摘要:
A wafer support pin has a front end contacted with a wafer such that the front end is flat or rounded. Thus, gravitational stress is minimized during annealing the wafer, thereby minimizing slip dislocation. This wafer support pin is suitably used for annealing of a wafer, particularly high temperature rapid thermal annealing of a large-diameter wafer.
摘要:
A wafer support pin has a front end contacted with a wafer such that the front end is flat or rounded. Thus, gravitational stress is minimized during annealing the wafer, thereby minimizing slip dislocation. This wafer support pin is suitably used for annealing of a wafer, particularly high temperature rapid thermal annealing of a large-diameter wafer.
摘要:
A method for making a silicon wafer includes the steps of generating and stabilizing embryos that become oxygen precipitates by succeeding thermal annealing applied during a semiconductor device manufacturing process. In the silicon wafer, embryos are substantially removed in a denuded zone, and embryos are distributed at a relatively higher concentration in a bulk region. Also, by controlling behaviors of embryos, a silicon wafer having a desired concentration profile of oxygen precipitates by succeeding thermal annealing is manufactured with high reliability and reproducibility.
摘要:
A method for making a silicon wafer includes the steps of generating and stabilizing embryos that become oxygen precipitates by succeeding thermal annealing applied during a semiconductor device manufacturing process. In the silicon wafer, embryos are substantially removed in a denuded zone, and embryos are distributed at a relatively higher concentration in a bulk region. Also, by controlling behaviors of embryos, a silicon wafer having a desired concentration profile of oxygen precipitates by succeeding thermal annealing is manufactured with high reliability and reproducibility.
摘要:
There are provided a hydrodynamic bearing assembly and a method of manufacturing the same. The hydrodynamic bearing assembly includes: a lubricating oil filled so as to form a liquid-vapor interface between stationary members and rotating members; and a lipophilic coating formed on the liquid-vapor interface of the lubricating oil so as to prevent lubricating oil leakage. Therefore, the lipophilic coating is formed on the interface of the lubricating oil and an oil repellent material is formed on a surface of at least one of the stationary members and the rotating members, whereby the scattering and the leakage of the lubricating oil may be effectively prevented.
摘要:
By using a two-step RTP (rapid thermal processing) process, the wafer is provided which has an ideal semiconductor device region secured by controlling fine oxygen precipitates and OiSFs (Oxidation Induced Stacking Fault) located on the surface region of the wafer. By performing the disclosed two-step rapid thermal process, the distribution of defects can be accurately controlled and an ideal device active zone can be formed up to a certain distance from the surfaces of the wafer. In addition, it is possible to maximize the internal gettering (IG) efficiency by enabling the oxygen precipitates and the bulk stacking faults to have constant densities in the depth direction in an internal region of the wafer, that is, the bulk region. In order to obtain the constant concentration profile of the oxygen precipitates and the bulk stacking faults in the bulk region, the wafer is subjected to the aforementioned two-step rapid thermal process in a predetermined mixed gas atmosphere.
摘要:
By using a two-step RTP (rapid thermal processing) process, the wafer is provided which has an ideal semiconductor device region secured by controlling fine oxygen precipitates and OiSFs (Oxidation Induced Stacking Fault) located on the surface region of the wafer. By performing the disclosed two-step rapid thermal process, the distribution of defects can be accurately controlled and an ideal device active zone can be formed up to a certain distance from the surfaces of the wafer. In addition, it is possible to maximize the internal gettering (IG) efficiency by enabling the oxygen precipitates and the bulk stacking faults to have constant densities in the depth direction in an internal region of the wafer, that is, the bulk region. In order to obtain the constant concentration profile of the oxygen precipitates and the bulk stacking faults in the bulk region, the wafer is subjected to the aforementioned two-step rapid thermal process in a predetermined mixed gas atmosphere.
摘要:
An image sensor module comprises an image sensor including a pixel region picking up an image from light incident from the outside and a signal processing region having bumps formed in the outer portion of the image sensor so as to process an electrical signal with respect to the image picked up by the pixel region; and a board attached to the image sensor by a liquid adhesive and provided with a window such that the pixel region of the image sensor receives light, the board including: a first dummy pattern formed on at least a portion around the window; a circuit pattern formed in a position spaced in a predetermined distance outward from the first dummy pattern; and board-side pads electrically connected to the circuit pattern so as to come in contact with the bumps formed in the image sensor.
摘要:
In one embodiment, the method includes reproducing a management table from a recording medium. The management table includes combination information, and the combination information indicates secondary subtitles that are combinable with at least one secondary video stream. The secondary video stream represents the picture-in-picture presentation path with respect to a primary presentation path represented by a primary video stream. One of the secondary subtitles is selectively reproduced based on the combination information.
摘要:
A method and apparatus for reproducing data from a recording medium using a local storage is disclosed. A method and apparatus for downloading data associated with the recording medium from an external part, and reproducing the downloaded data is disclosed. A binding unit combined with the recording medium from among the downloaded data of the local storage is formed, and is combined with files of the recording medium using the binding information, such that the virtual package is formed. Data of the recording medium and/or data of the local storage are reproduced by the virtual package. If a specific file contained in the binding unit is equal to a specific file contained in the recording medium when the virtual package is formed, priority is assigned to the file of the binding unit so that the virtual package is formed. Therefore, data of the recording medium and data of the local storage can be effectively reproduced at the same time, resulting in greater convenience of a user.