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公开(公告)号：US10996109B1
公开(公告)日：2021-05-04
申请号：US16655983
申请日：2019-10-17
Applicant: LightMachinery Inc.
Inventor： Hubert Jean-Ruel , Jesse Dean , John H. Hunter , Ian J. Miller , Edward S. Williams
Abstract: Conventional etalon based spectrometers have either a limited range of evaluation wavelengths or require continuous scanning of the etalon. Conventional etalon based spectrometers also have limited contrast between the peak transmission of a frequency on resonance and the minimum transmission of a frequency off resonance. An improved optical spectrometer includes a cylindrical lens configured to converge the input beam of light in only one direction, whereby the input beam of light is focused along a focal line. Accordingly, a first etalon receives the input beam of light, and transmits a series of sub-beams, each sub-beam transmitted at a different angle from the normal, and each sub-beam including multiple frequencies based on the FSR, whereby a secondary dispersive element receives each sub-beam, and disperses each sub-beam into individual frequencies. Ideally, a second etalon receives and transmits the sub-beams with increased contrast, and a second thickness of the second etalon is substantially identical to the first thickness of the first etalon.
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公开(公告)号：US08929419B1
公开(公告)日：2015-01-06
申请号：US13965551
申请日：2013-08-13
Applicant: LightMachinery Inc.
Inventor： Jesse Dean , Ian J. Miller , Edward S. Williams , John H. Hunter
Abstract: An excimer laser system in which the expensive noble gases are reclaimed, while the halogen gas is sacrificed, and the impurities developed during operation of the excimer laser are removed. In the approach disclosed a multi-stage gas purifier is used with a single, premix gas bottle containing a halogen-rich laser gas mixture comprising noble, buffer and halogen gas, to maintain the optimum halogen content of the laser, while also maintaining a consistent ratio of noble, buffer and halogen gases without complicated control apparatus.
Abstract translation: 一种准分子激光系统，其中废弃昂贵的惰性气体，同时牺牲卤素气体，并且在准分子激光器操作期间产生的杂质被去除。 在所公开的方法中，多级气体净化器与单一的预混合气瓶一起使用，其包含含有富含卤素的激光气体混合物，其包含贵重物质，缓冲剂和卤素气体，以保持激光器的最佳卤素含量，同时保持一致 贵金属，缓冲液和卤素气体的比例没有复杂的控制装置。
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公开(公告)号：US20210116302A1
公开(公告)日：2021-04-22
申请号：US16655983
申请日：2019-10-17
Applicant: LightMachinery Inc.
Inventor： Hubert Jean-Ruel , Jesse Dean , John H. Hunter , Ian J. Miller , Edward S. Williams
Abstract: Conventional etalon based spectrometers have either a limited range of evaluation wavelengths or require continuous scanning of the etalon. Conventional etalon based spectrometers also have limited contrast between the peak transmission of a frequency on resonance and the minimum transmission of a frequency off resonance. An improved optical spectrometer includes a cylindrical lens configured to converge the input beam of light in only one direction, whereby the input beam of light is focused along a focal line. Accordingly, a first etalon receives the input beam of light, and transmits a series of sub-beams, each sub-beam transmitted at a different angle from the normal, and each sub-beam including multiple frequencies based on the FSR, whereby a secondary dispersive element receives each sub-beam, and disperses each sub-beam into individual frequencies. Ideally, a second etalon receives and transmits the sub-beams with increased contrast, and a second thickness of the second etalon is substantially identical to the first thickness of the first etalon.
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公开(公告)号：US20180202862A1
公开(公告)日：2018-07-19
申请号：US15873547
申请日：2018-01-17
Applicant: LightMachinery Inc.
Inventor： Hubert JEAN-RUEL , John Reid , John H. Hunter , Jesse Dean , Edward S. Willilams , Ian J. Miller
CPC classification number: G01J3/0294 , G01J3/0208 , G01J3/0256 , G01J3/04 , G01J3/18 , G01J3/26 , G01J3/2803 , G01N21/255 , G02B26/0808 , G02B27/1066
Abstract: The invention relates to a multi-resolution optical spectrometer that employs two output lenses of different focal length to provide a broad wavelength range, coarse resolution spectral measurement and a high resolution, lower range spectral measurement. Light dispersed by a virtual image phase array followed by a diffraction grating in two different dispersion orders may be separately focused by the two lenses upon to 2D detector array to provide the two measurements.
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