公开(公告)号：US20210198786A1

公开(公告)日：2021-07-01

申请号：US17133988

申请日：2020-12-24

申请人： KOREA INSTITUTE OF MACHINERY & MATERIALS

发明人： Min HUR ,  Woo Seok KANG ,  Dae-Woong KIM ,  Jinyoung LEE

IPC分类号： C23C16/44 ,  B08B7/00 ,  B08B5/00 ,  H01L21/67

摘要： A plasma cleaning apparatus includes a metal chamber, a gate assembly, a dielectric, and a high voltage electrode.
The metal chamber is connected to a vacuum tube connecting the process chamber and the vacuum pump, and is provided with a first opening. The gate assembly includes a gate support fixed to the metal chamber around the first opening and having a second opening, and a gate coupled to the gate support and having a first position closing the second opening and a second position opening the second opening switchable with each other. The dielectric is coupled to the outside of the gate support around the second opening, and the high voltage electrode is positioned on an outer surface of the dielectric.

公开(公告)号：US20150306540A1

公开(公告)日：2015-10-29

申请号：US14695161

申请日：2015-04-24

申请人： KOREA INSTITUTE OF MACHINERY & MATERIALS

发明人： Min HUR ,  Woo Seok Kang ,  Jae Ok Lee

IPC分类号： B01D53/32

CPC分类号： B01D53/323 ,  B01D2257/204 ,  B01D2257/2066 ,  B01D2259/818 ,  H05H1/2406 ,  H05H2001/2431 ,  H05H2001/2456 ,  Y02C20/30

摘要： A plasma reactor for abating hazardous materials by decomposing various hazardous materials in a front end part of a vacuum pump is provided. A plasma reactor for abating hazardous materials includes a ground electrode part, an insulator, and a driving electrode. The ground electrode part includes a first ground electrode located in a front end part of the vacuum pump and having a tubular shape, including a first end part facing the vacuum pump and a second end part at an opposite side thereof, and a second ground electrode connected to a side of the first ground electrode and having a tubular shape and transferring the process gas. The insulator is connectedly installed to the second end part. The driving electrode is fixed to an outer surface of the insulator, a driving voltage is applied while being connected to a power supply, and low pressure plasma is generated inside of the first ground electrode due to a voltage difference from the ground electrode part.

摘要翻译： 提供了一种用于通过分解真空泵的前端部分中的各种危险材料来消除有害物质的等离子体反应器。 用于减轻危险材料的等离子体反应器包括接地电极部分，绝缘体和驱动电极。 接地电极部分包括位于真空泵的前端部分中并且具有管状形状的第一接地电极，包括面对真空泵的第一端部和在其相对侧的第二端部，以及第二接地电极 连接到第一接地电极的一侧并且具有管状形状并传送处理气体。 绝缘体连接安装在第二端部。 驱动电极固定在绝缘体的外表面上，在与电源连接的同时施加驱动电压，并且由于与接地电极部分的电压差而在第一接地电极的内部产生低压等离子体。

公开(公告)号：US20150314233A1

公开(公告)日：2015-11-05

申请号：US14698938

申请日：2015-04-29

申请人： KOREA INSTITUTE OF MACHINERY & MATERIALS

发明人： Min HUR ,  Woo Seok KANG ,  Jae Ok LEE

IPC分类号： B01D53/32

CPC分类号： H01J37/32844 ,  B01D53/32 ,  B01D2259/818 ,  H01J37/32091 ,  H01J37/32834 ,  H05H1/46 ,  H05H2001/4667 ,  H05H2245/1215 ,  Y02C20/30 ,  Y02P70/605

摘要： A plasma reactor for abating hazardous materials included in process gases while being installed on an exhaust path of the process gases toward a vacuum pump is provided. The plasma reactor includes an insulator having a pipe shape through which process gases pass, a first ground electrode connected to a front end of the insulator facing the process chamber, a second ground electrode connected to a rear end of the insulator and provided with a facing part that faces a center of the inside of the insulator along the moving direction of process gases, and a driving electrode fixed to an external circumferential surface of the insulator and connected to a power supply applying an AC or RF voltage.

摘要翻译： 提供了一种等离子体反应器，用于在将工艺气体的排气路径安装到真空泵的同时，减少包含在工艺气体中的有害物质。 等离子体反应器包括具有工艺气体通过的管状绝缘体，连接到面向处理室的绝缘体的前端的第一接地电极，连接到绝缘体的后端的第二接地电极， 沿着处理气体的移动方向面对绝缘体内部的中心的部分，以及固定到绝缘体的外周表面并连接到施加AC或RF电压的电源的驱动电极。