公开(公告)号：US20190326559A1

公开(公告)日：2019-10-24

申请号：US16197531

申请日：2018-11-21

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Hee-Tae JUNG ,  Kangho Park ,  Woo-Bin Jung ,  Kiok Kwon

IPC: H01L51/56 ,  H01L51/00 ,  H01P11/00 ,  C08L101/00

Abstract: According to the present disclosure, a method of forming a pattern may include forming guide patterns on a substrate, wherein a trench is provided between the guide patterns, forming an organic-inorganic pattern including organic supramolecular structures in the trench, and annealing the organic-inorganic pattern, thereby aligning the dendrimer structures in parallel with one direction.

公开(公告)号：US10457012B2

公开(公告)日：2019-10-29

申请号：US14991959

申请日：2016-01-10

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Hee-Tae Jung ,  Kiok Kwon

IPC: B32B3/18 ,  B32B3/26 ,  B32B37/06 ,  B32B37/08 ,  C23C16/44 ,  H01L31/0224 ,  H01L31/18 ,  H01L33/42 ,  H01L51/00 ,  H01L51/44 ,  H01L51/52 ,  B32B37/02 ,  B32B37/14 ,  B32B38/10 ,  H01L51/42 ,  B32B37/24

Abstract: The present invention relates to a method for fabricating columnar or lamellar structures of organic molecules aligned into a large-area single domain, and more particularly, to a method for fabricating columnar or lamellar structures of organic molecules aligned into a large-area single domain, in which organic molecules having a random alignment due to their poly-domain structure are spatially confined between a bottom substrate and a top substrate, and then heated above the isotropic transition temperature of the organic molecules, thereby allowing the organic molecules to have a new alignment different from the initial alignment. Columnar or lamellar structures of organic molecules aligned into a large-area single domain, which are fabricated by the fabrication of the present invention, are large-area single domains having a perfectly columnar shape. Also, because the organic molecules are spatially confined between flat substrates regardless of the properties of the substrates and are subjected to a heat-treatment process, the fabrication method according to the present invention enables nanostructures to be formed in a rapid and efficient manner compared to alignments methods employing high temperatures or solvents.

公开(公告)号：US20160200068A1

公开(公告)日：2016-07-14

申请号：US14991959

申请日：2016-01-10

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Hee-Tae Jung ,  Kiok Kwon

IPC: B32B3/18 ,  B32B37/08 ,  C23C16/44 ,  B32B3/26 ,  H01L51/00 ,  H01L31/18 ,  H01L33/42 ,  H01L51/44 ,  H01L51/52 ,  B32B37/06 ,  H01L31/0224

CPC classification number: B32B3/18 ,  B32B3/26 ,  B32B37/02 ,  B32B37/06 ,  B32B37/08 ,  B32B37/144 ,  B32B38/10 ,  B32B2037/243 ,  B32B2255/24 ,  B32B2310/0831 ,  B32B2457/00 ,  C23C16/44 ,  H01L31/022466 ,  H01L31/1884 ,  H01L33/42 ,  H01L51/0035 ,  H01L51/0049 ,  H01L51/0076 ,  H01L51/0095 ,  H01L51/424 ,  H01L51/444 ,  H01L51/5206 ,  H01L51/5234 ,  H01L2933/0016 ,  Y02E10/549

Abstract: The present invention relates to a method for fabricating columnar or lamellar structures of organic molecules aligned into a large-area single domain, and more particularly, to a method for fabricating columnar or lamellar structures of organic molecules aligned into a large-area single domain, in which organic molecules having a random alignment due to their poly-domain structure are spatially confined between a bottom substrate and a top substrate, and then heated above the isotropic transition temperature of the organic molecules, thereby allowing the organic molecules to have a new alignment different from the initial alignment. Columnar or lamellar structures of organic molecules aligned into a large-area single domain, which are fabricated by the fabrication of the present invention, are large-area single domains having a perfectly columnar shape. Also, because the organic molecules are spatially confined between flat substrates regardless of the properties of the substrates and are subjected to a heat-treatment process, the fabrication method according to the present invention enables nanostructures to be formed in a rapid and efficient manner compared to alignments methods employing high temperatures or solvents.

Abstract translation: 本发明涉及一种用于制造排列成大面积单结构域的有机分子的柱状或层状结构的方法，更具体地，涉及一种用于制造排列成大面积单结构域的有机分子的柱状或层状结构的方法， 其中由于其多畴结构而具有随机取向的有机分子在空间上限制在底部基板和顶部基板之间，然后被加热到有机分子的各向同性转变温度以上，从而使有机分子具有新的取向 不同于初始对齐。 通过本发明的制造制造的排列成大面积单结构域的有机分子的柱状或层状结构是具有完全柱状形状的大面积单畴。 另外，由于有机分子在空间上被限制在平面基板之间，而与基板的性质无关，并且进行热处理工艺，根据本发明的制造方法使纳米结构能够以快速和有效的方式与 采用高温或溶剂的比对方法。