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公开(公告)号：US5004918A
公开(公告)日：1991-04-02
申请号：US468750
申请日：1990-01-24
申请人： Katsushige Tsuno , Masao Inoue
发明人： Katsushige Tsuno , Masao Inoue
IPC分类号： H01J37/04 , H01J37/22 , H01J37/244 , H01J37/26 , H01J37/295
CPC分类号： H01J37/263 , H01J37/222 , H01J37/2955
摘要： A differential phase contrast scanning transmission electron microscope capable of obtaining a clear differential phase contrast image. This microscope includes a charge-coupled image sensor on which a diffraction image is projected. The region covered by the image sensor is divided into two parts by a straight line. The difference between the amounts of electrons impinging on these two parts is calculated, and the resulting differential signal is supplied to a display unit to display an image of the specimen.
摘要翻译： 能够获得清晰的差分相位差图像的差分相位扫描透射电子显微镜。 该显微镜包括投影衍射图像的电荷耦合图像传感器。 由图像传感器覆盖的区域由直线分成两部分。 计算入射在这两个部分上的电子量之间的差异，并将得到的差分信号提供给显示单元以显示样本的图像。
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公开(公告)号：US06960763B2
公开(公告)日：2005-11-01
申请号：US10738966
申请日：2003-12-17
CPC分类号： H01J37/05 , H01J37/153
摘要： An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.
摘要翻译： 具有减小像差的能量滤波器。 能量滤波器具有第一级滤波器，用于接收沿着光轴进入的电子束并且用于在垂直于光轴的一个方向上聚焦光束，以及沿着光轴位于第一级过滤器后面的第二级滤光器。 过滤器第一级聚焦的光束进入第二级过滤器。 在滤波器的第二阶段，电子束的轨道相对于焦点反转。 过滤器的两个阶段沿光轴取长度相同。 滤光器的第一和第二阶段分别具有沿着光轴的电和四极四极场。 这些四极场与光轴成45度的角度，以实现散光聚焦。
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公开(公告)号：US06844548B2
公开(公告)日：2005-01-18
申请号：US10360605
申请日：2003-02-07
IPC分类号： H01J37/05 , H01J37/26 , H01J37/147
CPC分类号： H01J37/261 , H01J2237/057 , H01J2237/262
摘要： A Wien filter is provided in which a less amount of secondary aberration is produced than conventional. This filter has 12 poles. These poles have front ends facing the optical axis. These front ends have a 12-fold rotational symmetry about the optical axis within the XY-plane perpendicular to the optical axis.
摘要翻译： 提供了一种维纳滤波器，其中比常规产生少量的二次像差。 该过滤器有12个极。 这些极具有面向光轴的前端。 这些前端在垂直于光轴的XY平面内围绕光轴具有12倍的旋转对称性。
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公开(公告)号：US06441378B1
公开(公告)日：2002-08-27
申请号：US09585852
申请日：2000-06-01
申请人： Katsushige Tsuno , Eric Munro , John Rouse
发明人： Katsushige Tsuno , Eric Munro , John Rouse
IPC分类号： G21K108
CPC分类号： H01J49/463 , H01J37/05 , H01J2237/055 , H01J2237/057
摘要： A compact magnetic energy filter having at least four magnetic fields to deflect the trajectory of an electron beam from the entrance window to the exit slit. A rotational symmetry axis is located midway between the second and third magnetic fields. The magnetic fields on the opposite sides of the rotational symmetry axis are opposite in polarity.
摘要翻译： 一种具有至少四个磁场以将电子束从入口窗口的轨迹偏转到出口狭缝的紧凑型磁能过滤器。 旋转对称轴位于第二和第三磁场之间的中间位置。 旋转对称轴的相对侧的磁场极性相反。
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公开(公告)号：US4384208A
公开(公告)日：1983-05-17
申请号：US220183
申请日：1980-12-23
申请人： Katsushige Tsuno
发明人： Katsushige Tsuno
IPC分类号： H01J37/14 , H01J37/141 , G01N23/00
CPC分类号： H01J37/141 , H01J37/14
摘要： An electron lens equipped with three magnetic pole pieces defining two gaps forms two magnetic fields. The magnetic fields are generated in said gaps by opposite and same strength excitation. The bore diameters of the middle and lower magnetic pole pieces are equal and the bore diameter of the upper magnetic pole piece is 1.5 to 5 times larger than those of the middle and lower magnetic pole pieces, so that radial (isotropic) distortion is eliminated and spiral (anisotropic) distortion is extremely reduced.
摘要翻译： 配备有限定两个间隙的三个磁极片的电子透镜形成两个磁场。 通过相反和相同的强度激励在所述间隙中产生磁场。 中，低磁极片的孔径相等，上磁极片的孔径比中，下磁极片的孔径大1.5〜5倍，消除了径向（各向同性）畸变， 螺旋（各向异性）畸变大大降低。
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公开(公告)号：US06307205B1
公开(公告)日：2001-10-23
申请号：US09264913
申请日：1999-03-09
申请人： Katsushige Tsuno
发明人： Katsushige Tsuno
IPC分类号： G21K108
摘要： There is disclosed an OMEGA energy filter comprising three magnetic field regions and producing small aberrations. The electron beam trajectory from the entrance window plane to the slit plane is continuously deflected into an omega-shaped form. Three magnetic field regions M1, M23, and M4 having deflection angles &PHgr;, 2&PHgr;, and &PHgr;, respectively, are arranged in turn from the incident side. The deflection angle &PHgr; is set such that 102°_. . . &PHgr;_. . . 115°. The radius of curvature R3 of the beam in the magnetic field region having the deflection angle 2&PHgr; is set less than the radius of curvature R4 of the beam in the magnetic field regions having the deflection angle &PHgr;.
摘要翻译： 公开了一种包含三个磁场区域并产生小像差的OMEGA能量滤波器。 从入口窗平面到狭缝平面的电子束轨迹连续偏转成欧米茄形。 分别从入射侧依次布置具有偏转角度＆amp; PHgr，2＆amp; PHgr和＆amp; PHgr的三个磁场区域M1，M23和M4。 偏转角＆PHgr 被设置为102°_。 。 。 ＆PHgr; _。 。 。 115°。 具有偏转角2＆amp; PHgr的磁场区域中的光束的曲率半径R3; 被设定为小于具有偏转角＆lt; PHgr的磁场区域中的光束的曲率半径R4。
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公开(公告)号：US5811801A
公开(公告)日：1998-09-22
申请号：US757209
申请日：1996-11-27
申请人： Katsushige Tsuno
发明人： Katsushige Tsuno
IPC分类号： H01J37/244 , H01J49/38 , H01J49/44 , H01J49/46
CPC分类号： H01J49/44
摘要： An omega-type energy filter of the B-type in which a beam of charged-particles is focused three times in a direction perpendicular to the direction of magnetic fields and twice in the direction of the magnetic fields. The geometry is so designed that this B-type produces smaller aberrations and larger energy dispersion than the A-type. The filter has four sector magnets M.sub.1, M.sub.2, M.sub.3, and M.sub.4 for successively deflecting the charged-particle beam passed through an entrance aperture and for directing the beam toward an exit slit. The entrance aperture and the exit slit are arranged symmetrically with respect to a central, symmetrical plane. The sector magnets M.sub.1 and M.sub.4 are arranged symmetrically with respect to the symmetrical plane. The sector magnets M.sub.2 and M.sub.3 are arranged symmetrically with respect to the symmetrical plane. The entrance aperture and the entrance face of the sector magnet M.sub.1 are separated by a distance of L.sub.5. The exit face of the sector magnet M.sub.4 and the exit slit are separated by the same distance of L.sub.5. Relations given by ##EQU1## are satisfied.
摘要翻译： B型的Ω型能量过滤器，其中带电粒子束在垂直于磁场方向的方向上聚焦三次，并且在磁场的方向上聚焦三次。 几何形状设计使得这种B型产生比A型更小的像差和更大的能量色散。 滤波器具有四个扇形磁体M1，M2，M3和M4，用于连续地偏转通过入口孔的带电粒子束并将光束引向出射狭缝。 入口孔和出口狭缝相对于中心对称的平面对称地布置。 扇形磁体M1和M4相对于对称平面对称地布置。 扇形磁体M2和M3相对于对称平面对称地布置。 扇形磁铁M1的入射孔和入射面分开L5的距离。 扇形磁铁M4和出口狭缝的出射面分开相同的距离L5。 由
给出的关系是满意的。 -
公开(公告)号：US4520264A
公开(公告)日：1985-05-28
申请号：US482880
申请日：1983-04-07
申请人： Katsushige Tsuno , Toshikazu Honda
发明人： Katsushige Tsuno , Toshikazu Honda
IPC分类号： H01J37/04 , H01J37/26 , H01J37/141
摘要： In an electron microscope, having intermediate lenses between the object and the projection lenses, the first and second intermediate lenses are used for rotating the final electron microscope image without changes in magnification. The desired angle signal indicating to azimuth angle .theta. is designated by an operator. The absolute magnetomotive force .vertline.J1.vertline. and .vertline.J2.vertline. of the first and second intermediate lenses are controlled by a lens control means in the relation that (.vertline.J1.vertline.-.vertline.J2.vertline.) is proportional to the azimuth angle .theta. and (.vertline.J1.vertline.+.vertline.J2.vertline.) is nearly proportional to the square of the azimuth angle .theta..
摘要翻译： 在电子显微镜中，在物体和投影透镜之间具有中间透镜，第一和第二中间透镜用于旋转最终的电子显微镜图像而不改变放大率。 指示方位角θ的期望角度信号由操作者指定。 关于第一和第二中间透镜的绝对磁动势| J1 |和| J2 |由透镜控制装置控制，其中（| J 1 | | | 2 |）与方位角θ成比例，并且（| + | J2|）几乎与方位角θ的平方成比例。
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公开(公告)号：US4468563A
公开(公告)日：1984-08-28
申请号：US395702
申请日：1982-07-06
申请人： Katsushige Tsuno , Katsuyoshi Ueno
发明人： Katsushige Tsuno , Katsuyoshi Ueno
IPC分类号： H01J37/141 , H01J37/00
CPC分类号： H01J37/141
摘要： An electron lens equipped with a ferromagnetic body disposed in at least one of the pole gaps of the electron lens which serves as a switchable bypass for magnetic flux. The said ferromagnetic body is magnetically saturated under strong excitation, thereby permitting switching between the double-gap lens and the single-gap lens to be effected by changing the excitation current.
摘要翻译： 一种电子透镜，其配备有铁磁体，该铁磁体设置在电子透镜的至少一个极间隙中，其用作磁通的可切换旁路。 所述铁磁体在强烈的激发下被磁饱和，从而允许通过改变激发电流来实现双间隙透镜和单间隙透镜之间的切换。
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公开(公告)号：US4450357A
公开(公告)日：1984-05-22
申请号：US310735
申请日：1981-10-13
申请人： Katsushige Tsuno
发明人： Katsushige Tsuno
IPC分类号： H01J37/141 , H01J29/64
CPC分类号： H01J37/141
摘要： An electron lens equipped with three magnetic pole pieces defining two gaps forming two magnetic fields of opposite polarities. The magnetomotive force of the magnetic field in the upper gap is fixed at a value close to the magnetomotive force providing a minimum focal length under the condition that the magnetomotive forces in both gaps are equal to each other, and a magnetomotive force of the magnetic field in the lower gap is larger than that of the magnetic field in the upper gap, so that not only radial and spiral distortions are eliminated but also the focal length is shortened.
摘要翻译： 电子透镜配备有三个磁极片，限定两个间隙，形成具有相反极性的两个磁场。 在两个间隙中的磁动势彼此相等的条件下，上部间隙中的磁场的磁动势被固定为接近于提供最小焦距的磁动势的值，并且磁场的磁动势 在较低的间隙中大于上部间隙中的磁场，从而不仅消除了径向和螺旋形的失真，而且缩短了焦距。
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