinery Inc.

Inventor： Adam Donaldson ,  Edward S. Williams ,  John H. Hunter ,  Tekai Akuetteh ,  Ian J. Miller

IPC: H01S3/13 ,  H01S3/225

CPC classification number: H01S3/134 ,  H01S3/036 ,  H01S3/225

Abstract: The disclosure relates to the removal of hydrogen fluoride (HF) from an excimer laser either in operation or in standby using a metal halide salt reactor. Removal of HF is desirable because the contaminant not only absorbs laser emission, thus reducing laser power, but it is also chemically reactive, and degrades the lifetime of internal laser components. The metal halide salt reactor may be provided either in the laser vessel or in an external conduit loop.

Abstract translation: 本公开涉及在使用金属卤化物盐反应器的操作或备用中从准分子激光器除去氟化氢（HF）。 需要去除HF是因为污染物不仅吸收激光发射，从而降低激光功率，而且还具有化学反应性，并降低了内部激光部件的寿命。 金属卤化物盐反应器可以设置在激光容器中或外部导管回路中。